US4897290A
Expired / Lapsed
US
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Method for manufacturing the substrate for liquid crystal display
Assignee: Konica Minolta Inc
•
Filing: 1989-03-15
•
Granted: 1990-01-30
•
Expires: 2009-03-15
Abstract
Abstract A method for fabricating an alignment layer on a substrate of a liquid crystal display device which includes aligning the center line of the substrate such that it lies substantially along a line that passes through the center of and perpendicular to a linear source. The substrate is then rotated about its center line to a desired angle, and the source material is vacuum deposited onto the substrate.
Inventors
- 👤 Toru Terasaka
- 👤 Kazuo Arai
- 👤 Kazuo Asano
- 👤 Shinichi Nishi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 19:17
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1337; G02F1/133734; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/50
Claims Analysis
Total Claims: 67
Claim 1
Independent Claim
159 words
A substrate including an alignment layer useful in a liquid crystal display device fabricated by the steps of: disposing a linear source in a vacuum chamber, said linear source having a linear dimension and a center point substantially half-way along said linear dimension; disposing at least one substrate having a centerline, a center and a first surface in said vacuum chamber in fixed space relation to said linear source so that said first surface faces and a centerline of the substrate and the linear source are coplanar with said linear source and said center of said substrate lies substantially along a line through said center of said linear source and perpendicular to said linear source, said substrate being rotated about said centerline to a desired angle θ, and the linear dimension of said linear source and a linear dimesion of said substrate projected onto said linear source being substantially equal; depositing material from said linear source onto said substrate.
Claim 2
Dependent Claim
159 words
A substrate including an alignment layer useful in a liquid crystal display device fabricated by the steps of: disposing a linear source in a vacuum chamber, said linear source having a linear dimension and a center point substantially half-way along said linear dimension; disposing at least one substrate having a centerline, a center and a first surface in said vacuum chamber in fixed space relation to said linear source so that said first surface faces and a centerline of the substrate and the linear source are coplanar with said linear source and said center of said substrate lies substantially along a line through said center of said linear source and perpendicular to said linear source, said substrate being rotated about said centerline to a desired angle θ, and the linear dimension of said linear source and a linear dimesion of said substrate projected onto said linear source being substantially equal; depositing material from said linear source onto said substrate.
Claim 3
Dependent Claim
44 words
A substrate made by the process recited in claim 1, wherein said step of depositing material from said linear source onto said substrate includes the steps of: drawing a vacuum in said vacuum chamber; and generating a flow of particles from said linear source.
Claim 4
Dependent Claim
44 words
A substrate made by the process recited in claim 1, wherein said step of disposing at least one substrate in fixed spaced relation to said linear source includes the step of disposing a plurality of substrates in fixed spaced relation to said linear source.
Claim 5
Dependent Claim
68 words
A substrate made by the process recited in claim 1, wherein the step of heating said linear source to vaporize material from said linear source includes the step of heating said linear source to vaporize material from said linear source to form a vapor until said vapor is deposited upon said substrate to form a deposition layer of a thickness on the order of 100 to 2500 Angstroms.
Claim 6
Dependent Claim
32 words
A substrate made by the process recited in claim 1, wherein said linear source is selected from the group including SiO, MgO, MgF 2 , imide type polymers and amide type polymers.
Claim 7
Dependent Claim
187 words
A substrate including an alignment layer useful in a liquid crystal display device, the alignment layer being made by a process comprising: disposing a linear source in a vacuum chamber, said linear source having a linear dimension and a center point substantially half-way along said linear dimension; disposing a control member having at least one linear opening having a center point parallel to the linear source so that a line connecting the center of the linear source and the center of the opening is perpendicular to the linear source; disposing at least one substrate having a centerline, a center and a first surface in said vacuum chamber in fixed spaced relation to said linear source and said opening, said opening being disposed between the substrate and the linear source; moving the substrate relative to both the linear source and control member, keeping the substrate parallel to the linear source and establishing a desired angle θ between a line connecting the center of the linear source to the center of the opening and the first surface of the substrate; depositing material from said linear source onto said substrate.
