US4875748A
Expired / Lapsed
US
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Polygon mirror
Assignee: Tokyo Electron Ltd
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Filing: 1988-07-01
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Granted: 1989-10-24
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Expires: 2008-07-01
Abstract
Abstract A polygon mirror has a plurality of elliptically-curved convex mirror surfaces functioning as light reflection surfaces, each having substantially the same shape as the maximum curvature portion of an ellipse which has long axis b and short axis c. The convex mirror surfaces are uniformly arranged on the circumference of an inscribed circle whose center is set on the long axis b, whose radius is Rm, and which is in contact with the maximum curvature portion of the ellipse. The polygon mirror reflects an incident light beam while being rotated, and scans the incident light beam in the range of effective scanning length Lo on a preset scanning plane which is set at incident light beam travelling distance R from the center of the inscribed circle of the polygon mirror.
Inventors
- 👤 Yasuo Matsumoto
- 👤 Kazunori Murakami
- 👤 Tomonori Ikumi
- 👤 Yasuo Iwafune
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 03:11
CPC Classifications
G; G02; G02B; G02B26/00; G02B26/08; G02B26/10; G02B5/00; G02B5/08; G02B5/09
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
80 words
A polygon mirror comprising a plurality of elliptic convex surfaces functioning as light reflection surfaces and each having substantially the same shape as the maximum curvature portion of an ellipse having a long axis b and a short axis c, said elliptic convex surfaces being uniformly arranged on the circumference of an inscribed circle whose center is set on said long axis b, whose radius is Rm, and which is in contact with the maximum curvature portion of said ellipse.
Claim 2
Dependent Claim
80 words
A polygon mirror comprising a plurality of elliptic convex surfaces functioning as light reflection surfaces and each having substantially the same shape as the maximum curvature portion of an ellipse having a long axis b and a short axis c, said elliptic convex surfaces being uniformly arranged on the circumference of an inscribed circle whose center is set on said long axis b, whose radius is Rm, and which is in contact with the maximum curvature portion of said ellipse.
Claim 3
Dependent Claim
60 words
A polygon mirror according to claim 1, wherein said polygon mirror reflects an incident light beam while being rotated, and scans the incident light beam in the range of effective scanning length Lo on a preset scanning plane which is set at an incident light beam travelling distance R from the center of said inscribed circle of said polygon mirror.
Claim 4
Dependent Claim
120 words
A polygon mirror according to claim 2, wherein the light beam transmitted from said polygon mirror to said scanning plane is scanned on an x-y plane having the center of said inscribed circle as the origin, and when (1) a rotation angle of a preset point on said elliptic convex surface of said polygon mirror, from which the light beam is reflected, with respect to said long axis b, as viewed from the center of said inscribed circle is set to θ, (2) and a distance between a center of said ellipse and the center of said inscribed circle is set to a, then a=b-Rm and coordinates xo and yo at the preset point are substantially expressed as follows: ##EQU14##
Claim 5
Dependent Claim
67 words
A polygon mirror according to claim 3, wherein differentiated values dx/dθ and dy/dθ of x and y coordinates at said preset point differentiated by said rotation angle θ and a differentiated value of β differentiated by said rotation angle are expressed as follows: ##EQU15## where γ, β, and l are defined as follows by using the values of xo, yo, a, b, c, R, and Rm: ##EQU16##
Claim 6
Dependent Claim
31 words
A polygon mirror according to claim 4, wherein coordinates xc and yc on said x-y plane of a light beam focusing point on said scanning plane are expressed as follows: ##EQU17##
Claim 7
Dependent Claim
71 words
A polygon mirror according to claim 5, wherein a distance between the center of said inscribed circle and said preset point is set to γ, rotation angle θ is set to θo when the y coordinate of said focusing point on said scanning plane is equal to half the effective scanning length Lo, that is, when y=Lo/2, and Lo, R, γ, and β are determined to satisfy the following expression: ##EQU18##
Claim 8
Dependent Claim
22 words
A polygon mirror according to claim 6, wherein R, xc, and yc are determined to satisfy the following expression: -0.05R<xc·cos θ+yc·sin θ-R≦0.05R.
Claim 9
Dependent Claim
22 words
A polygon mirror according to claim 5, wherein R, xc, and yc are determined to satisfy the following expression: -0.05R<xc·cos θ+yc·sin θ-R≦0.05R.
Claim 10
Dependent Claim
170 words
A post objective light deflecting apparatus comprising: a polygon mirror rotation body having a plurality of elliptic convex mirror surfaces uniformly arranged on the circumference of a circle having a radius Rm with a preset rotation center axis, wherein each of said elliptic mirror surfaces corresponds to a portion of an ellipse having a long axis b and a short axis c, which intersects said long axis b and is formed symmetrical with respect thereto, and said rotation center axis passes said long axis b and is perpendicular to the x-y plane defined by said long axis b and short axis c; and a photoreceptor drum having a light beam scanning plane positioned apart from said rotation center axis by preset distance R, wherein each of said elliptic convex mirror surfaces reflects an incident light beam towards said light beam scanning plane, and the reflected light beam is scanned in a range of preset scanning length Lo on said light beam scanning plane by rotating said polygon mirror rotation body.
