US4888204A
Expired / Lapsed
US
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Photochemical deposition of high purity gold films
Assignee: Raytheon Co
•
Filing: 1988-09-12
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Granted: 1989-12-19
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Expires: 2008-09-12
Abstract
Abstract High purity gold films are photochemically deposited on substrates from the gold containing compound (CH 3 ) 2 Au[CH(COCF 3 ) 2 ]. A vapor of the gold containing organometallic compound, possibly mixed with a carrier gas, is flowed over the surface of the substrate, which is at 0° C. to 160° C., and preferably at ambient temperature. Photodissociation is induced with ultraviolet light, inasmuch as the organometallic compound is strongly absorbing in the range of from about 300 to 340 nanometers. Substantially no organic fragments are deposited upon the surface, so that the deposited gold film is of high purity.
Inventors
- 👤 Lee W. Tutt
- 👤 John E. Jensen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:55
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/06; C23C16/18; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105; C30B29/00; C30B29/02
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
82 words
A process for depositing a layer of gold onto a substrate, comprising the steps of: furnishing a substrate having a surface upon which the gold is to be deposited, the substrate being at a temperature of from about 0° to about 160° C.; contacting the surface of the substrate with a gas containing the organometallic compound (CH 3 ) 2 Au[CH(COCF 3 ) 3 ]; photodissociating the organometallic compound with ultraviolet light to deposit gold therefrom onto the surface of the substrate.
Claim 2
Dependent Claim
82 words
A process for depositing a layer of gold onto a substrate, comprising the steps of: furnishing a substrate having a surface upon which the gold is to be deposited, the substrate being at a temperature of from about 0° to about 160° C.; contacting the surface of the substrate with a gas containing the organometallic compound (CH 3 ) 2 Au[CH(COCF 3 ) 3 ]; photodissociating the organometallic compound with ultraviolet light to deposit gold therefrom onto the surface of the substrate.
Claim 3
Dependent Claim
19 words
The process of claim 1, wherein the temperature of the substrate is from about 20° to about 30° C.
Claim 4
Dependent Claim
19 words
The process of claim 1, wherein the temperature of the substrate is from about 0° to about 140° C.
Claim 5
Dependent Claim
30 words
The process of claim 1, wherein the pressure of the organometallic compound (CH 3 ) 2 Au[CH(COCF 3 ) 2 ] is from about 1 millitorr to about 1 atmosphere.
Claim 6
Dependent Claim
31 words
The process of claim 1, wherein the organometallic compound (CH 3 ) 2 Au[CH(COCF 3 ) 2 ]is mixed with a carrier gas and flowed over the surface of the substrate.
Claim 7
Dependent Claim
35 words
The process of claim 5, wherein the total pressure of the organometallic compound (CH 3 ) 2 Au[CH(COCF 3 ) 2 ] and the carrier gas is from about 1 millitorr to about 1 atmosphere.
Claim 8
Dependent Claim
20 words
The process of claim 1, wherein the wavelength of the ultraviolet light is from about 300 to about 340 nanometers.
Claim 9
Dependent Claim
16 words
The process of claim 1, wherein the wavelength of the ultraviolet light is about 308 nanometers.
Claim 10
Dependent Claim
14 words
The process of claim 1, wherein the ultraviolet light is provided by a laser.
Claim 11
Dependent Claim
16 words
The process of claim 1, wherein the ultraviolet light is provided by a xenon chloride laser.
Claim 12
Dependent Claim
15 words
The process of claim 1, wherein the ultraviolet light strikes the surface of the substrate.
Claim 13
Dependent Claim
20 words
The process of claim 1, wherein the ultraviolet light passes through the vapor without striking the surface of the substrate.
Claim 14
Dependent Claim
27 words
The process of claim 1, wherein the intensity of the ultraviolet light is from about 10 milliwatts per square centimeter to about 1 watt per square centimeter.
Claim 15
Dependent Claim
11 words
The process of claim 1, wherein the substrate is an insulator.
Claim 16
Dependent Claim
11 words
The process of claim 1, wherein the substrate is a semiconductor.
Claim 17
Dependent Claim
11 words
The process of claim 1, wherein the substrate is a conductor.
Claim 18
Dependent Claim
11 words
The process of claim 1, wherein the substrate is a superconductor.
Claim 19
Dependent Claim
75 words
A process for depositing a layer of gold onto a substrate, comprising the steps of: furnishing a substrate having a surface upon which the gold is to be deposited, the substrate being at about ambient temperature; contacting the surface of the substrate with a gas containing the organometallic compound (CH 3 ) 2 Au[CH(COCF 3 ) 2 ]; photodissociating the organometallic compound with ultraviolet light to deposit gold therefrom onto the surface of the substrate.
Claim 20
Dependent Claim
75 words
A process for depositing a layer of gold onto a substrate, comprising the steps of: furnishing a substrate having a surface upon which the gold is to be deposited, the substrate being at about ambient temperature; contacting the surface of the substrate with a gas containing the organometallic compound (CH 3 ) 2 Au[CH(COCF 3 ) 2 ]; photodissociating the organometallic compound with ultraviolet light to deposit gold therefrom onto the surface of the substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-12-18 | 1993-06-19 | 1993-12-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-12-18 | 1997-06-19 | 1997-12-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-12-18 | 2001-06-19 | 2001-12-19 | $7700.00 | Window Closed / Lapsed |