US4886966A
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Apparatus for introducing samples into an inductively coupled, plasma source mass spectrometer
Assignee: Toshiba Corp
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Filing: 1989-01-05
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Granted: 1989-12-12
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Expires: 2009-01-05
Abstract
Abstract A sample introducing apparatus for an inductively coupled plasma mass spectrometer comprises a means supplying the inert gas for carrying the vaporized sample, a heater for defining the path through which the inert gas is passed as well as having the inner surface, on which the sample to be analyzed thereon is put and for generating the heat with the electrical being applied, in which the film structure is formed on said surface, and the surface contacted with the inert gas of the film structure vaporized the sample made of any one of the high melting metal oxide and the high melting metal nitride, an electrode structure for supporting the heater and supplying the electrical power to the heater.
Inventors
- 👤 Hideki Matsunaga
- 👤 Naoyuki Hirate
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 13:49
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/02; H01J49/04; H01J49/0459; H01J49/0468; H01J49/10; H01J49/105
Claims Analysis
Total Claims: 53
Claim 1
Independent Claim
116 words
An apparatus for vaporizing a sample and introducing the vaporized sample into an inductively coupled plasma source mass spectrometer, comprising: means for supplying an inert gas which transfers the vaporized sample; a heater for generating a heat with an electrical power, which is provided with a film structure having an inner surface for defining a path through which the inert gas is passed and on which the sample is to be located, the film structure including a material for forming the inner surface, and essentially consisting of one selected from the group consisting of a metal oxide and a nitride; and an electrode structure for supporting the heater and supplying the electrical power to the heater.
Claim 2
Independent Claim
116 words
An apparatus for vaporizing a sample and introducing the vaporized sample into an inductively coupled plasma source mass spectrometer, comprising: means for supplying an inert gas which transfers the vaporized sample; a heater for generating a heat with an electrical power, which is provided with a film structure having an inner surface for defining a path through which the inert gas is passed and on which the sample is to be located, the film structure including a material for forming the inner surface, and essentially consisting of one selected from the group consisting of a metal oxide and a nitride; and an electrode structure for supporting the heater and supplying the electrical power to the heater.
Claim 3
Dependent Claim
28 words
An apparatus according to claim 1, wherein the heater and electrode structure essentially consists of a material selected from the group consisting of tantalum, tungsten, rhenium and zirconium.
Claim 4
Dependent Claim
30 words
An apparatus according to claim 1, wherein the inert gas is essentially consisted of the gas selected from the group consisting of argon, helium and a gas added with hydrogen.
Claim 5
Dependent Claim
20 words
An apparatus according to claim 1, wherein the film structure has a thickness within a range of 1 -10 μm.
Claim 6
Dependent Claim
28 words
An apparatus according to claim 1, wherein the metal oxide essentially consists of a material selected from the group consisting of tantalum oxide, tungsten oxide and zirconium oxide.
Claim 7
Dependent Claim
32 words
An apparatus according to claim 1, wherein the metal nitride essentially consists of a material selected from the group consisting of tantalum nitride, tungsten nitride, hafnium nitride, zirconium nitride and titanium nitride.
Claim 8
Dependent Claim
43 words
An apparatus according to claim 1, wherein the film structure includes a single film which essential consists of a material selected from the group consisting of metal oxide and metal nitride, and the heater has the inner surface coated by the single film.
Claim 9
Dependent Claim
41 words
An apparatus according to claim 1, wherein the electrode structure has an inner surface on which the film structure is formed, and the film structure essentially consists of a material selected from the group consisting of metal oxide and metal nitride.
Claim 10
Dependent Claim
28 words
An apparatus according to claim 8, wherein the metal oxide essentially consists of a material selected from the group consisting of tantalum oxide, tungsten oxide and zirconium oxide.
Claim 11
Dependent Claim
32 words
An apparatus according to claim 8, wherein the metal nitride essentially consists of a material selected from the group consisting of tantalum nitride, tungsten nitride, hafnium nitride, zirconium nitride and titanium nitride.
Claim 12
Dependent Claim
34 words
An apparatus according to claim 8, wherein the film structure includes a single film and the single film essentially consists of a material selected from the group consisting of metal oxide and metal nitride.
Claim 13
Dependent Claim
48 words
An apparatus according to claim 1, wherein the heater comprises a cylindrical cuvette having the inner surface on which the film structure is formed, and the film structure includes a single film essentially consisting of a material selected from a group consisting of metal oxide and metal nitride.
Claim 14
Dependent Claim
14 words
An apparatus according to claim 12, wherein the cylindrical cuvette essentially consists of graphite.
Claim 15
Dependent Claim
44 words
An apparatus according to claim 13, wherein the film structure includes a two-layered film, the surface of the heater being coated by a metal carbide film, and the carbide film being coated by one of a metal oxide film and a metal nitride film.