Claim 8
Dependent Claim
187 words
A substrate including an alignment layer useful in a liquid crystal display device, the alignment layer being made by a process comprising: disposing a linear source in a vacuum chamber, said linear source having a linear dimension and a center point substantially half-way along said linear dimension; disposing a control member having at least one linear opening having a center point parallel to the linear source so that a line connecting the center of the linear source and the center of the opening is perpendicular to the linear source; disposing at least one substrate having a centerline, a center and a first surface in said vacuum chamber in fixed spaced relation to said linear source and said opening, said opening being disposed between the substrate and the linear source; moving the substrate relative to both the linear source and control member, keeping the substrate parallel to the linear source and establishing a desired angle θ between a line connecting the center of the linear source to the center of the opening and the first surface of the substrate; depositing material from said linear source onto said substrate.
Claim 9
Dependent Claim
44 words
A substrate made by the process recited in claim 6, wherein said step of depositing material from said linear source onto said substrate includes the steps of: drawing a vacuum in said vacuum chamber; and generating a flow of particles from said linear source.
Claim 10
Dependent Claim
52 words
A substrate made by the process recited in claim 6, wherein said step of disposing at least one substrate in fixed spaced relation to said linear source includes the step of disposing a plurality of substrates in fixed spaced relation to said linear source, said control member having a plurality of openings.
Claim 11
Dependent Claim
69 words
A substrate made by the process recited in claim 6, further comprising a step of heating said linear source to vaporize material from said linear source including the step of heating said linear source to vaporize material from said linear source to form a vapor until said vapor is deposited upon said substrate to form a deposition layer of a thickness on the order of 100 to 2500 Angstroms.
Claim 12
Dependent Claim
30 words
A substrate made by the process recited in claim 6, wherein said linear source is selected from a group including SiO, MgO, MgF 2 , imide-type polymers and amide-type polymers.
Claim 13
Dependent Claim
21 words
A substrate made by the process recited in claim 6, wherein said control member includes at least one directional control plate.
Claim 14
Dependent Claim
23 words
A substrate made by the process recited in claim 11, wherein said directional control plate is oriented vertically relative to said linear opening.
Claim 15
Independent Claim
162 words
A method for fabricating an alignment layer on a substrate useful in a liquid crystal display device, the method comprising: disposing a linear source in a vacuum chamber, said linear source having a linear dimension and a center point substantially half-way along said linear dimension; disposing at least one substrate having a centerline, a center and a first surface in said vacuum chamber in fixed spaced relation to said linear source so that said first surface faces and a center line of the substrate and the linear source are co-planar with said linear source and said center of said substrate lies substantially along a line through said center of said linear source and perpendicular to said linear source, said substrate being rotated about said centerline to a desired angle θ, and the linear dimension of said linear source and a linear dimension of said substrate projected onto said linear source being substantially equal; depositing material from said linear source onto said substrate.
Claim 16
Independent Claim
162 words
A method for fabricating an alignment layer on a substrate useful in a liquid crystal display device, the method comprising: disposing a linear source in a vacuum chamber, said linear source having a linear dimension and a center point substantially half-way along said linear dimension; disposing at least one substrate having a centerline, a center and a first surface in said vacuum chamber in fixed spaced relation to said linear source so that said first surface faces and a center line of the substrate and the linear source are co-planar with said linear source and said center of said substrate lies substantially along a line through said center of said linear source and perpendicular to said linear source, said substrate being rotated about said centerline to a desired angle θ, and the linear dimension of said linear source and a linear dimension of said substrate projected onto said linear source being substantially equal; depositing material from said linear source onto said substrate.
Claim 17
Dependent Claim
41 words
A method as claimed in claim 13, wherein said step of depositing material from said linear source onto said substrate includes the steps of: drawing a vacuum in said vacuum chamber; and generating a flow of particles from said linear source.
Claim 18
Dependent Claim
41 words
A method as claimed in claim 13, wherein said step of disposing at least one substrate in fixed spaced relation to said linear source includes the step of disposing a plurality of substrates in fixed space relation to said linear source.
Claim 19
Dependent Claim
60 words
A method as claimed in claim 13, wherein said step of disposing at least one substrate in said vacuum chamber includes the step of disposing at least one substrate in said vacuum chamber wherein said substrate has a linear dimension projected on said linear source on the order of 0.8 to 1.2 times the linear dimension of said linear source.
Claim 20
Dependent Claim
58 words
A method as claimed in claim 13, wherein said step of disposing at least one substrate in said vacuum chamber includes the step of disposing said substrate at a distance from said centerline of said linear source on the order of 2 to 6 times the linear dimension of said of said substrate projected onto said linear source.
