US4895107A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photo chemical reaction apparatus
Assignee: Toshiba Corp
•
Filing: 1988-07-05
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Granted: 1990-01-23
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Expires: 2008-07-05
Abstract
Abstract A photo chemical reaction apparatus comprises a vacuum container partitioned into a reaction chamber and a carrier chamber by use of partition board. The partition board has an opening into which a carrier tray can be detachably inserted so as to cause the rection chamber to be hermetically sealed. The carrier tray has a substrate holder opposite to a light-penetrating window. A reaction gas flows between this window and a substrate to be processed mounted on the substrate holder.
Inventors
- 👤 Kensaku Yano
- 👤 Akihiko Furukawa
- 👤 Ryohei Miyagawa
- 👤 Yoshinori Iida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 18:30
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/4401; C23C16/4409; C23C16/48; C23C16/482; C23C16/488; C23C16/54
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
77 words
A photo chemical reaction apparatus for treating a workpiece with a reaction gas and light, comprising: a light source; movable carrier means for transporting workpieces to be photo chemically treated, including a carrier tray, having supporting means and a light-penetrating window for exposing a workpiece to the light source; and a processing vacuum container defining a reaction chamber for exposing the workpiece to the reaction gas and the light from the light source and a carrier chamber.
Claim 2
Dependent Claim
77 words
A photo chemical reaction apparatus for treating a workpiece with a reaction gas and light, comprising: a light source; movable carrier means for transporting workpieces to be photo chemically treated, including a carrier tray, having supporting means and a light-penetrating window for exposing a workpiece to the light source; and a processing vacuum container defining a reaction chamber for exposing the workpiece to the reaction gas and the light from the light source and a carrier chamber.
Claim 3
Dependent Claim
26 words
The apparatus of claim 1 wherein the processing vacuum container includes at least one gate valve for isolating from the outside of the processing vacuum container.
Claim 4
Dependent Claim
52 words
The apparatus of claim 1, wherein the processing vacuum container includes an opening between the carrier chamber and the reaction chamber, the carrier trays each being movable within the processing vacuum container for sealing the opening during exposure of the workpiece to the reaction gas and the light from the light source.
Claim 5
Dependent Claim
21 words
The apparatus of claim 1 wherein the supporting means includes a plurality of rods for spacing the workpiece from the window.
Claim 6
Dependent Claim
38 words
The apparatus of claim 3 wherein the processing container includes a partition defining the opening and each carrier tray includes a sealing plate extending therefrom for sealing the opening when the workpiece is moved into the reaction chamber.
Claim 7
Dependent Claim
14 words
The apparatus of claim 1 wherein the light-penetrating window is made of synthetic quartz.
Claim 8
Dependent Claim
17 words
The apparatus of claim 1 wherein the carrier tray includes two light-penetrating windows and two supporting means.
Claim 9
Dependent Claim
17 words
The apparatus of claim 1 wherein the light source includes a mercury-vapor lamp for emitting ultraviolet rays.
Claim 10
Dependent Claim
12 words
The apparatus of claim 1 wherein the light source includes a laser.
Claim 11
Dependent Claim
127 words
A photo chemical reaction apparatus for treating a workpiece with a reaction gas and light, comprising: a light source; movable carrier means for transporting workpieces to be photo chemically treated, including a plurality of carrier trays, each having supporting means and a light-penetrating window for exposing a workpiece to the light source; transport vacuum container means for isolating the plurality of carrier trays from the atmosphere; a processing vacuum container defining a reaction chamber for exposing the workpiece to the reaction gas and the light from the light source and a carrier chamber connected to the transport vacuum container means for receiving a carrier tray therefrom without exposure to the atmosphere; and means for moving the carrier trays between the transport vacuum container and the carrier chamber.
Claim 12
Dependent Claim
127 words
A photo chemical reaction apparatus for treating a workpiece with a reaction gas and light, comprising: a light source; movable carrier means for transporting workpieces to be photo chemically treated, including a plurality of carrier trays, each having supporting means and a light-penetrating window for exposing a workpiece to the light source; transport vacuum container means for isolating the plurality of carrier trays from the atmosphere; a processing vacuum container defining a reaction chamber for exposing the workpiece to the reaction gas and the light from the light source and a carrier chamber connected to the transport vacuum container means for receiving a carrier tray therefrom without exposure to the atmosphere; and means for moving the carrier trays between the transport vacuum container and the carrier chamber.
Claim 13
Dependent Claim
27 words
The apparatus of claim 10 wherein the processing vacuum container includes at least one gate valve for isolating the transport vacuum container means from the carrier chamber.
Claim 14
Dependent Claim
39 words
The apparatus of claim 10 wherein the transport vacuum container means includes an elongated vacuum container having gear means therein, the plurality of trays including means interacting with the gear means for moving the trays along the vacuum container.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-01-22 | 1993-07-24 | 1994-01-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-01-22 | 1997-07-24 | 1998-01-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-01-22 | 2001-07-24 | 2002-01-23 | $7700.00 | Window Closed / Lapsed |