Calibration system for coordinate measuring machine

Claim 2

Apparatus for measuring position errors in a machine having a first element and a table which are movable in at least two dimensions relative to each other, said apparatus comprising: a reflector assembly attachable to said first element; a laser measuring assembly attachable to said table for directing at least one outgoing laser beam in a selected measurement direction and for sensing said at least one laser beam reflected from said reflector assembly and generating position error signals representing position errors of said first element; and means for mounting said laser measuring assembly to said table in different orientations and for mounting said reflector assembly to said first element in different orientations, said reflector assembly and said measuring assembly being aligned in each of said different orientations so that said at least one outgoing laser beam is reflected said reflector assembly back to said laser measuring assembly.

Claim 3

Apparatus for measuring position errors as defined in claim 1 wherein said mounting means comprises a mounting fixture which is attached to said table in a preselected position and which includes means for mounting said laser measuring assembly in each of said different orientations.

Claim 4

Apparatus for measuring position errors as defined in claim 1 wherein said mounting means includes means for mounting said laser measuring assembly and said reflector assembly in three mutually orthogonal orientations whereby a set of parametric errors along three mutually orthogonal directions is measured.

Claim 5

Apparatus for measuring position errors as defined in claim 3 wherein said machine is a coordinate measuring machine and said first element is a ram movable in three dimensions.

Claim 6

Apparatus for measuring position errors as defined in claim 3 wherein said laser measuring assembly and said reflector assembly include first means for measuring displacement errors, second means for measuring straightness errors in two directions perpendicular to said selected direction, third means for measuring pitch and yaw errors representative of rotation about axes perpendicular to said selected direction, and fourth means for measuring roll errors representative of rotation about said selected direction.

Claim 7

Apparatus for measuring position errors as defined in claim 5 further including means responsive to said position error signals for calculating a matrix of parametric errors corresponding to each selected position along said selected measurement direction.

Claim 8

Apparatus for measuring position errors as defined in claim 6 wherein said machine includes a coordinate measuring machine having a bridge, a carriage and a ram movable in three mutually orthogonal directions and further includes scale devices for monitoring the positions of said bridge, said carriage and said ram.

Claim 9

Apparatus for measuring position errors as defined in claim 7 further including means responsive to said parametric errors for calculating total errors for given positions of said bridge, said carriage and said ram and for subtracting said total errors from the readings of said scale devices to provide accurate position information.

Claim 10

Apparatus for measuring position errors as defined in claim 5 wherein said second measuring means comprises a retroreflector mounted to said reflector assembly, means for directing a laser beam at said retroreflector from said measuring assembly and a photosensor in said measuring assembly partitioned into quadrants for sensing deviations of the reflected beam from the center thereof.

Claim 11

Apparatus for measuring position errors as defined in claim 5 wherein said third measuring means comprises a mirror mounted to said reflector assembly, means for directing a laser beam at said mirror from said measuring assembly and a photosensor located in said measuring assembly partitioned into quadrants for sensing deviations of the reflected beam from the center thereof.

Claim 12

Apparatus for measuring position errors as defined in claim 5 wherein said fourth measuring means comprises a pair of retroreflectors spaced apart by a prescribed distance and mounted to said reflector assembly, means for directing individual laser beams at each of said retroreflectors from said measuring assembly, and a pair of partitioned photosensors in said measuring assembly for sensing the deviation of each reflected beam in a direction perpendicular to the selected direction and perpendicular to a line drawn between said pair of retroreflectors, said roll error being proportional to the difference between the deviation sensed by the two photosensors divided by said prescribed distance.

Claim 13

In a machine having a first element and a table which are movable in at least two directions relative to each other, a method for measuring parametric errors in the relative positions of the first element and the table comprising the steps of: (a) mounting a reflector assembly to the first element in a first reflector orientation and positioning the first element in a first selected position; (b) mounting a laser measuring assembly to the table in a first laser orientation aligned with said reflector assembly such that at least one laser beam is directed by said measuring assembly along a selected measurement direction at said reflector assembly and is reflected back to said measuring assembly; (c) sensing said at least one laser beam reflected back to said measuring assembly to provide position error signals representing displacement, straightness, pitch, yaw and roll position errors of said first element relative to said table and storing said error signals; (d) moving said first element and said reflector assembly in said selected direction to another selected position wherein said reflector assembly is aligned with said at least one laser beam; (e) sensing said at least one laser beam reflected back to said measuring assembly to provide position error signals representing displacement, straightness, pitch, yaw and roll position errors of said first element relative to said table and storing said error signals; (f) repeating steps (d) and (e) for a number of selected positions in the direction of said at least one laser beam; (g) mounting said reflector assembly to the first element in a second reflector orientation; (h) mounting said laser assembly to the table in a second laser orientation in alignment with said reflector assembly; and (i) repeating steps (c) through (f) for said second orientation.

