US4896930A — Optical functional device of an optical waveguide…

Claim 1

Independent Claim 107 words

In an optical functional device of a unit mode waveguide, wherein the improvement comprises an optical waveguide embedded into a main surface of a first substrate and which includes a channel formed as a slit in the main surface of said first substrate and which slit is of a predetermined length such that it is completely covered by a main surface of a second substrate completely sealing an exposed part of said slit which forms said channel thereby forming a hollow part which is filled with a charge of a nonlinear optical material, wherein there is formed a waveguide for allowing propagation of a unit mode signal.

Claim 2

Dependent Claim 107 words

In an optical functional device of a unit mode waveguide, wherein the improvement comprises an optical waveguide embedded into a main surface of a first substrate and which includes a channel formed as a slit in the main surface of said first substrate and which slit is of a predetermined length such that it is completely covered by a main surface of a second substrate completely sealing an exposed part of said slit which forms said channel thereby forming a hollow part which is filled with a charge of a nonlinear optical material, wherein there is formed a waveguide for allowing propagation of a unit mode signal.

Claim 3

Dependent Claim 62 words

An optical functional device of a unit mode waveguide according to claim 1, wherein the refractive indices along a wall surface of said channel in said first substrate and that part of the main surface of said second substrate covering at least said exposed part of said channel are lower than that of said organic nonlinear optical material in said hollow part.

Claim 4

Dependent Claim 60 words

An optical functional device of a unit mode waveguide according to claim 1, wherein said first substrate comprises silicon, said channel having a wall surface which is thermally oxidized and wherein said second substrate covering at least said exposed part of said channel is a glass plate or a substrate on said main surface of which glass has been deposited.

Claim 5

Dependent Claim 44 words

An optical functional device of a unit mode waveguide according to claim 1, wherein said first and second substrates are composed of silicon and wherein those portions of said first and second silicon substrates forming a wall surface of said channel are thermally oxidized.

Claim 6

Dependent Claim 59 words

An optical functional device of a unit mode waveguide according to claim 1, wherein said first substrate forming thereon said channel comprises a glass plate and said second substrate covering said exposed part of said channel comprises silicon and a portion of said main surface of said second substrate covering said exposed part of said channel being thermally oxidized.

Claim 7

Dependent Claim 54 words

An optical functional device of a unit mode waveguide according to claim 1, wherein said second substrate comprises a plate part, and wherein a main surface of said plate part is laminated and bonded with the surface of said first substrate thereby completely sealing said exposed part so as to form said hollow part.

Claim 8

Dependent Claim 44 words

An optical functional device of a unit mode waveguide according to claim 1, wherein the main surface of said second substrate is adhered to said main surface of said first substrate thereby completely sealing said exposed part so as to form said hollow part.

Claim 9

Dependent Claim 158 words

In an optical functional device of a unit mode waveguide, wherein the improvement comprises an optical waveguide embedded into a main surface of a first substrate and which includes a channel formed as a slit in the main surface of said first substrate and which slit is of a predetermined length such that it is completely covered by a main surface of a second substrate for completely sealing an exposed part of said slit which forms said channel thereby forming a hollow part which is filled with a charge of a nonlinear optical material, said second substrate has an opening at a centrally located portion along said main surface thereof and a length corresponding to said predetermined length so as to overlie said exposed part and includes a substance formed so as to fill said opening and seal said exposed part of said channel, wherein there is formed a waveguide for allowing propagation of a unit mode signal.

Claim 10

Dependent Claim 158 words

In an optical functional device of a unit mode waveguide, wherein the improvement comprises an optical waveguide embedded into a main surface of a first substrate and which includes a channel formed as a slit in the main surface of said first substrate and which slit is of a predetermined length such that it is completely covered by a main surface of a second substrate for completely sealing an exposed part of said slit which forms said channel thereby forming a hollow part which is filled with a charge of a nonlinear optical material, said second substrate has an opening at a centrally located portion along said main surface thereof and a length corresponding to said predetermined length so as to overlie said exposed part and includes a substance formed so as to fill said opening and seal said exposed part of said channel, wherein there is formed a waveguide for allowing propagation of a unit mode signal.

Claim 11

Dependent Claim 74 words

An optical functional device of a unit mode waveguide according to claim 8, wherein said first substrate forming said channel comprises silicon, said channel having a wall surface which is thermally oxidized and wherein said second substrate which has an opening disposed along said channel length overlying said exposed part of said channel is a thermally oxidized silicon layer and the substance which closes the opening of said second substrate is a glass layer.

Claim 12

Dependent Claim 54 words

An optical device of a unit mode waveguide according to claim 9, wherein said channel has a wall surface along the length of the slit which includes a silicon dioxide optical buffer layer for providing said wall surface with an effective refractive index lower than said organic nonlinear optical material in said hollow part.

Claim 13

Dependent Claim 30 words

An optical device of a unit mode waveguide according to claim 10, wherein said channel slit has a width larger than the width of the opening of said second substrate.

Claim 14

Dependent Claim 28 words

An optical device of a unit mode waveguide according to claim 11, wherein said first substrate is a silicon substrate including regions for use as electrode lead regions.