Claim 16
Dependent Claim
34 words
An apparatus according to claim 14, wherein the metal carbide film is essentially consisted of a material selected from the group consisting of tantalum carbide, tungsten carbide, hafnium carbide, zirconium carbide and titanium carbide.
Claim 17
Dependent Claim
77 words
An apparatus according to claim 1, wherein the heater comprises a cylindrical cuvette, and a metal tube and fitted in the cylindrical cuvette, the tube has the inner surface for defining the path, through which the inert gas is passed, the film structure is a two-layered film, the surface of the tube is coated by a metal carbide film, and the carbide film is coated by one of the metal oxide film and the metal nitride film.
Claim 18
Dependent Claim
32 words
An apparatus according to claim 16, wherein the metal carbide essentially consists of a material selected from the group consisting of tantalum carbide, tungsten carbide hafnium carbide, zirconium carbide and titanium carbide.
Claim 19
Dependent Claim
14 words
An apparatus according to claim 16, wherein the cylindrical cuvette essentially consists of graphite.
Claim 20
Dependent Claim
45 words
An apparatus according to claim 1, wherein the film structure includes a two-layered film, the surface of the electrode structure is coated by a metal carbide film and the carbide film is coated by one of the metal oxide film and the metal nitride film.
Claim 21
Dependent Claim
33 words
An apparatus according to claim 19, wherein the metal carbide film essentially consists of a material selected from the group consisting of tantalum carbide, tungsten carbide, hafnium carbide, zirconium carbide and titanium carbide.
Claim 22
Dependent Claim
50 words
An apparatus according to claim 1, wherein the heater has a sample introducing hole for introducing the sample into the inner surface of the film structure to the vaporization of the sample, and grooves coated by the film structure are formed on the inner surface facing the sample introducing hole.
Claim 23
Dependent Claim
20 words
An apparatus according to claim 21, wherein the film structure has a thickness within a range of 1 -10 μm.
Claim 24
Dependent Claim
51 words
An apparatus according to claim 1, further comprising: a means defining at least one flowing path for supplying the vaporized sample and the inert gas carrying said vaporized sample to the inductively coupled plasma mass spectrometer; and a means for housing said means for defining said at least one flowing path.
Claim 25
Dependent Claim
22 words
An apparatus according to claim 23, wherein the means defining said at least one flowing path is made of a transparent material.
Claim 26
Dependent Claim
52 words
An apparatus according to claim 24, wherein the means for defining said at least one flowing path defines plural flowing paths for supplying the vaporized sample and the inert gas carrying said vaporized sample to the inductively coupled plasma mass spectrometer, and includes means for selecting one of said plural flowing paths.
Claim 27
Dependent Claim
137 words
A sample analyzing apparatus comprising: a means supplying an inert gas for carrying a vaporized sample; a heater for generating a heat with an electrical power, which is provided with a film structure having an inner surface for defining a path through which the inert gas is passed and on which the sample is to be located, the film structure including a material for forming the inner surface, and essentially consisting of one selected from the group consisting of metal oxide and metal nitride; an electrode structure for supporting the heater and supplying the electrical power to the heater; a means for ionizing the vaporized sample with a plasma into excited sample ions; a means for introducing the sample ions; and a means for mass-separating the introduced sample ions and detecting the intensity of the introduced ions.
Claim 28
Dependent Claim
137 words
A sample analyzing apparatus comprising: a means supplying an inert gas for carrying a vaporized sample; a heater for generating a heat with an electrical power, which is provided with a film structure having an inner surface for defining a path through which the inert gas is passed and on which the sample is to be located, the film structure including a material for forming the inner surface, and essentially consisting of one selected from the group consisting of metal oxide and metal nitride; an electrode structure for supporting the heater and supplying the electrical power to the heater; a means for ionizing the vaporized sample with a plasma into excited sample ions; a means for introducing the sample ions; and a means for mass-separating the introduced sample ions and detecting the intensity of the introduced ions.
Claim 29
Dependent Claim
18 words
A sample analyzing apparatus according to claim 26, wherein said ionizing means includes means for generating the plasma.
Claim 30
Dependent Claim
28 words
An apparatus according to claim 26, wherein the heater and electrode structure essentially consist of a material selected from the group consisting of tantalum, tungsten, rhenium and zirconium.
Claim 31
Dependent Claim
30 words
An apparatus according to claim 26, wherein the inert gas is essentially consisted of a gas selected from the group consisting of argon, helium and a gas added with hydrogen.
Claim 32
Dependent Claim
20 words
An apparatus according to claim 26, wherein the film structure has the thickness within a range of 1 -10 μm.
Claim 33
Dependent Claim
28 words
An apparatus according to claim 26, wherein the metal oxide essentially consists of a material selected from the group consisting of tantalum oxide, tungsten oxide and zirconium oxide.
