Patent DE2908170C2 successfully refreshed from Google Patents.
US4896341A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Long life X-ray source target
Assignee: NEW YORK JOB DEVELOPMENT AUTHORITY
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Filing: 1987-10-13
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Granted: 1990-01-23
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Expires: 2007-10-13
Abstract
Abstract Disclosed herein is an X-ray lithography system having a long life target. The life of the conventional target in X-ray generating systems for use in X-ray lithography systems is increased by providing means by which a single laser pulse can be provided to the same spot a plurality of times. In addition, new target designs are provided which are mechanically moved to allow laser pulses to be provided to adjacent points over a large surface area. One type of target is a cylindrical drum which is helically rotated to allow the laser pulse to intersect at all points along the helix of the drum. A second type of long life target is a long continuous strip in which a strip is moved from a feed reel to a take-up reel. The strip may be within a cassette.
Inventors
- 👤 James M. Forsyth
- 👤 Robert D. Frankel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 16:48
CPC Classifications
H; H05; H05G; H05G2/00; H05G2/001; H05G2/002; B; B82; B82Y; B82Y10/00; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70008; G03F7/70033
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
189 words
In an X-ray lithography system including means for providing an excitation beam pulse along a path toward a target to cause an X-ray emitting plasma to be formed and means for moving an X-ray resist coated object to be irradiated by said emitted X-rays, the improvement comprising: target means, including a feeding reel, a take-up reel and a target material tape therebetween and positioned in the path of said beam; and means for moving said target tape from said feeding reel towards said take-up reel between the provisions of selected pulses; said tape having at least one cavity thereon and said beam intersecting said cavity, said beam being of sufficient power to cause an x-ray emitting plasma to be created at least partially within said cavity; and said object to be irradiated by said emitted x-rays being positioned within a certain angle of said path, said certain angle being that angle with respect to said path within which the intensity of the provided x-rays is greater than the intensity of the x-rays provided if a part of said tape, other than said cavity, was positioned to intersect said beam.
Claim 2
Dependent Claim
189 words
In an X-ray lithography system including means for providing an excitation beam pulse along a path toward a target to cause an X-ray emitting plasma to be formed and means for moving an X-ray resist coated object to be irradiated by said emitted X-rays, the improvement comprising: target means, including a feeding reel, a take-up reel and a target material tape therebetween and positioned in the path of said beam; and means for moving said target tape from said feeding reel towards said take-up reel between the provisions of selected pulses; said tape having at least one cavity thereon and said beam intersecting said cavity, said beam being of sufficient power to cause an x-ray emitting plasma to be created at least partially within said cavity; and said object to be irradiated by said emitted x-rays being positioned within a certain angle of said path, said certain angle being that angle with respect to said path within which the intensity of the provided x-rays is greater than the intensity of the x-rays provided if a part of said tape, other than said cavity, was positioned to intersect said beam.
Claim 3
Dependent Claim
34 words
The invention according to claim 1 wherein one end of said target strip is initially wound on said feeding reel and threaded to said take-up reel and said moving means rotating said take-up reel.
Claim 4
Dependent Claim
22 words
The invention according to claim 2 wherein said feeding reel, take-up reel and target strip are within an enclosure forming a cassette.
Claim 5
Dependent Claim
15 words
The invention according to claim 3 wherein said target strip is moved in incremental steps.
Claim 6
Dependent Claim
34 words
The invention according to claim 4 wherein said target strip and beam are moved relative to one another perpendicular to the movement of said target strip from said feeding reel to said take-up reel.
Claim 7
Dependent Claim
34 words
The invention according to claim 1 wherein said target strip and beam are moved relative to one another perpendicular to the movement of said target strip from said feeding reel to said take-up reel.
Claim 8
Dependent Claim
23 words
The invention according to claim 1 wherein said target strip includes a plurality of preformed cavities therein into which said beam is provided.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-01-22 | 1993-07-24 | 1994-01-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-01-22 | 1997-07-24 | 1998-01-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-01-22 | 2001-07-24 | 2002-01-23 | $7700.00 | Window Closed / Lapsed |