Claim 21
Dependent Claim
28 words
A method as claimed in claim 13, wherein the step of disposing a linear source in a vacuum chamber includes the step of disposing an intermittent linear source.
Claim 22
Dependent Claim
66 words
A method as claimed in claim 13, further comprising a step of heating said linear source to vaporize material from said linear source including the step of heating said linear source to vaporize material from said linear source to form a vapor until said vapor is deposited upon said substrate to form a deposition layer of a thickness on the order of 100 to 2500 Angstroms.
Claim 23
Dependent Claim
39 words
A method as claimed in claim 13, further including the step of disposing a control member having a linear opening between said linear source and said substrate, said linear opening allowing the passage of vapor from said linear source.
Claim 24
Dependent Claim
22 words
A method as claimed in claim 20, wherein said linear source and said linear opening are disposed substantially parallel to each other.
Claim 25
Dependent Claim
29 words
A method as claimed in claim 13, wherein said linear source is selected from the group including SiO, MgO, MgF 2 , imide type polymers and amide type polymers.
Claim 26
Dependent Claim
20 words
A method as claimed in claim 13, wherein said desired angle is in the range of 1 to 50 degrees.
Claim 27
Dependent Claim
20 words
A method as claimed in claim 23, wherein said desired angle is in the range of 5 to 15 degrees.
Claim 28
Dependent Claim
20 words
A method as claimed in claim 23, wherein said desired angle is in the range of 25 to 45 degrees.
Claim 29
Independent Claim
186 words
A method for fabricating an alignment layer on a substrate useful in a liquid crystal display device, the method comprising: disposing a linear source in a vacuum chamber, said linear source having a linear dimension and a center point substantially half-way along said linear dimension; disposing a control member having at least one linear opening having a center point parallel to the linear source so that a line connecting the center of the linear source and the center of the opening is perpendicular to the linear source; disposing at least one substrate having a centerline, a center and a first surface in said vacuum chamber in fixed spaced relation to said linear source and said opening, said opening being disposed between the substrate and the linear source; moving the substrate relative to both the linear source and the control member, keeping the substrate parallel to the linear source and establishing a desired angle θ between a line connecting the center of the linear source to the center of the opening and the first surface of the substrate; depositing material from said linear source onto said substrate.
Claim 30
Independent Claim
186 words
A method for fabricating an alignment layer on a substrate useful in a liquid crystal display device, the method comprising: disposing a linear source in a vacuum chamber, said linear source having a linear dimension and a center point substantially half-way along said linear dimension; disposing a control member having at least one linear opening having a center point parallel to the linear source so that a line connecting the center of the linear source and the center of the opening is perpendicular to the linear source; disposing at least one substrate having a centerline, a center and a first surface in said vacuum chamber in fixed spaced relation to said linear source and said opening, said opening being disposed between the substrate and the linear source; moving the substrate relative to both the linear source and the control member, keeping the substrate parallel to the linear source and establishing a desired angle θ between a line connecting the center of the linear source to the center of the opening and the first surface of the substrate; depositing material from said linear source onto said substrate.
Claim 31
Dependent Claim
48 words
A method as claimed in claim 26, wherein said step of disposing at least one substrate in fixed relation to said linear source includes the step of disposing a plurality of substrates in fixed spaced relation to said linear source, said control member including a plurality of openings.
Claim 32
Dependent Claim
18 words
A method as claimed in claim 26, wherein said control member includes at least one directional control plate.
Claim 33
Dependent Claim
20 words
A method as claimed in claim 28, wherein said directional control plate is oriented vertically relative to said linear opening.
Claim 34
Dependent Claim
41 words
A method as claimed in claim 26, wherein said step of depositing material from said linear source onto said substrate includes the steps of: drawing a vacuum in said vacuum chamber; and generating a flow of particles from said linear source.
Claim 35
Dependent Claim
60 words
A method as claimed in claim 26, wherein said step of disposing at least one substrate in said vacuum chamber includes the step of disposing at least one substrate in said vacuum chamber wherein said substrate has a linear dimension projected on said linear source on the order of 0.8 to 1.2 times the linear dimension of said linear source.
