US4892845A
Expired / Lapsed
US
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Method for forming contacts through a thick oxide layer on a semiconductive device
Assignee: Texas Instruments Inc
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Filing: 1984-08-31
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Granted: 1990-01-09
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Expires: 2004-08-31
Abstract
Abstract A method for fabricating contacts in a semiconductor substrate includes forming a thin buffer oxide layer (26) over a substrate (10) with active devices defined therein. Access openings (28), (30) and (32) are then formed in the thin oxide layer (26) and then aluminum columnar contacts (38), (40) and (42) formed therein with a predetermined height. A thick oxide layer of phosphorous silicate glass (50) is then formed over the built-up structure. A planarizing resist layer (52) is formed over top of the structure with a substantially thinner area defined proximate the upper surfaces of the columnar contacts (38, 40, 42). The thin areas (54, 56, 58) are removed by selectively etching away the upper surface of the resist layer (52) by an excited plasma process. The structure is then subjected to a phosphorous selective etch to remove only those portions of the thick oxide layer (52') proximate the upper surfaces of the columnar contacts (38, 40, 42). Interconnects are then formed on the surface for connection with the exposed surface of the columnar contacts.
Inventors
- 👤 Jeffrey M. Bridges
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 00:16
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/063; H10W20/40; Y; Y10; Y10S; Y10S148/00; Y10S148/133
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
119 words
A method for forming contacts with semiconductor substrates, comprising: (a) providing a semiconductor substrate; (b) forming a thin oxide layer on the surface of the substrate; (c) patterning openings in said thin oxide layer to allow access to desired contact areas thereon; (d) forming conducting contacts in the formed openings extending upward from the substrate; (e) depositing a layer of thick oxide on the substrate to cover the thin oxide layer and formed contacts, the height above said substrate of the formed contacts being approximately equal to the thickness of the thick oxide layer; and then (f) selectively etching the resulting layer to remove only the portion of the thick oxide covering the upper surface of the formed contacts.
Claim 2
Independent Claim
119 words
A method for forming contacts with semiconductor substrates, comprising: (a) providing a semiconductor substrate; (b) forming a thin oxide layer on the surface of the substrate; (c) patterning openings in said thin oxide layer to allow access to desired contact areas thereon; (d) forming conducting contacts in the formed openings extending upward from the substrate; (e) depositing a layer of thick oxide on the substrate to cover the thin oxide layer and formed contacts, the height above said substrate of the formed contacts being approximately equal to the thickness of the thick oxide layer; and then (f) selectively etching the resulting layer to remove only the portion of the thick oxide covering the upper surface of the formed contacts.
Claim 3
Dependent Claim
118 words
The method of claim 1 wherein the step of selectively removing the portions of the thick oxide layer comprises: depositing a layer of planarizing resist on the surface of the thick oxide layer such that the thickness of the planarizing resist proximate the portion of the thick oxide layer covering the formed contacts is relatively thinner than the remaining portions of the planarizing resist layer; uniformly decreasing the depth of the planarizing resist layer over the surface there to expose only the portion of the thick oxide layer covering the formed contacts; and selectively etching only the exposed portion of the thick oxide layer to remove only the exposed thick oxide layer portion without etching the formed contact.
Claim 4
Dependent Claim
21 words
The method of claim 2 wherein the thick oxide layer is phosphorous silicate glass and the selective etch is selective thereto.
Claim 5
Independent Claim
114 words
A method for forming contacts with desired contact area on the surface of a substrate, comprising: forming a layer of thin oxide on the surface of the substrate; patterning openings in the thin oxide layer to allow access to the desired areas; forming conductive contacts in the formed openings extending upwards from the substrate a predetermined height; depositing a conformal layer of thick oxide over the substrate and formed contacts: selectively etching through the thick oxide layer over said contacts to expose only the upper surface of the formed contacts; and forming conductive interconnects on the surface of thick oxide and interfacing with the exposed surface of the formed contacts to provide conduction therewith.