Claim 14

In a machine having a first element and a table which are movable in at least two directions relative to each other, a method for measuring parametric errors in the relative positions of the first element and the table comprising the steps of: (a) mounting a reflector assembly to the first element in a first reflector orientation and positioning the first element in a first selected position; (b) mounting a laser measuring assembly to the table in a first laser orientation aligned with said reflector assembly such that at least one laser beam is directed by said measuring assembly along a selected measurement direction at said reflector assembly and is reflected back to said measuring assembly; (c) sensing said at least one laser beam reflected back to said measuring assembly to provide position error signals representing displacement, straightness, pitch, yaw and roll position errors of said first element relative to said table and storing said error signals; (d) moving said first element and said reflector assembly in said selected direction to another selected position wherein said reflector assembly is aligned with said at least one laser beam; (e) sensing said at least one laser beam reflected back to said measuring assembly to provide position error signals representing displacement, straightness, pitch, yaw and roll position errors of said first element relative to said table and storing said error signals; (f) repeating steps (d) and (e) for a number of selected positions in the direction of said at least one laser beam; (g) mounting said reflector assembly to the first element in a second reflector orientation; (h) mounting said laser assembly to the table in a second laser orientation in alignment with said reflector assembly; and (i) repeating steps (c) through (f) for said second orientation.

Claim 15

A method for measuring parametric errors as defined in claim 12 further including the steps of (j) mounting said reflector assembly to the first element in a third reflector orientation, said first, second and third reflector orientations being mutually orthogonal; (k) mounting said laser measuring assembly to the table in a third laser orientation in alignment with said reflector assembly, said first, second and third laser orientations being mutually orthogonal; and (l) repeating steps (c) through (f) for said third orientation.

Claim 16

A method for measuring parametric errors as defined in claim 13 further including the step of (m) converting the position error signals for each selected position of said first, second and third orientations into a matrix of parametric errors along three mutually orthogonal directions.

Claim 17

A method for measuring parametric errors as defined in claim 14 further including the steps of (n) for a given position of said first element, calculating total position errors thereof from said parametric errors and (o) obtaining scale readings of said machine of the position of the first element relative to the table and subtracting the total errors of said first element from the scale readings of said machine to obtain a corrected position of said first element.

Claim 18

In a machine having a first element and a table which are movable in a selected direction relative to each other, apparatus for measuring parametric errors in the relative positions of the first element and the table comprising: a reflector assembly attachable to said first element and a laser measuring assembly attachable to said table for directing a plurality of laser beams at said reflector assembly and for sensing laser beams reflected from said reflector assembly, said reflector assembly and said laser measuring assembly including first means for measuring displacement errors along the selected direction, second means for measuring straightness errors in two directions perpendicular to the selected direction comprising a retroreflector mounted to said reflector assembly, means for directing a laser beam at said retroreflector from said measuring assembly, and a photosensor in said measuring assembly partitioned into four quadrants for sensing deviations of the reflected beam from the center thereof; third means for measuring pitch and yaw errors about two mutually orthogonal axes perpendicular to the selected direction comprising a mirror mounted to said reflector assembly, means for directing the laser beam at said mirror from said measuring assembly and a photosensor located in said measuring assembly partitioned into four quadrants for sensing deviations of the reflected beam from the center thereof and fourth means for measuring roll error about the selected direction comprising a pair of retroreflectors spaced apart by a prescribed distance and mounted to said reflector assembly, means for directing individual laser beams at each of said retroreflectors from said measuring assembly, and a pair of partitioned photosensors in said measuring assembly for sensing the deviation of each reflected beam in a direction perpendicular to the selected direction and perpendicular to a line drawn between said pair of retroreflectors, said roll error being proportional to the difference between the deviation sensed by the two photosensors divided by said prescribed distance.