Claim 36
Dependent Claim
56 words
A method as claimed in claim 26, wherein said step of disposing at least one substrate in said vacuum chamber includes the step of disposing said substrate at a distance from said centerline of said linear source on the order of 2 to 6 times the linear dimension of said substrate projected onto said linear source.
Claim 37
Dependent Claim
28 words
A method as claimed in claim 26, wherein the step of disposing a linear source in a vacuum chamber includes the step of disposing an intermittent linear source.
Claim 38
Dependent Claim
65 words
A method as claimed in claim 26, wherein the step of heating said linear source to vaporize material from said linear source includes the step of heating said linear source to vaporize material from said linear source to form a vapor until said vapor is deposited upon said substrate to form a deposition layer of a thickness on the order of 100 to 2500 Angstroms.
Claim 39
Dependent Claim
29 words
A method as claimed in claim 26, wherein said linear source is selected from the group including SiO, MgO, MgF 2 , imide type polymers and amide type polymers.
Claim 40
Dependent Claim
20 words
A method as claimed in claim 26, wherein said desired angle is in the range of 1 to 50 degrees.
Claim 41
Dependent Claim
20 words
A method as claimed in claim 36, wherein said desired angle is in the range of 5 to 15 degrees.
Claim 42
Dependent Claim
20 words
A method as claimed in claim 36, wherein said desired angle is in the range of 25 to 45 degrees.
Claim 43
Independent Claim
191 words
An apparatus for fabricating an alignment layer on a substrate useful in a liquid crystal display device, the apparatus comprising: linear source holding means for holding a linear source in a vacuum chamber, said linear source having a linear dimension and a centerpoint substantially half-way along its linear dimension; substrate holding means for holding at least one substrate in said vacuum chamber in fixed spaced relation to said linear source, said substrate having a center line, a center and a first surface, said substrate holding means holding said substrate so that said first surface faces and a centerline of the substrate and the linear source are co-planar with said linear source and said center of said substrate lies along a line through said center of said linear source and perpendicular to said linear source, the linear dimension of said linear source and a linear dimension of said substrate projected onto said linear source being substantially equal, and said substrate being rotated about said center line to a desired angle θ; means for drawing a vacuum in said vacuum chamber; and means for generating a flow of particles from said linear source.
Claim 44
Independent Claim
191 words
An apparatus for fabricating an alignment layer on a substrate useful in a liquid crystal display device, the apparatus comprising: linear source holding means for holding a linear source in a vacuum chamber, said linear source having a linear dimension and a centerpoint substantially half-way along its linear dimension; substrate holding means for holding at least one substrate in said vacuum chamber in fixed spaced relation to said linear source, said substrate having a center line, a center and a first surface, said substrate holding means holding said substrate so that said first surface faces and a centerline of the substrate and the linear source are co-planar with said linear source and said center of said substrate lies along a line through said center of said linear source and perpendicular to said linear source, the linear dimension of said linear source and a linear dimension of said substrate projected onto said linear source being substantially equal, and said substrate being rotated about said center line to a desired angle θ; means for drawing a vacuum in said vacuum chamber; and means for generating a flow of particles from said linear source.
Claim 45
Dependent Claim
20 words
An apparatus as claimed in claim 39, wherein said substrate holding means includes means to hold a plurality of substrates.
Claim 46
Dependent Claim
35 words
An apparatus as claimed in claim 39, wherein said substrate has a maximum linear dimension projected on said linear surface on the order of 0.8 to 1.2 times the linear dimension of said linear source.
Claim 47
Dependent Claim
39 words
An apparatus as claimed in claim 39, wherein the distance between said linear source and said substrate at said centerline is on the order of 2 to 6 times the linear dimension said substrate projected onto said linear source.
Claim 48
Dependent Claim
16 words
An apparatus as claimed in claim 39, wherein said linear source is an intermittent linear source.
Claim 49
Dependent Claim
41 words
An apparatus as claimed in claim 39, wherein said linear source is heated to form a vapor and said vapor is deposited on said substrate to form a deposition layer of a thickness on the order of 100 to 2500 Angstroms.
Claim 50
Dependent Claim
36 words
An apparatus as claimed in claim 39, further including a control member having a linear opening disposed between said linear source and said substrate, said linear opening allowing the passage of vapor from said linear source.
Claim 51
Dependent Claim
22 words
An apparatus as claimed in claim 45, wherein said linear source and said linear opening are disposed substantially parallel to each other.
