US4881487A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fluid level sensing method and apparatus
Assignee: Micron Technology Inc
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Filing: 1988-11-21
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Granted: 1989-11-21
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Expires: 2008-11-21
Abstract
Abstract A fluid level sensor is provided in a fluid dispensing system, primarily in a photoresist dispensing system used in a semiconductor manufacturing process. A bubble is introduced into the fluid shortly before fluid supply is emptied, said bubble being used to detect a low fluid level. The invention uses a snap-on combination cap and pickup tube, the pickup tube having a small hole near its lower tip, and the cap containing an optical bubble detector.
Inventors
- 👤 Scott E. Moore
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 15:28
CPC Classifications
G; G01; G01F; G01F23/00; G01F23/0007; G01F23/0046
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
135 words
Apparatus to sense a predetermined level of a fluid being dispensed from a bottle means by a pump, comprising: (a) a substantially vertical pickup tube within said bottle means, having a bubble hole located at a preselected point along its length at a corresponding elevation to the predetermined level to be sensed, said pickup tube having a first end immersed in the fluid, so that as said fluid is being pumped out of said bottle means through said pickup tube, said fluid level moves along the outside of said pickup tube and passes said bubble hole, said bubble hole then introducing a bubble into said pickup tube; and (b) bubble detection means mounted within said bottle means and at a second end of said pickup tube, to detect said bubble and hence said predetermined level.
Claim 2
Dependent Claim
135 words
Apparatus to sense a predetermined level of a fluid being dispensed from a bottle means by a pump, comprising: (a) a substantially vertical pickup tube within said bottle means, having a bubble hole located at a preselected point along its length at a corresponding elevation to the predetermined level to be sensed, said pickup tube having a first end immersed in the fluid, so that as said fluid is being pumped out of said bottle means through said pickup tube, said fluid level moves along the outside of said pickup tube and passes said bubble hole, said bubble hole then introducing a bubble into said pickup tube; and (b) bubble detection means mounted within said bottle means and at a second end of said pickup tube, to detect said bubble and hence said predetermined level.
Claim 3
Dependent Claim
79 words
The apparatus of claim 1, wherein said first end of said pickup tube extends to a bottom-most corner of said bottle means, so that almost all of said fluid can be pumped out of said bottle means, and wherein said bubble hole is located near said first end of said pickup tube so that said predetermined level is a level where said bottle means is practically empty but not so empty that said pickup tube picks up gas voids.
Claim 4
Dependent Claim
13 words
The apparatus of claim 1, wherein said fluid is photoresist or photoresist primer.
Claim 5
Dependent Claim
107 words
The apparatus of claim 1, further comprising: (a) a cap, attached to said second end of said pickup tube, having said fluid pumped through it, having said bubble detection means attached thereto; (b) a gripper rotatably attached to said cap, configured to grip a feature of said bottle means, to compressively attach said cap to said bottle means without rotation of said cap, said first end of said pickup tube extending into a mouth of the bottle of said bottle means; and (c) a deformable washer, positioned between said cap and said bottle's mouth, to provide a seal while said cap is attached to said bottle means.
Claim 6
Dependent Claim
27 words
The apparatus of claim 4, further comprising: (a) venting and backfill means in said cap; and (b) a threadless seal between said backfill means and said cap.
Claim 7
Dependent Claim
95 words
The apparatus of claim 4, wherein said bubble detection means comprises: (a) an optical emitter and an optical detector of a certain frequency; (b) said emitter and said detector configured to optically communicate across said fluid while it is being pumped through said cap, so that said detector detects a first intensity of light from said emitter when only said fluid is between said detector and said emitter, and so that said detector detects a second intensity of light from said emitter when a bubble is in said fluid between said detector and said emitter.
Claim 8
Dependent Claim
16 words
The apparatus of claim 6, wherein said frequency does not cause a reaction in said fluid.
Claim 9
Dependent Claim
62 words
The apparatus of claim 6, further comprising: (a) a substantially non-opaque and chemically inert outlet tube, located in said cap and positioned between said emitter and said detector, said outlet tube carrying said fluid as it is pumped through said cap from said second end of said pickup tube, to prevent said fluid from contacting said cap, said emitter, and said detector.
Claim 10
Dependent Claim
19 words
The apparatus of claim 8, further comprising: (a) a threadless seal between said pickup tube and said outlet tube.
Claim 11
Independent Claim
140 words
A method to sense a predetermined level of a fluid being dispensed from a bottle means by a pump, comprising the steps of: (a) providing a substantially vertical pickup tube within said bottle means, having a first end in fluid communication with said pump and having a bubble hole located along its length at a corresponding elevation to the predetermined level to be sensed, said pickup tube having a second end immersed in the fluid, so that when said fluid level moves along the outside of said pickup tube and passes said bubble hole as said fluid is being pumped out through said pickup tube, said bubble hole introduces a bubble into said pickup tube; (b) providing bubble detection means at said first end of said pickup tube; and (c) while dispensing, detecting said bubble and hence said predetermined level.
Claim 12
Independent Claim
140 words
A method to sense a predetermined level of a fluid being dispensed from a bottle means by a pump, comprising the steps of: (a) providing a substantially vertical pickup tube within said bottle means, having a first end in fluid communication with said pump and having a bubble hole located along its length at a corresponding elevation to the predetermined level to be sensed, said pickup tube having a second end immersed in the fluid, so that when said fluid level moves along the outside of said pickup tube and passes said bubble hole as said fluid is being pumped out through said pickup tube, said bubble hole introduces a bubble into said pickup tube; (b) providing bubble detection means at said first end of said pickup tube; and (c) while dispensing, detecting said bubble and hence said predetermined level.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-11-20 | 1993-05-22 | 1993-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-11-20 | 1997-05-22 | 1997-11-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-11-20 | 2001-05-22 | 2001-11-21 | $7700.00 | Window Closed / Lapsed |