US4886969A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cluster beam apparatus utilizing cold cathode cluster ionizer
Assignee: The AT&T MVPD Group LLC
•
Filing: 1988-12-16
•
Granted: 1989-12-12
•
Expires: 2008-12-16
Abstract
Abstract An apparatus for producing a beam of ionized clusters includes a source that emits a beam of clustered and unclustered atoms through a nozzle and a cold cathode ionizer that ionizes the clusters. The ionizer is positioned in close proximity to the nozzle and the beam as it is emitted from the nozzle. A plasma is formed in the beam adjacent the nozzle when secondary electrons emitted from the cathode are accelerated and injected into the beam, resulting in the ionization of atoms and clusters. The cathode is preferably formed, at least in part, of a material that efficiently emits secondary electrons when impacted by ionized atoms extracted from the plasma to impact against the cathode, and the secondary electrons are injected into the plasma to renew the process. The ionized clusters remain in the beam and proceed to their target.
Inventors
- 👤 Wolfgang Knauer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:42
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H05; H05H; H05H5/00
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
126 words
Apparatus for producing an ionized cluster beam, comprising: means for generating a beam of clustered and unclustered atoms; and means for ionizing the clusters of atoms in the beam, the means for ionizing comprising cathode means for emitting secondary electrons when impacted by ions, anode means for accelerating the secondary electrons emitted by the cathode means into the beam, the means for ionizing being located sufficiently close to the beam and to the means for generating that a stable plasma may be formed in the beam by the application of a voltage between the anode means and the cathode means, the plasma serving as the source for the ions that impact the cathode means to produce the secondary electrons that ionize the clustered and unclustered atoms.
Claim 2
Dependent Claim
126 words
Apparatus for producing an ionized cluster beam, comprising: means for generating a beam of clustered and unclustered atoms; and means for ionizing the clusters of atoms in the beam, the means for ionizing comprising cathode means for emitting secondary electrons when impacted by ions, anode means for accelerating the secondary electrons emitted by the cathode means into the beam, the means for ionizing being located sufficiently close to the beam and to the means for generating that a stable plasma may be formed in the beam by the application of a voltage between the anode means and the cathode means, the plasma serving as the source for the ions that impact the cathode means to produce the secondary electrons that ionize the clustered and unclustered atoms.
Claim 3
Dependent Claim
22 words
The apparatus of claim 1, wherein the means for generating includes a nozzle that emits a beam containing clustered and unclustered atoms.
Claim 4
Dependent Claim
60 words
The apparatus of claim 1, wherein the cathode means includes a cathode that is a body of annular cross section disposed so that the beam passes along its axis, and the anode means includes an anode that is a body of annular cross section disposed so that the beam passes along its axis and is formed of a mesh material.
Claim 5
Dependent Claim
16 words
The apparatus of claim 3, wherein the cathode and the anode are each frustoconical in shape.
Claim 6
Dependent Claim
14 words
The apparatus of claim 4, wherein the cathode and the anode are each cylindrical.
Claim 7
Dependent Claim
18 words
The apparatus of claim 1, wherein the anode means is in physical contact with the means for generating.
Claim 8
Dependent Claim
46 words
The apparatus of claim 1, wherein the cathode means includes a cathode that is a body of annular cross section disposed so that the beam passes along its axis, and the anode means includes an anode that is in physical contact with the means for generating.
Claim 9
Dependent Claim
38 words
The apparatus of claim 1, wherein the cathode is constructed at least in part of a material selected from the group consisting of stainless steel, a copper-beryllium alloy, a magnesium beryllium alloy, and an oxide of a metal.
Claim 10
Dependent Claim
13 words
The apparatus of claim 1, further including means for accelerating the ionized clusters.
Claim 11
Dependent Claim
161 words
Apparatus for producing an ionized cluster beam, comprising: a source that produces a beam of clustered and unclustered atoms, the source including a nozzle from which the beam is emitted; and an ionizer comprising a frustoconical cathode disposed so that the beam passes along its axis, the cathode being formed at least in part of a material that emits secondary electrons when impacted by ions, and a frustoconical anode of frustoconical diameter less than that of the cathode and located concentrically within the cathode, the anode being formed of mesh material and disposed so that the beam passes along its axis, the ionizer being located sufficiently close to the beam and to the nozzle that a stable plasma may be formed in the beam by the application of a voltage between the anode and the cathode, the plasma serving as the source for the ions that impact the cathode to produce the secondary electrons that ionize the clustered and unclustered atoms.