Claim 19

In a machine having a first element and a table which are movable in a selected direction relative to each other, apparatus for measuring parametric errors in the relative positions of the first element and the table comprising: a reflector assembly attachable to said first element and a laser measuring assembly attachable to said table for directing a plurality of laser beams at said reflector assembly and for sensing laser beams reflected from said reflector assembly, said reflector assembly and said laser measuring assembly including first means for measuring displacement errors along the selected direction, second means for measuring straightness errors in two directions perpendicular to the selected direction comprising a retroreflector mounted to said reflector assembly, means for directing a laser beam at said retroreflector from said measuring assembly, and a photosensor in said measuring assembly partitioned into four quadrants for sensing deviations of the reflected beam from the center thereof; third means for measuring pitch and yaw errors about two mutually orthogonal axes perpendicular to the selected direction comprising a mirror mounted to said reflector assembly, means for directing the laser beam at said mirror from said measuring assembly and a photosensor located in said measuring assembly partitioned into four quadrants for sensing deviations of the reflected beam from the center thereof and fourth means for measuring roll error about the selected direction comprising a pair of retroreflectors spaced apart by a prescribed distance and mounted to said reflector assembly, means for directing individual laser beams at each of said retroreflectors from said measuring assembly, and a pair of partitioned photosensors in said measuring assembly for sensing the deviation of each reflected beam in a direction perpendicular to the selected direction and perpendicular to a line drawn between said pair of retroreflectors, said roll error being proportional to the difference between the deviation sensed by the two photosensors divided by said prescribed distance.

Claim 20

Apparatus for measuring parametric errors as defined in claim 16 wherein said laser measuring assembly further includes a laser for generating a laser beam and means for splitting said laser beam into parts supplied to said first measuring means, said second measuring means, said third measuring means and said fourth measuring means.

Claim 21

Apparatus for measuring parametric errors as defined in claim 17 wherein said laser beam splitting means include a polarizing beam splitter for polarizing the laser beam so that the reflected portion is polarized perpendicular to the plane of the beam splitter, and the transmitted beam is polarized parallel to the plane of the beam splitter and wherein said third measuring means further includes a quarter wave plate for rotating the plane of polarization of the reflected beam by ninety degrees so the return beam from the mirror passes through the polarizing beam splitter, rather than being reflected back toward the laser.

Claim 22

Apparatus for measuring parametric errors as defined in claim 17 further including means for moving said reflector assembly and said first element to selected positions along said selected direction.

Claim 23

Apparatus for measuring parametric position errors in a machine having a first element and a second element movable relative to each other, said apparatus comprising: a first calibration assembly attachable to said first element; a second calibration assembly attachable to said second element; interferometer means for measuring change of distance between the first and second calibration assemblies in a selected direction; means for generating a plurality of laser beams between said first and second calibration assemblies and positionally sensitive to transverse and rotational relative movements of said first and second calibration assemblies; beam position sensing means responsive to said position-sensitive laser beams for sensing transverse and rotational relative movements of said first and second calibration assemblies; and means responsive to the outputs of said interferometer means and said beam position sensing means for calculating parametric position errors between said first and second elements.

Claim 24

Apparatus for measuring parametric position errors in a machine having a first element and a second element movable relative to each other, said apparatus comprising: a first calibration assembly attachable to said first element; a second calibration assembly attachable to said second element; interferometer means for measuring change of distance between the first and second calibration assemblies in a selected direction; means for generating a plurality of laser beams between said first and second calibration assemblies and positionally sensitive to transverse and rotational relative movements of said first and second calibration assemblies; beam position sensing means responsive to said position-sensitive laser beams for sensing transverse and rotational relative movements of said first and second calibration assemblies; and means responsive to the outputs of said interferometer means and said beam position sensing means for calculating parametric position errors between said first and second elements.

Claim 25

Apparatus for measuring parametric position errors in a machine having a first element and a second element movable in at least two directions relative to each other, said apparatus comprising: a calibration assembly including a first subassembly attachable to said first element and a second subassembly attachable to said second element, said second subassembly including means for directing a plurality of laser beams at said first subassembly, and said first subassembly including means for receiving said plurality of laser beams, said calibration assembly further including sensing means responsive to said plurality of laser beams for providing position error signals representing parametric position errors along said at least two directions of movement, said parametric errors including displacement errors in three mutually perpendicular directions and rotation errors about said three mutually perpendicular directions; and means for mounting said first and second subassemblies so that said plurality of laser beams is successively parallel to said at least two directions of movement so that said sensing means provides said position error signals for said at least two directions of movement.

