US4872755A
Expired / Lapsed
US
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Interferometer for measuring optical phase differences
Assignee: Carl Zeiss SMT GmbH
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Filing: 1988-03-07
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Granted: 1989-10-10
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Expires: 2008-03-07
Abstract
Abstract For generating several interferograms which differ from each other in the relative phase position between the interfering partial beams, a light source is utilized having a coherence length less than the optical path difference between the two component beams in the measuring path of the interferometer. Furthermore, at least one optical delay device is provided which splits the beam into two component beams and which generates an optical path difference between these component beams which is approximately the same as the optical path difference of the partial beams in the measuring path of the interferometer. Thereafter, the delay device again unites the component beams congruently.
Inventors
- 👤 Michael Kuchel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 20:34
CPC Classifications
G; G01; G01J; G01J9/00; G01J9/02; G01B; G01B9/00; G01B9/02; G01B9/02034; G01B9/02038; G01B9/02055; G01B9/02062; G01B9/02064; G01B9/02065; G01B9/02097; G01B9/02098; G01J2009/0249; G01J9/0215; G02; G02B; G02B6/00; G02B6/24; G02B6/26; G02B6/28; G02B6/2804; G02B6/2861
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
200 words
An interferometer for measuring optical phase differences which occur between two partial beams reflected from a reference surface and from the surface of the part to be measured, respectively, the interferometer comprising: light source means for providing a coherent beam directed along a beam path; optical delay means for splitting said beam into first and second component beams and for generating a first optical path difference between said first and second component beams and for then congruently recombining said component beams; optical directing means for directing said first and second component beams toward the reference surface and the measurement surface of the part to be measured whereat said partial beams occur and a second optical path difference is generated between said partial beams; said optical delay means including adjusting means for adjusting said first optical path difference to be approximately equal to said second optical path difference; said light source means having a coherence length that is less than said second optical path difference; spatially-resolving receiver means; and, optical means for transmitting said partial beams reflected from said reference surface and said measurement surface, respectively, so as to image said reference surface and said measurement surface on said receiver means.
Claim 2
Dependent Claim
200 words
An interferometer for measuring optical phase differences which occur between two partial beams reflected from a reference surface and from the surface of the part to be measured, respectively, the interferometer comprising: light source means for providing a coherent beam directed along a beam path; optical delay means for splitting said beam into first and second component beams and for generating a first optical path difference between said first and second component beams and for then congruently recombining said component beams; optical directing means for directing said first and second component beams toward the reference surface and the measurement surface of the part to be measured whereat said partial beams occur and a second optical path difference is generated between said partial beams; said optical delay means including adjusting means for adjusting said first optical path difference to be approximately equal to said second optical path difference; said light source means having a coherence length that is less than said second optical path difference; spatially-resolving receiver means; and, optical means for transmitting said partial beams reflected from said reference surface and said measurement surface, respectively, so as to image said reference surface and said measurement surface on said receiver means.
Claim 3
Dependent Claim
30 words
The interferometer of claim 1, said adjusting means including fine adjust means for reproducibly changing said first optical path difference by fractions of the wavelength of said light source means.
Claim 4
Dependent Claim
42 words
The interferometer of claim 1, said spatially-resolving receiver means including a plurality of spatially-resolving receivers for simultaneously measuring a plurality of interferograms having different phase positions; and, said interferometer further comprising: polarization-optical means for imparting respectively different polarizations to said component beams.
Claim 5
Dependent Claim
50 words
The interferometer of claim 1, said spatially-resolving receiver means including a plurality of spatially-resolving receivers for simultaneously measuring a plurality of interferograms having different phase positions; and, said optical delay means including at least two optical devices which are adjusted to have fixed phase differences with respect to each other.
Claim 6
Dependent Claim
54 words
The interferometer of claim 1, said spatially-resolving receiver means including a plurality of spatially-resolving receivers for simultaneously measuring a plurality of interferograms having different phase positions; said optical delay means including: at least two optical delay devices; and, means for adjusting said optical delay devices to fixed phase differences with respect to each other.
Claim 7
Dependent Claim
64 words
The interferometer of claim 1, said spatially-resolving receiver means including a plurality of spatially-resolving receivers for simultaneously measuring a plurality of interferograms having different phase positions; said optical delay means including: less than three optical delay devices which are adjusted to have fixed phase differences with respect to each other; and, said interferometer further comprising means for generating beam paths with additional phase differences.
Claim 8
Dependent Claim
68 words
The interferometer of claim 1, said spatially-resolving receiver means including a plurality of spatially-resolving receivers for simultaneously measuring a plurality of interferograms having different phase positions; said optical delay means including: less than three optical delay devices; and, means for adjusting said optical delay devices to fixed phase differences with respect to each other; and, said interferometer further comprising means for generating beam paths with additional phase differences.
Claim 9
Dependent Claim
24 words
The interferometer of claim 1, comprising polarization-optical means for obtaining a spatial or angular separation of the partial beams occurring in said measuring part.
Claim 10
Dependent Claim
13 words
The interferometer of claim 1, said light source means being a spectrum lamp.
Claim 11
Dependent Claim
16 words
The interferometer of claim 9, said spectrum lamp having a coherence length of approximately 2 mm.
Claim 12
Dependent Claim
12 words
The interferometer of claim 1, said light source means being a laser.
Claim 13
Dependent Claim
16 words
The interferometer of claim 1, said spectrum lamp having a coherence length of approximately 2 mm.
Claim 14
Dependent Claim
20 words
The interferometer of claim 1, said light source means comprising: a continuous light source; and, a narrow band interference filter.
Claim 15
Dependent Claim
24 words
The interferometer of claim 13, said continuous light source being a halogen lamp and said filter having a spectral half-value width of 0.5 nm.
Claim 16
Dependent Claim
17 words
The interferometer of claim 13, said continuous light source having a coherence length of approximately 2 mm.
Claim 17
Dependent Claim
11 words
The interferometer of claim 1, said light source being a star.
References Cited (Backward Citations)
US4360271A
Cited
US4596466A
Cited
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