Claim 11
Dependent Claim
170 words
A post objective light deflecting apparatus comprising: a polygon mirror rotation body having a plurality of elliptic convex mirror surfaces uniformly arranged on the circumference of a circle having a radius Rm with a preset rotation center axis, wherein each of said elliptic mirror surfaces corresponds to a portion of an ellipse having a long axis b and a short axis c, which intersects said long axis b and is formed symmetrical with respect thereto, and said rotation center axis passes said long axis b and is perpendicular to the x-y plane defined by said long axis b and short axis c; and a photoreceptor drum having a light beam scanning plane positioned apart from said rotation center axis by preset distance R, wherein each of said elliptic convex mirror surfaces reflects an incident light beam towards said light beam scanning plane, and the reflected light beam is scanned in a range of preset scanning length Lo on said light beam scanning plane by rotating said polygon mirror rotation body.
Claim 12
Dependent Claim
89 words
An apparatus according to claim 9, wherein each of said elliptic convex mirror surfaces has a light beam reflection point, and when a rotation angle of said light beam reflection point with respect to said long axis b, as viewed from said preset rotation center axis, is expressed by θ, and a distance between the center of said ellipse and the preset rotation center axis is expressed by a, then coordinates xo and yo of said light beam reflection point on said x-y plane are expressed as follows: ##EQU19##
Claim 13
Dependent Claim
68 words
An apparatus according to claim 10, wherein differentiated values dx/dθ and dy/dθ of x and y coordinates at said light beam reflection point differentiated by said rotation angle θ and differentiated value of β differentiated by said rotation angle θ are expressed as follows: ##EQU20## where γ, β, and l are defined as follows by using the values of xo, yo, a, b, c, R, and Rm: ##EQU21##
Claim 14
Dependent Claim
30 words
An apparatus according to claim 11, wherein coordinates xc and yc on said x-y plane of a light beam focusing point on said scanning plane are expressed as follows: ##EQU22##
Claim 15
Dependent Claim
69 words
An apparatus according to claim 12, wherein a distance between said rotation center axis and said light beam reflection point is set to γ, rotation angle θ is set to θo when the y coordinate of said focusing point on said scanning plane is equal to half the scanning length Lo, that is, when y=Lo/2, and Lo, R, γ, and β are determined to satisfy the following expressions: ##EQU23##
Claim 16
Dependent Claim
21 words
An apparatus according to claim 13, wherein R, xc, and yc are determined to satisfy the following expression: -0.05R<xc·cos θ+yc·sin θ-R≦0.05R.
Claim 17
Dependent Claim
21 words
An apparatus according to claim 12, wherein R, xc, and yc are determined to satisfy the following expression: -0.05R<xc·cos θ+yc·sin θ-R≦0.05R.
Claim 18
Dependent Claim
196 words
A post objective light deflector comprising a polygon mirror which has a plurality of elliptically-curved convex mirror surfaces and has a rotation axis which is perpendicular to the major and minor axes of an ellipse and passing the major axis of said ellipse, wherein said ellipse has long and short radii b and c on the major and minor axes, respectively, and passes along one of said elliptically-curved convex mirror surfaces, the radius of an inscribed circle of said polygon mirror is set to Rm, a distance from said rotation axis to a scanning plane is set to R, an effective scanning length is set to Lo, a rotation angle of said polygon mirror is set at "0", and a y coordinate of a beam spot is set at "0" when an extension of said long radius b passes a predetermined point on said scanning plane, and θ is set at "θo" when a y coordinate of a beam spot is set at Lo/2; and the following equations are obtained in the range of rotation angle θ (-θo≦θ≦θ o) of said polygon mirror: ##EQU24## and the following expressions are satisfied in a condition where a=b-Rm: ##EQU25##
Claim 19
Dependent Claim
196 words
A post objective light deflector comprising a polygon mirror which has a plurality of elliptically-curved convex mirror surfaces and has a rotation axis which is perpendicular to the major and minor axes of an ellipse and passing the major axis of said ellipse, wherein said ellipse has long and short radii b and c on the major and minor axes, respectively, and passes along one of said elliptically-curved convex mirror surfaces, the radius of an inscribed circle of said polygon mirror is set to Rm, a distance from said rotation axis to a scanning plane is set to R, an effective scanning length is set to Lo, a rotation angle of said polygon mirror is set at "0", and a y coordinate of a beam spot is set at "0" when an extension of said long radius b passes a predetermined point on said scanning plane, and θ is set at "θo" when a y coordinate of a beam spot is set at Lo/2; and the following equations are obtained in the range of rotation angle θ (-θo≦θ≦θ o) of said polygon mirror: ##EQU24## and the following expressions are satisfied in a condition where a=b-Rm: ##EQU25##
Claim 20
Dependent Claim
17 words
(error in the scanning linearity) -0. 05R<xc·cos θ+yc·sin θ-R≦0.05R (error in the curvature of the image field).
Claim 21
Dependent Claim
17 words
(error in the scanning linearity) -0. 05R<xc·cos θ+yc·sin θ-R≦0.05R (error in the curvature of the image field).
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-23 | 1993-04-24 | 1993-10-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-23 | 1997-04-24 | 1997-10-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-23 | 2001-04-24 | 2001-10-24 | $7700.00 | Window Closed / Lapsed |