Claim 26

Apparatus for measuring parametric position errors in a machine having a first element and a second element movable in at least two directions relative to each other, said apparatus comprising: a calibration assembly including a first subassembly attachable to said first element and a second subassembly attachable to said second element, said second subassembly including means for directing a plurality of laser beams at said first subassembly, and said first subassembly including means for receiving said plurality of laser beams, said calibration assembly further including sensing means responsive to said plurality of laser beams for providing position error signals representing parametric position errors along said at least two directions of movement, said parametric errors including displacement errors in three mutually perpendicular directions and rotation errors about said three mutually perpendicular directions; and means for mounting said first and second subassemblies so that said plurality of laser beams is successively parallel to said at least two directions of movement so that said sensing means provides said position error signals for said at least two directions of movement.

Claim 27

Apparatus for measuring parametric position errors in a machine having a first element and a second element movable in at least two directions relative to each other, said apparatus comprising: a calibration assembly including a first subassembly attachable to said first element and a second subassembly attachable to said second element, said second subassembly including means for directing at least one laser beam in a selected direction at said first subassembly, and said first subassembly including means for receiving said at least one laser beam, said calibration assembly further including sensing means responsive to said at least one laser beam for providing position error signals representing said parametric position error signals along said at least said two directions of movement, said parametric errors including displacement errors in three mutually perpendicular directions and rotation errors about said three mutually perpendicular directions; and means for mounting said first and second subassemblies so that said at least one laser beam is successively parallel to said at least two directions of movement so that said sensing means provides said position error signals for said at least two directions of movement.

Claim 28

Apparatus for measuring parametric position errors in a machine having a first element and a second element movable in at least two directions relative to each other, said apparatus comprising: a calibration assembly including a first subassembly attachable to said first element and a second subassembly attachable to said second element, said second subassembly including means for directing at least one laser beam in a selected direction at said first subassembly, and said first subassembly including means for receiving said at least one laser beam, said calibration assembly further including sensing means responsive to said at least one laser beam for providing position error signals representing said parametric position error signals along said at least said two directions of movement, said parametric errors including displacement errors in three mutually perpendicular directions and rotation errors about said three mutually perpendicular directions; and means for mounting said first and second subassemblies so that said at least one laser beam is successively parallel to said at least two directions of movement so that said sensing means provides said position error signals for said at least two directions of movement.

Claim 29

Apparatus for measuring parametric position errors as defined in claim 22 wherein said mounting means comprises a mounting fixture which is attached to said second element in a preselected position and which includes means for mounting said second subassembly in each of said different orientations.

Claim 30

Apparatus for measuring parametric position errors as defined in claim 22 wherein said mounting means includes means for mounting said first and second subassemblies in three mutually orthogonal orientations whereby a set of parametric errors along three mutually orthogonal directions is measured.

Claim 31

Apparatus for measuring parametric position errors as defined in claim 24 wherein said first and second subassemblies include first means for measuring displacement errors, second means for measuring straightness errors in two directions perpendicular to said selected direction, third means for measuring pitch and yaw errors representative of rotation about axes perpendicular to said selected direction and fourth means for measuring roll errors representative of rotation about said selected direction.

Claim 32

Apparatus for measuring parametric position errors as defined in claim 22 wherein said machine includes scale devices for measuring the position of said second element relative to said first element and wherein said apparatus further includes means responsive to said position error signals for calculating a matrix of parametric errors corresponding to selected positions along said selected directions of movement and means responsive to said parametric errors for calculating total errors for given positions of said first and second elements and for subtracting said total errors from the readings of said scale devices to provide accurate position information.

Claim 33

Apparatus for measuring parametric position errors as defined in claim 25 wherein said second measuring means comprises a retroreflector mounted to one of said subassemblies, means for directing a laser beam at said retroreflector from the other of said subassemblies and a photosensor partitioned into quadrants for sensing deviations from the center thereof of the laser beam reflected from said retroreflector.

Claim 34

Apparatus for measuring parametric position errors as defined in claim 25 wherein said third measuring means comprises a mirror mounted to one of said subassemblies, means for directing a laser beam at said mirror from the other of said subassemblies and a photosensor partitioned into quadrants for sensing deviations from the center thereof of the laser beam reflected from said mirror.

Claim 35

Apparatus for measuring parametric position errors as defined in claim 25 wherein said fourth measuring means comprises a pair of retroreflectors spaced apart by a prescribed distance and mounted to one of said subassemblies, means for directing individual laser beams at each of said retroreflectors from the other of said subassemblies, and a pair of partitioned photosensors for sensing the deviation of each laser beam reflected from said retroreflectors in a direction perpendicular to the selected direction and perpendicular to a line drawn between said pair of retroreflectors, said roll error being proportional to the difference between the deviation sensed by the two photosensors divided by said prescribed distance.