US4877479A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for ion deposition and etching
Assignee: University of New Mexico
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Filing: 1988-06-27
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Granted: 1989-10-31
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Expires: 2008-06-27
Abstract
Abstract The disclosure relates to maskless deposition and etching and more particularly to maskless deposition and etching of the surface of objects using single and multiple ion sources.
Inventors
- 👤 John R. McNeil
- 👤 Scott R. Wilson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 09:57
CPC Classifications
C; C03; C03C; C03C23/00; C03C23/0005; C03C23/0055; H; H01; H01J; H01J37/00; H01J37/30; H01J37/302; H01J37/3023; H01J37/305; H01J37/3053
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
66 words
A method using maskless deposition for changing the existing topography of the surface of an object to a predetermined topography, the method comprising the steps of: (a) comparing the existing topography of the surface to the predetermined topography, (b) using an algorithm comprising image restoration, using maskless deposition, selectively adding material to the surface of the object to cause the surface to reach the predetermined topography.
Claim 2
Independent Claim
66 words
A method using maskless deposition for changing the existing topography of the surface of an object to a predetermined topography, the method comprising the steps of: (a) comparing the existing topography of the surface to the predetermined topography, (b) using an algorithm comprising image restoration, using maskless deposition, selectively adding material to the surface of the object to cause the surface to reach the predetermined topography.
Claim 3
Dependent Claim
13 words
The invention of claim 1 wherein the maskless deposition comprises ion assisted deposition.
Claim 4
Dependent Claim
11 words
The invention of claim 1 wherein the predetermined topography is symmetric.
Claim 5
Dependent Claim
11 words
The invention of claim 1 wherein the predetermined topography is non-symmetric.
Claim 6
Dependent Claim
74 words
The invention of claim 1 wherein said algorithm is: ##EQU4## where at t(x,y) a deposition beam is at each point (x,y), F(u,v) is the orthogonal transform of a predetermined surface, D(u,v) is the orthogonal transform of the desired surface profile, H(u,v) is the orthogonal transform of the surface material modification profile, -1 is the inverse orthogonal transform of the forward transform used to form F, D and H, and γ is the multivariate parameter.
Claim 7
Dependent Claim
23 words
The invention of claim 1 wherein the beam emerges from a grid comprising a plurality of discrete sources spaced in a predetermined pattern.
Claim 8
Dependent Claim
15 words
The invention of claim 6 further comprising controlling the spatial distribution of the ion beam.
Claim 9
Dependent Claim
14 words
The invention of claim 1 wherein step (b) uses a plurality of deposition sources.
Claim 10
Independent Claim
70 words
A method using ion etching for changing the existing topography of the surface of an object to a predetermined topography, the method comprising the steps of: (a) comparing the existing topography of the surface to the predetermined topography, (b) using an algorithm comprising image restoration, and using a plurality of ion sources, selectively etching material from the surface of the object to cause the surface to reach the predetermined topography.
Claim 11
Independent Claim
70 words
A method using ion etching for changing the existing topography of the surface of an object to a predetermined topography, the method comprising the steps of: (a) comparing the existing topography of the surface to the predetermined topography, (b) using an algorithm comprising image restoration, and using a plurality of ion sources, selectively etching material from the surface of the object to cause the surface to reach the predetermined topography.
Claim 12
Independent Claim
73 words
A method for tuning the thickness of a coating on an object to provide the object with selected characteristics, the method comprising the steps of: (a) providing an object having a coating to be tuned, (b) using an algorithm comprising image restoration, etching and depositing on the surface of the coating with an ion beam and deposition sources to selectively remove and add material, thereby causing the coating to reach the predetermined thickness.
Claim 13
Independent Claim
73 words
A method for tuning the thickness of a coating on an object to provide the object with selected characteristics, the method comprising the steps of: (a) providing an object having a coating to be tuned, (b) using an algorithm comprising image restoration, etching and depositing on the surface of the coating with an ion beam and deposition sources to selectively remove and add material, thereby causing the coating to reach the predetermined thickness.
Claim 14
Dependent Claim
14 words
The invention of claim 10 wherein step (b) comprises using a single ion source.
Claim 15
Dependent Claim
15 words
The invention of claim 10 wherein step (b) comprises using a plurality of ion sources.
Claim 16
Dependent Claim
20 words
The invention of claim 10 wherein the coating is tuned to a thickness variation of less than about 25 Angstroms.
Claim 17
Dependent Claim
20 words
The invention of claim 10 wherein the coating is tuned to a thickness variation of less than about 12 Angstroms.
Claim 18
Dependent Claim
11 words
The invention of claim 10 wherein one selected characteristic is transmissivity.
Claim 19
Dependent Claim
11 words
The invention of claim 10 wherein one selected characteristic is reflectivity.
References Cited (Backward Citations)
US3548189A
Cited
US3699334A
Cited
US4405989A
Cited
US4367044A
Cited
US4457803A
Cited
US4411733A
Cited
US4450031A
Cited
US4523971A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-30 | 1993-05-01 | 1993-10-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-30 | 1997-05-01 | 1997-10-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-30 | 2001-05-01 | 2001-10-31 | $7700.00 | Window Closed / Lapsed |