Claim 34
Dependent Claim
32 words
An apparatus according to claim 26, wherein the metal nitride essentially consists of a material selected from the group consisting of tantalum nitride, tungsten nitride, hafnium nitride, zirconium nitride and titanium nitride.
Claim 35
Dependent Claim
43 words
An apparatus according to claim 26, wherein the film structure includes a single film which essentially consists of a material selected from the group consisting of metal oxide and metal nitride, and the heater has the inner surface coated by the single film.
Claim 36
Dependent Claim
41 words
An apparatus according to claim 26, wherein the electrode structure has an inner surface on which the film structure is formed, and the film structure essentially consists of a material selected from the group consisting of metal oxide and metal nitride.
Claim 37
Dependent Claim
28 words
An apparatus according to claim 34, wherein the metal oxide essentially consists of a material selected from the group consisting of tantalum oxide, tungsten oxide and zirconium oxide.
Claim 38
Dependent Claim
32 words
An apparatus according to claim 34, wherein the metal nitride essentially consists of a material selected from the group consisting of tantalum nitride, tungsten nitride, hafnium nitride, zirconium nitride and titanium nitride.
Claim 39
Dependent Claim
34 words
An apparatus according to claim 34, wherein the film structure includes a single film and the single film essentially consists of a material selected from the group consisting of metal oxide and metal nitride.
Claim 40
Dependent Claim
48 words
An apparatus according to claim 26, wherein the heater comprises a cylindrical cuvette having the inner surface on which the film structure is formed, and the film structure includes a single film essentially consisting of a material selected from a group consisting of metal oxide and metal nitride.
Claim 41
Dependent Claim
14 words
An apparatus according to claim 38, wherein the cylindrical cuvette essentially consists of graphite.
Claim 42
Dependent Claim
44 words
An apparatus according to claim 38, wherein the film structure includes a two-layered film, the surface of the heater is coated by a metal carbide film, and the carbide film is coated by one of a metal oxide film and a metal nitride film.
Claim 43
Dependent Claim
33 words
An apparatus according to claim 40, wherein the metal carbide film essentially consisted of a material selected from the group consisting of tantalum carbide, tungsten carbide, hafnium carbide, zirconium carbide and titanium carbide.
Claim 44
Dependent Claim
82 words
An apparatus according to claim 26, wherein the heater comprises a cylindrical cuvette, and a metal tube having a high melting point and fitted in the cylindrical cuvette, the tube has the inner surface for defining the path, through which the inert gas is passed, the film structure is a two-layered film, the surface of the tube is coated by a metal carbide film, and the carbide film is coated by on of the metal oxide film and the metal nitride film.
Claim 45
Dependent Claim
32 words
An apparatus according to claim 42, wherein the metal carbide essentially consists of a material selected from the group consisting of tantalum carbide, tungsten carbide hafnium carbide, zirconium carbide and titanium carbide.
Claim 46
Dependent Claim
14 words
An apparatus according to claim 42, wherein the cylindrical cuvette essentially consists of graphite.
Claim 47
Dependent Claim
44 words
An apparatus according to claim 26, wherein the film structure includes two-layered film, the surface of the electrode structure being coated by a metal carbide film and the carbide film is coated by one of the metal oxide film and the metal nitride film.
Claim 48
Dependent Claim
33 words
An apparatus according to claim 45, wherein the metal carbide film essentially consists of a material selected from the group consisting of tantalum carbide, tungsten carbide, hafnium carbide, zirconium carbide and titanium carbide.
Claim 49
Dependent Claim
51 words
An apparatus according to claim 26, wherein the heater has a sample introducing hole for introducing the sample into the inner surface of the film structure to the vaporization of the sample, and grooves coated by the film structure are formed on the inner surface faced to the sample introducing hole.
Claim 50
Dependent Claim
20 words
An apparatus according to claim 47, wherein the film structure has a thickness within a range of 1 -10 μm.
Claim 51
Dependent Claim
51 words
An apparatus according to claim 26, further comprising: a means defining at least one flowing path for supplying the vaporized sample and the inert gas carrying said vaporized sample to the inductively coupled plasma mass spectrometer; and a means for heating said means for defining said at least one flowing path.
Claim 52
Dependent Claim
22 words
An apparatus according to claim 49, wherein the means defining said at least one flowing path is made of a transparent material.
Claim 53
Dependent Claim
51 words
An apparatus according to claim 50, wherein the means defining said at least one flowing path defines plural paths for supplying the vaporized sample and the inert gas carrying said vaporized sample to the inductively coupled plasma mass spectrometer, and includes a means for selecting one of said plural flowing paths.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-12-11 | 1993-06-12 | 1993-12-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-12-11 | 1997-06-12 | 1997-12-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-12-11 | 2001-06-12 | 2001-12-12 | $7700.00 | Window Closed / Lapsed |