Claim 52
Dependent Claim
29 words
An apparatus as claimed in claim 39, wherein said linear source is selected from the group including SiO, MgO, MgF 2 , imide type polymers and amide type polymers.
Claim 53
Dependent Claim
20 words
An apparatus as claimed in claim 39, wherein said desired angle is in the range of 1 to 50 degrees.
Claim 54
Dependent Claim
20 words
An apparatus as claimed in claim 48, wherein said desired angle is in the range of 5 to 15 degrees.
Claim 55
Dependent Claim
20 words
An apparatus as claimed in claim 48, wherein said desired angle is in the range of 25 to 45 degrees.
Claim 56
Independent Claim
204 words
An apparatus for fabricating an alignment layer on a substrate useful in a liquid crystal display device, the apparatus comprising: a linear source disposed in a vacuum chamber having a linear dimension and a center point substantially half-way along said linear dimension; a control member having at least one linear opening having a center point parallel to the linear source so that a line connecting the center of the linear source and the center of the opening is perpendicular to the linear source; holding means for holding at least one substrate having a centerline, a center and a first surface in said vacuum chamber in fixed spaced relation to said linear source and said opening, said opening being disposed between the substrate and the linear source; moving means for moving the holding means and the substrate relative to both the linear source and the control member, keeping the substrate parallel to the linear source and establishing a desired angle θ between a line connecting the center of the linear source to the center of the opening and the first surface of the substrate. means for drawing a vacuum in said vacuum chamber, and means for generating a flow of particles from said linear source.
Claim 57
Independent Claim
204 words
An apparatus for fabricating an alignment layer on a substrate useful in a liquid crystal display device, the apparatus comprising: a linear source disposed in a vacuum chamber having a linear dimension and a center point substantially half-way along said linear dimension; a control member having at least one linear opening having a center point parallel to the linear source so that a line connecting the center of the linear source and the center of the opening is perpendicular to the linear source; holding means for holding at least one substrate having a centerline, a center and a first surface in said vacuum chamber in fixed spaced relation to said linear source and said opening, said opening being disposed between the substrate and the linear source; moving means for moving the holding means and the substrate relative to both the linear source and the control member, keeping the substrate parallel to the linear source and establishing a desired angle θ between a line connecting the center of the linear source to the center of the opening and the first surface of the substrate. means for drawing a vacuum in said vacuum chamber, and means for generating a flow of particles from said linear source.
Claim 58
Dependent Claim
18 words
An apparatus as claimed in claim 51, wherein said control member has at least one directional control plate.
Claim 59
Dependent Claim
19 words
An apparatus as claimed in claim 52, wherein said directional control plate is oriented vertically relative to said opening.
Claim 60
Dependent Claim
28 words
An apparatus as claimed in claim 51, wherein said substrate holding means includes means to hold a plurality of substrates, said control member having a plurality of openings.
Claim 61
Dependent Claim
35 words
An apparatus as claimed in claim 51, wherein said substrate has a maximum linear dimension projected on said linear surface on the order of 0.8 to 1.2 times the linear dimension of said linear source.
Claim 62
Dependent Claim
39 words
An apparatus as claimed in claim 51, wherein the distance between said linear source and said substrate at said centerline is on the order of 2 to 6 times the linear dimension said substrate projected onto said linear source.
Claim 63
Dependent Claim
16 words
An apparatus as claimed in claim 51, wherein said linear source is an intermittent linear source.
Claim 64
Dependent Claim
29 words
An apparatus as claimed in claim 51, wherein said linear source is selected from the group including SiO, MgO, MgF 2 , imide type polymers and amide type polymers.
Claim 65
Dependent Claim
20 words
An apparatus as claimed in claim 51, wherein said desired angle is in the range of 1 to 50 degrees.
Claim 66
Dependent Claim
20 words
An apparatus as claimed in claim 59, wherein said desired angle is in the range of 5 to 15 degrees.
Claim 67
Dependent Claim
20 words
An apparatus as claimed in claim 59, wherein said desired angle is in the range of 25 to 45 degrees.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-01-29 | 1993-07-31 | 1994-01-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-01-29 | 1997-07-31 | 1998-01-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-01-29 | 2001-07-31 | 2002-01-30 | $7700.00 | Window Closed / Lapsed |