Claim 15

Dependent Claim 34 words

An optical functional device of a unit mode waveguide according to claim 1, wherein said first substrate is a multi-layer silicon substrate which comprises complementary conductivity type regions, and further including electrode lead regions.

Claim 16

Dependent Claim 65 words

An optical functional device of a unit mode waveguide according to claim 13, wherein said channel has a wall surface along the length of the slit which includes a silicon dioxide optical buffer layer and at least that part of the main surface of said second substrate covering said channel has a refractive index lower than said organic nonlinear optical material in said hollow part.

Claim 17

Dependent Claim 21 words

An optical functional device of a unit mode waveguide according to claim 14, wherein said second substrate is a glass plate.

Claim 18

Dependent Claim 30 words

An optical functional device of a unit mode waveguide according to claim 14, wherein said second substrate is a substrate on said main surface of which glass has been deposited.

Claim 19

Dependent Claim 27 words

An optical functional device of a unit mode waveguide according to claim 4, wherein said first substrate includes electrode lead regions formed in the main surface thereof.

Claim 20

Dependent Claim 26 words

An optical functional device of a unit mode waveguide according to claim 5, wherein said second substrate electrode lead regions formed in the main surface thereof.

Claim 21

Dependent Claim 156 words

In an optical functional device of a unit mode optical waveguide wherein the improvement comprises an optical waveguide for transmitting optical information therethrough in the form of a unit mode signal, said waveguide is embedded into a main surface of a semiconductor substrate and wherein it includes a channel formed as a slit in the main surface of said semiconductor substrate and which slit is of a predetermined length such that is completely covered by a main surface of a second substrate completely sealing an exposed part of said slit which forms said channel thereby forming a hollow part which is filled with a charge of a nonlinear optical material, wherein said channel has a wall surface along the length of the slit which includes an optical buffer layer, and wherein said optical buffer layer and said second substrate covering said channel have refractive indices lower than said organic nonlinear optical material in said hollow part.

Claim 22

Dependent Claim 156 words

In an optical functional device of a unit mode optical waveguide wherein the improvement comprises an optical waveguide for transmitting optical information therethrough in the form of a unit mode signal, said waveguide is embedded into a main surface of a semiconductor substrate and wherein it includes a channel formed as a slit in the main surface of said semiconductor substrate and which slit is of a predetermined length such that is completely covered by a main surface of a second substrate completely sealing an exposed part of said slit which forms said channel thereby forming a hollow part which is filled with a charge of a nonlinear optical material, wherein said channel has a wall surface along the length of the slit which includes an optical buffer layer, and wherein said optical buffer layer and said second substrate covering said channel have refractive indices lower than said organic nonlinear optical material in said hollow part.

Claim 23

Dependent Claim 36 words

An optical functional device of a unit mode waveguide according to claim 19, wherein said second substrate is a silicon substrate with that part of its main surface covering said channel including an optical buffer layer.

Claim 24

Dependent Claim 32 words

An optical functional device of a unit mode waveguide according to claim 20, wherein said channel has a width and depth of about 1 μm and a length of about 1 mm.

Claim 25

Dependent Claim 32 words

An optical functional device of a unit mode waveguide according to claim 19, wherein said channel has a width and depth of about 1 μm and a length of about 1 mm.

Claim 26

Dependent Claim 32 words

An optical functional device of a unit mode waveguide according to claim 15, wherein said channel has a width and depth of about 1 μm and a length of about 1 mm.

Claim 27

Dependent Claim 32 words

An optical functional device of a unit mode waveguide according to claim 2, wherein said channel has a width and depth of about 1 μm and a length of about 1 mm.

Claim 28

Dependent Claim 32 words

An optical functional device of a unit mode waveguide according to claim 1, wherein said channel has a width and depth of about 1 μm and a length of about 1 mm.

Claim 29

Dependent Claim 104 words

An optical functional device of a unit mode waveguide, wherein the improvement comprises an optical waveguide embedded into a main surface of a first substrate and which includes a channel formed as a slit in the main surface of said first substrate and which slit is of a predetermined length such that it is completely covered by a main surface of a second substrate for completely sealing an exposed part of said slit which forms said channel thereby forming a hollow part which is filled with a charge of a nonlinear optical material, one of said first and second substrates being a silicon substrate.

Claim 30

Dependent Claim 104 words

An optical functional device of a unit mode waveguide, wherein the improvement comprises an optical waveguide embedded into a main surface of a first substrate and which includes a channel formed as a slit in the main surface of said first substrate and which slit is of a predetermined length such that it is completely covered by a main surface of a second substrate for completely sealing an exposed part of said slit which forms said channel thereby forming a hollow part which is filled with a charge of a nonlinear optical material, one of said first and second substrates being a silicon substrate.

Claim 31

Dependent Claim 25 words

An optical functional device of a unit mode waveguide according to claim 26, wherein said channel has a width and depth of about 1 μm.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1993-01-29	1993-07-31	1994-01-30	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1997-01-29	1997-07-31	1998-01-30	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2001-01-29	2001-07-31	2002-01-30	$7700.00	Window Closed / Lapsed

Optical functional device of an optical waveguide type

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