Claim 6
Independent Claim
114 words
A method for forming contacts with desired contact area on the surface of a substrate, comprising: forming a layer of thin oxide on the surface of the substrate; patterning openings in the thin oxide layer to allow access to the desired areas; forming conductive contacts in the formed openings extending upwards from the substrate a predetermined height; depositing a conformal layer of thick oxide over the substrate and formed contacts: selectively etching through the thick oxide layer over said contacts to expose only the upper surface of the formed contacts; and forming conductive interconnects on the surface of thick oxide and interfacing with the exposed surface of the formed contacts to provide conduction therewith.
Claim 7
Dependent Claim
71 words
The method of claim 4 wherein the step of forming the conductive contacts in the formed openings comprises: depositing a layer of metal over the thin oxide and formed openings having a thickness approximating the thickness of the thick oxide; forming patterned areas on the surface of the metal to provide the desired pattern for the formed contacts; and removing the portions of the metal layer outside of the patterned areas.
Claim 8
Dependent Claim
13 words
The method of claim 4 wherein the thick oxide is phosphorous silicate glass.
Claim 9
Dependent Claim
76 words
The method of claim 4 wherein the step of selectively etching comprises: depositing a layer of planarizing resist on the surface of the thick oxide, the thickness of the polarizing resist being relatively thinner over the upper protrusions of the thick oxide over the formed contacts; and substantially uniformly removing the planarizing resist to a depth approximately equal to the thickness of the planarizing resist over the upper surface of the formed contacts for exposure thereof.
Claim 10
Independent Claim
231 words
A method for forming contacts to desired contact areas on the surface of a substrate, comprising: defining active regions and interconnects on the substrate; forming a buffer oxide on the surface of the substrate; patterning openings in the buffer oxide layer to allow access to desired areas on the defined active devices and interconnects; depositing a layer of aluminum on the surface of the buffer oxide; patterning contact areas on the formed aluminum layer; etching the patterned aluminum layer down to the buffer oxide to provide formed contacts in the patterned openings of the buffer oxide; depositing a conformal layer of thick oxide over the substrate and formed contacts; depositing a layer of planarizing resist on the surface of the thick oxide such that the thickness of the planarizing resist proximate the portion of the thick oxide layer covering the upper surface of the formed contacts is relatively thinner than the remaining portions of the planarizing resist layer; uniformly reducing the thickness of the planarizing resist to expose only the portion of the thick oxide adjacent the formed contacts; selectively etching only the thick oxide to expose the upper surfaces of the formed contacts; removing the remaining portion of the planarizing resistor, and forming conductive interconnects on the surface of the thick oxide in a predetermined pattern and interfaced with the exposed surfaces of the formed contacts to provide conduction therewith.
Claim 11
Independent Claim
231 words
A method for forming contacts to desired contact areas on the surface of a substrate, comprising: defining active regions and interconnects on the substrate; forming a buffer oxide on the surface of the substrate; patterning openings in the buffer oxide layer to allow access to desired areas on the defined active devices and interconnects; depositing a layer of aluminum on the surface of the buffer oxide; patterning contact areas on the formed aluminum layer; etching the patterned aluminum layer down to the buffer oxide to provide formed contacts in the patterned openings of the buffer oxide; depositing a conformal layer of thick oxide over the substrate and formed contacts; depositing a layer of planarizing resist on the surface of the thick oxide such that the thickness of the planarizing resist proximate the portion of the thick oxide layer covering the upper surface of the formed contacts is relatively thinner than the remaining portions of the planarizing resist layer; uniformly reducing the thickness of the planarizing resist to expose only the portion of the thick oxide adjacent the formed contacts; selectively etching only the thick oxide to expose the upper surfaces of the formed contacts; removing the remaining portion of the planarizing resistor, and forming conductive interconnects on the surface of the thick oxide in a predetermined pattern and interfaced with the exposed surfaces of the formed contacts to provide conduction therewith.
Claim 12
Dependent Claim
15 words
The method of claim 8 wherein the thick oxide is formed from phosphorous silicate glass.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-01-08 | 1993-07-10 | 1994-01-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-01-08 | 1997-07-10 | 1998-01-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-01-08 | 2001-07-10 | 2002-01-09 | $7700.00 | Window Closed / Lapsed |