Mechanism for turning over a test head of a wafer probing machine

Claim 2

A mechanism for turning over a heavyweight object, comprising: a quadric crank chain disposed substantially within a vertical plane to support an object of transfer; slide means coupled to a first movable link corresponding to the side opposite to a fixed link of the quadric crank chain, said sliding means serving to slide the first movable link in vertical direction; and guide means for supportingly guiding the slide means in a horizontal direction, said object of transfer being attached to a second movable link corresponding to a side adjacent to the fixed link of the quadric crank chain, so that the object of transfer, along with the second movable link, revolves within the vertical plane when the first movable link slides vertically.

Claim 3

The mechanism according to claim 1, wherein said object of transfer is a high-frequency test head for a wafer test.

Claim 4

The mechanism according to claim 1, wherein said second movable link is located on the upper side of the quadric crank chain.

Claim 5

The mechanism according to claim 1, wherein said slide means is a cylinder mechanism.

Claim 6

The mechanism according to claim 4, wherein said cylinder mechanism includes a single-acting cylinder.

Claim 7

The mechanism according to claim 4, wherein said cylinder mechanism includes means for controlling the static pressure of a working fluid of the cylinder mechanism in accordance with a load introduced into the cylinder mechanism through the quadric crank chain.

Claim 8

The mechanism according to claim 4, wherein said pressure control means includes a solenoid valve, a pressure sensor, a regulator, and a relief valve.

Claim 9

The mechanism according to claim 4, wherein said working fluid of the cylinder mechanism is air.

Claim 10

The mechanism according to claim 4, wherein said working fluid of the cylinder mechanism is oil.

Claim 11

The mechanism according to claim 4, wherein said guide means for supportingly guiding the cylinder mechanism in the horizontal direction includes a roller attached to a piston rod of a cylinder and a guide rail for the travel of the roller.

Claim 12

The mechanism according to claim 5, wherein said guide means for supportingly guiding the doubleacting cylinder mechanism in the horizontal direction includes a linear guide attached to the cylinder and a guide rail for the slide of the linear guide.

Claim 13

The mechanism according to claim 1, wherein said fixed link of the quadric crank chain is fitted with a timing belt so that the timing belt engages a ratchet wheel on a pivotal shaft connecting the fixed link and the second movable link.

Claim 14

The mechanism according to claim 12, wherein said ratchet wheel on the pivotal shaft is provided with a lock mechanism.

Claim 15

The mechanism according to claim 1, wherein said first movable link is situated higher than the fixed link.

Claim 16

The mechanism according to claim 1, wherein said first movable link is situated lower than the fixed link.

Claim 17

A wafer probing machine, comprising: a wafer cassette table; means for taking a wafer out of a cassette, conveying the wafer to a main chuck, and mounting the wafer on the main chuck; means for automatically adjusting the position of the wafer on the main chuck; a probe card including probes which are brought into contact with pads of chip into the wafer mounted on the main chuck; a test head, electrically connected to each of the probes of the probe card, for allowing signal transmission between the probes and an electric tester; a mechanism for turning over the test head; said mechanism including; a quadric crank chain disposed substantially within a vertical plane to support an object of transfer; slide means coupled to a first movable link corresponding to the side opposite to a fixed link of the quadric crank chain, said sliding means serving to slide the first movable link in a vertical direction; and guide means for supportingly guiding the slide means in a horizontal direction, said object of transfer being attached to a second movable link corresponding to a side adjacent to the fixed link of the quadric crank chain, so that the object of transfer, along with the second movable link, revolves within the vertical plane when the first movable link slides vertically.

Claim 18

A wafer probing machine, comprising: a wafer cassette table; means for taking a wafer out of a cassette, conveying the wafer to a main chuck, and mounting the wafer on the main chuck; means for automatically adjusting the position of the wafer on the main chuck; a probe card including probes which are brought into contact with pads of chip into the wafer mounted on the main chuck; a test head, electrically connected to each of the probes of the probe card, for allowing signal transmission between the probes and an electric tester; a mechanism for turning over the test head; said mechanism including; a quadric crank chain disposed substantially within a vertical plane to support an object of transfer; slide means coupled to a first movable link corresponding to the side opposite to a fixed link of the quadric crank chain, said sliding means serving to slide the first movable link in a vertical direction; and guide means for supportingly guiding the slide means in a horizontal direction, said object of transfer being attached to a second movable link corresponding to a side adjacent to the fixed link of the quadric crank chain, so that the object of transfer, along with the second movable link, revolves within the vertical plane when the first movable link slides vertically.