US4901667A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Surface treatment apparatus
Assignee: Hitachi Ltd
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Filing: 1986-08-01
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Granted: 1990-02-20
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Expires: 2006-08-01
Abstract
Abstract A surface treatment apparatus comprising a vacuum chamber, means for introducing a gas into the vacuum chamber, a gas furnace for heating and activating the gas while it is being introduced, apertures for injecting the heated gas, and a substrate stage for holding a substrate of which the surface is to be treated by the injected gas. The gas that is heated and activated is blown onto the surface of the substrate to treat the surface without causing the surface to be damaged. Therefore, the apparatus can be employed very effectively for a process for producing semiconductor elements.
Inventors
- 👤 Keizo Suzuki
- 👤 Ken Ninomiya
- 👤 Shigeru Nishimatsu
- 👤 Osami Okada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 19:13
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/452
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
122 words
A surface treatment apparatus comprising: a vacuum chamber; gas introducing means for introducing a gas into said vacuum chamber; gas heating means for heating said gas and activating said gas to make active particles while the gas is being introduced, said gas heating means comprising a gas furnace and a heater for heating said gas furnace, gas injecting means for injecting said activated gas into said vacuum chamber to form a beam of said active particles; and substrate holding means installed in said vacuum chamber to hold a substrate of which a surface is to be treated in a position opposite to said gas injecting means, to allow said beam to impinge on said surface in a perpendicular direction to said surface.
Claim 2
Dependent Claim
122 words
A surface treatment apparatus comprising: a vacuum chamber; gas introducing means for introducing a gas into said vacuum chamber; gas heating means for heating said gas and activating said gas to make active particles while the gas is being introduced, said gas heating means comprising a gas furnace and a heater for heating said gas furnace, gas injecting means for injecting said activated gas into said vacuum chamber to form a beam of said active particles; and substrate holding means installed in said vacuum chamber to hold a substrate of which a surface is to be treated in a position opposite to said gas injecting means, to allow said beam to impinge on said surface in a perpendicular direction to said surface.
Claim 3
Dependent Claim
17 words
A surface treatment apparatus according to claim 1, wherein said gas injecting means exists in said heater.
Claim 4
Dependent Claim
35 words
A surface treatment apparatus according to claim 1, wherein said gas injecting means includes apertures between a side facing said gas furnace and another side facing said substrate, said apertures being different at each side.
Claim 5
Dependent Claim
19 words
A surface treatment apparatus according to claim 1, wherein said gas furnace is provided with a bypass exhaust line.
Claim 6
Dependent Claim
20 words
A surface treatment apparatus according to claim 1, wherein said heater and said gas furnace are separable from each other.
Claim 7
Dependent Claim
28 words
A surface treatment apparatus according to claim 1, wherein said gas furnace is made of a material selected from any one of quartz, alumina, sapphire, carbon and nickel.
Claim 8
Dependent Claim
29 words
A surface treatment apparatus according to claim 1, wherein said gas that is introduced consists of at least one of halogen atoms or partly of halogen atoms in molecules.
Claim 9
Dependent Claim
22 words
A surface treatment apparatus according to claim 1, wherein said gas that is introduced consists of least one of oxygen or nitrogen.
Claim 10
Dependent Claim
46 words
A surface treatment apparatus according to claim 1, wherein a collimator is provided between said gas injecting means and said substrate for collimating said beam, said collimator having a plurality of holes which are parallel to an axis connecting said gas injecting means and said substrate.
Claim 11
Dependent Claim
22 words
A surface treatment apparatus according to claim 1, wherein a shielding plate is provided between said gas heating means and said substrate.
Claim 12
Dependent Claim
17 words
A surface treatment apparatus according to claim 1, wherein said heater is disposed outside said vacuum chamber.
Claim 13
Dependent Claim
54 words
A surface treatment apparatus according to claim 1, wherein said vacuum chamber is divided into two sections, said gas heating means is provided in a first section of said vacuum chamber and said substrate is placed in a second section of said vacuum chamber, and said sections of said vacuum chamber are differentially evacuated.
Claim 14
Dependent Claim
80 words
A surface treatment apparatus according to claim 1, wherein said vacuum chamber is divided into two sections, said gas heating means is provided in a first section of said vacuum chamber and said substrate is placed in a second section of said vacuum chamber, and a gate valve is provided between said first section of said vacuum chamber in which said gas heating means is provided and said second section of said vacuum chamber in which said substrate is placed.
Claim 15
Dependent Claim
35 words
A surface treatment apparatus according to claim 1, wherein an aperture of said gas injection means has side walls which define an opening with a cross-sectional area which increases in a direction toward said substrate.
Claim 16
Dependent Claim
23 words
A surface treatment apparatus according to claim 12, wherein said first and second sections of said vacuum chamber are connected by a bellows.
Claim 17
Dependent Claim
15 words
A surface treatment apparatus according to claim 1, wherein said gas furnace includes barrier walls.
Claim 18
Dependent Claim
16 words
A surface treatment apparatus according to claim 1, wherein said gas furnace includes a filler material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-02-19 | 1993-08-21 | 1994-02-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-02-19 | 1997-08-21 | 1998-02-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-02-19 | 2001-08-21 | 2002-02-20 | $7700.00 | Window Closed / Lapsed |