US4902530A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of correcting a pattern film
Assignee: Hitachi High-Tech Analysis Corp
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Filing: 1988-02-19
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Granted: 1990-02-20
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Expires: 2008-02-19
Abstract
Abstract According to the present invention, an apparatus for correcting a pattern film wherein an organic compound vapor is directed to a defect in a mask or IC while an ion beam is irradiated and scanned for depositing film on the white defect is furnished with a circuit for calculating film deposition area based on the reproduced image of a mask pattern, whereby elongating the total scanning time by inserting blank time in the scanning time, during which the ion beam is not irradiated (this operation is hereinafter referred to as blanking), when the ratio of the film deposition area to the ion beam current for an organic compound directed by a gas gun is lower than a predetermined level. Because of this operation, the molecule of the organic compound vapor is sufficiently deposited on the mask of IC surface, and therefore, a film having good light shielding or good conductance can be deposited with strong bonding.
Inventors
- 👤 Anto Yasaka
- 👤 Yoshitomo Nakagawa
- 👤 Mitsuyoshi Sato
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 12:24
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/68; G03F1/72; G03F1/74
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
155 words
A method of correcting a defect in the form of an opening in a pattern film on a substrate by depositing a film at the defect comprising steps of irradiating an ion beam on the pattern film to generate secondary charged particles from the pattern film, the secondary charged particles having an intensity distribution, displaying a mask pattern image based on the intensity distribution of the secondary charged particles, calculating a required film deposition area, directing a chemical compound vapor at the defect by a gas gun for depositing said chemical compound on the defect, concurrently irradiating and scanning an ion beam of a constant intensity at a constant speed for forming a film on the defect, and blanking the ion beam during scanning when the ratio of film deposition area to ion beam current for said organic compound is lower than a predetermined value whereby elongating the time duration for depositing said chemical compound.
Claim 2
Independent Claim
155 words
A method of correcting a defect in the form of an opening in a pattern film on a substrate by depositing a film at the defect comprising steps of irradiating an ion beam on the pattern film to generate secondary charged particles from the pattern film, the secondary charged particles having an intensity distribution, displaying a mask pattern image based on the intensity distribution of the secondary charged particles, calculating a required film deposition area, directing a chemical compound vapor at the defect by a gas gun for depositing said chemical compound on the defect, concurrently irradiating and scanning an ion beam of a constant intensity at a constant speed for forming a film on the defect, and blanking the ion beam during scanning when the ratio of film deposition area to ion beam current for said organic compound is lower than a predetermined value whereby elongating the time duration for depositing said chemical compound.
Claim 3
Dependent Claim
34 words
A method of correcting a defect of a pattern film according to claim 1, wherein said blanking is carried out at intervals of one frame or a plurality of frames of ion beam scanning.
Claim 4
Dependent Claim
34 words
A method of correcting a defect of a pattern film according to claim 2, wherein said blanking is carried out at intervals of one line or a plurality of lines of ion beam scanning.
Claim 5
Dependent Claim
34 words
A method of correcting a defect of a pattern film according to claim 1, wherein said blanking is carried out at intervals of one dot or a plurality of dots of ion beam scanning.
Claim 6
Independent Claim
145 words
A method of correcting a defect in the form of an opening in a pattern film on a substrate by depositing a film at the defect comprising steps of irradiating an ion beam on the pattern film to generate secondary charged particles from the pattern film, the secondary charged particles having an intensity distribution, displaying a mask pattern image based on the intensity distribution of the secondary charged particles, calculating a required film deposition area, directing a chemical compound vapor at the defect by a gas gun for depositing said chemical compound on the defect, concurrently irradiating and scanning an ion beam of a constant intensity at a constant speed for forming a film on the defect, and blanking the ion beam during scanning when the film deposition area is smaller than a predetermined value whereby elongating the time duration for depositing said chemical compound.
Claim 7
Independent Claim
145 words
A method of correcting a defect in the form of an opening in a pattern film on a substrate by depositing a film at the defect comprising steps of irradiating an ion beam on the pattern film to generate secondary charged particles from the pattern film, the secondary charged particles having an intensity distribution, displaying a mask pattern image based on the intensity distribution of the secondary charged particles, calculating a required film deposition area, directing a chemical compound vapor at the defect by a gas gun for depositing said chemical compound on the defect, concurrently irradiating and scanning an ion beam of a constant intensity at a constant speed for forming a film on the defect, and blanking the ion beam during scanning when the film deposition area is smaller than a predetermined value whereby elongating the time duration for depositing said chemical compound.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-02-19 | 1993-08-21 | 1994-02-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-02-19 | 1997-08-21 | 1998-02-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-02-19 | 2001-08-21 | 2002-02-20 | $7700.00 | Window Closed / Lapsed |