US4894116A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Phosphor only etching process for TFEL panel having multiple-colored display
Assignee: Planar Systems Inc
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Filing: 1989-01-13
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Granted: 1990-01-16
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Expires: 2009-01-13
Abstract
Abstract A process for manufacturing a TFEL panel having a plurality of side-by-side phosphor stripes of different colors includes the steps of placing a thin film phosphor layer of a first color producing phosphor on top of transparent electrodes covered by an insulator and subjecting the phosphor to an etching process to leave thin elongate stripes. A second phosphor layer is deposited over the first phosphor stripes and the etch is repeated to leave adjacent stripes of a second color-producing phosphor. An insulating layer and a second set of electrodes are placed atop the stripes to complete the panel which is supported on a glass substrate.
Inventors
- 👤 William A. Barrow
- 👤 Richard T. Tuenge
- 👤 Hal Merritt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 09:30
CPC Classifications
H; H05; H05B; H05B33/00; H05B33/10
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
155 words
A method of constructing a multicolored TFEL display screen comprising the steps of: (a) depositing on a substrate a first set of elongate transparent electrodes; (b) depositing an insulating layer on top of said electrodes; (c) depositing over said insulating layer a first thin film comprising a first color-producing phosphor; (d) etching said first thin film to leave stripes of said first color-producing phosphor extending perpendicular to said transparent electrodes; (e) depositing an etch stop layer on top of said stripes of said first thin film; (f) depositing a second thin film comprising a second color-producing phosphor on top of said etch stop layer; (g) etching said second thin film to leave stripes of a second color-producing phosphor lying adjacent to and extending parallel to said stripes of said first color-producing phosphor; and (h) depositing an insulating layer and a second set of elongate electrodes over said first and second stripes to extend colinearly therewith.
Claim 2
Independent Claim
155 words
A method of constructing a multicolored TFEL display screen comprising the steps of: (a) depositing on a substrate a first set of elongate transparent electrodes; (b) depositing an insulating layer on top of said electrodes; (c) depositing over said insulating layer a first thin film comprising a first color-producing phosphor; (d) etching said first thin film to leave stripes of said first color-producing phosphor extending perpendicular to said transparent electrodes; (e) depositing an etch stop layer on top of said stripes of said first thin film; (f) depositing a second thin film comprising a second color-producing phosphor on top of said etch stop layer; (g) etching said second thin film to leave stripes of a second color-producing phosphor lying adjacent to and extending parallel to said stripes of said first color-producing phosphor; and (h) depositing an insulating layer and a second set of elongate electrodes over said first and second stripes to extend colinearly therewith.
Claim 3
Dependent Claim
24 words
The method of claim 1 wherein said first set of transparent electrodes are scanning electrodes and said second set of electrodes are data electrodes.
Claim 4
Dependent Claim
16 words
The method of claim 1 wherein said etching steps are performed by a dry etching process.
Claim 5
Dependent Claim
18 words
The method of claim 3 wherein said etch stop layer is composed of Ba 2 TaO 6 .
Claim 6
Dependent Claim
17 words
The method of claim 4 wherein the thickness of said etch stop layer is about 200 Å.
Claim 7
Dependent Claim
46 words
The method of claim 3 wherein said dry etching process comprises placing a photoresistive mask over said thin films and exposing said thin films to a corrosive gas within an electric field, said mask comprising elongate photoresistive strips corresponding to the dimensions of said phosphor stripes.
Claim 8
Dependent Claim
26 words
The method of claim 1 further including the step of depositing an etch stop layer on top of said insulating layer prior to performing step (c).
References Cited (Backward Citations)
US3914464A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-01-15 | 1993-07-17 | 1994-01-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-01-15 | 1997-07-17 | 1998-01-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-01-15 | 2001-07-17 | 2002-01-16 | $7700.00 | Window Closed / Lapsed |