Claim 12
Dependent Claim
161 words
Apparatus for producing an ionized cluster beam, comprising: a source that produces a beam of clustered and unclustered atoms, the source including a nozzle from which the beam is emitted; and an ionizer comprising a frustoconical cathode disposed so that the beam passes along its axis, the cathode being formed at least in part of a material that emits secondary electrons when impacted by ions, and a frustoconical anode of frustoconical diameter less than that of the cathode and located concentrically within the cathode, the anode being formed of mesh material and disposed so that the beam passes along its axis, the ionizer being located sufficiently close to the beam and to the nozzle that a stable plasma may be formed in the beam by the application of a voltage between the anode and the cathode, the plasma serving as the source for the ions that impact the cathode to produce the secondary electrons that ionize the clustered and unclustered atoms.
Claim 13
Dependent Claim
10 words
The apparatus of claim 10, wherein the anode is cylindrical.
Claim 14
Dependent Claim
10 words
The apparatus of claim 10, wherein the cathode is cylindrical.
Claim 15
Dependent Claim
38 words
The apparatus of claim 10, wherein the cathode is constructed at least in part of a material selected from the group consisting of stainless steel, a copper-beryllium alloy, a magnesium beryllium alloy, and an oxide of a metal.
Claim 16
Dependent Claim
13 words
The apparatus of claim 10, further including means for accelerating the ionized clusters.
Claim 17
Dependent Claim
139 words
Apparatus for producing an ionized cluster beam, comprising: a source that produces a beam of clustered and unclustered atoms, the source including a nozzle from which the beam is emitted; and an ionizer comprising a frustoconical cathode disposed so that the beam passes along its axis, the cathode being formed at least in part of a material that emits secondary electrons when impacted by ions, and an anode physically joined to the source at a location adjacent the nozzle, the ionizer being located sufficiently close to the beam and to the nozzle that a stable plasma may be formed in the beam by the application of a voltage between the anode and the cathode, the plasma serving as the source for the ions that impact the cathode to produce the secondary electrons that ionize the clustered and unclustered atoms.
Claim 18
Dependent Claim
139 words
Apparatus for producing an ionized cluster beam, comprising: a source that produces a beam of clustered and unclustered atoms, the source including a nozzle from which the beam is emitted; and an ionizer comprising a frustoconical cathode disposed so that the beam passes along its axis, the cathode being formed at least in part of a material that emits secondary electrons when impacted by ions, and an anode physically joined to the source at a location adjacent the nozzle, the ionizer being located sufficiently close to the beam and to the nozzle that a stable plasma may be formed in the beam by the application of a voltage between the anode and the cathode, the plasma serving as the source for the ions that impact the cathode to produce the secondary electrons that ionize the clustered and unclustered atoms.
Claim 19
Dependent Claim
10 words
The apparatus of claim 15, wherein the cathode is cylindrical.
Claim 20
Dependent Claim
38 words
The apparatus of claim 15, wherein the cathode is constructed at least in part of a material selected from the group consisting of stainless steel, a copper-beryllium alloy, a magnesium beryllium alloy, and an oxide of a metal.
Claim 21
Dependent Claim
13 words
The apparatus of claim 15, further including means for accelerating the ionized clusters.
Claim 22
Independent Claim
90 words
A method of providing a beam of ionized clusters, comprising the steps of: providing a cluster source that produces a beam containing both clustered atoms and unclustered atoms; providing a cathode that emits secondary electrons when impacted by ions, the cathode being disposed adjacent the beam; and forming a plasma within the beam at a location adjacent the cluster source by injecting energetic secondary electrons produced by the cathode into the beam, and withdrawing ionized but unclustered atoms from the beam to impact the cathode to create additional secondary electrons.
Claim 23
Independent Claim
90 words
A method of providing a beam of ionized clusters, comprising the steps of: providing a cluster source that produces a beam containing both clustered atoms and unclustered atoms; providing a cathode that emits secondary electrons when impacted by ions, the cathode being disposed adjacent the beam; and forming a plasma within the beam at a location adjacent the cluster source by injecting energetic secondary electrons produced by the cathode into the beam, and withdrawing ionized but unclustered atoms from the beam to impact the cathode to create additional secondary electrons.
Claim 24
Dependent Claim
19 words
The method of claim 19, wherein the ionized but unclustered atoms are withdrawn from the beam by an anode.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-12-11 | 1993-06-12 | 1993-12-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-12-11 | 1997-06-12 | 1997-12-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-12-11 | 2001-06-12 | 2001-12-12 | $7700.00 | Window Closed / Lapsed |