US4872187A
Expired / Lapsed
US
⏱️ 0.0 years remaining
X-ray tomographic imaging system and method
Assignee: Hitachi Ltd
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Filing: 1988-02-16
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Granted: 1989-10-03
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Expires: 2008-02-16
Abstract
Abstract In an X-ray tomographic imaging system and method, an object to be inspected is irradiated with X-rays from an X-ray source to obtain an X-ray transmission image of the object. The X-ray transmission image is converted by an X-ray fluorescence image intensifier into a detection image. The intensity of the detection image is also intensified by the X-ray fluorescence image intensifier. A photo-electric converter converts the intensified detection image from the X-ray fluorescence image intensifier into an electrical signal. The object to be inspected is held by an object holder rotatably at a position in proximity to the X-ray source and movably in a direction of the axis of rotation of the object and a direction perpendicular to the rotation axis. The electrical signal from the photo-electric converter is processed to a cross-sectional image.
Inventors
- 👤 Kozo Nakahata
- 👤 Toshimitsu Hamada
- 👤 Yasuo Nakagawa
- 👤 Mineo Nomoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 09:28
CPC Classifications
G; G01; G01N; G01N23/00; G01N23/02; G01N23/04; G01N23/046; G01N23/06; G01N23/18; G01N23/083; G01N2223/00; G01N2223/40; G01N2223/419
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
219 words
An X-ray tomographic imaging system comprising: an X-ray source irradiating an object to be inspected with X-rays to obtain an X-ray transmission image thereof; means for converting said transmission image into a detection light image and intensifying the intensity of said detection light image; photo-electric converter converting said light image from said means for converting into an electrical signal; an object holder holding said object rotatably at position in proximity to said X-ray source and movably in a first direction along the axis of rotation of said object holder and in a second direction perpendicular to said first direction of the rotation axis; means for detecting an image signal from said detection light image; means for displaying said image signal; means for adjusting a relative position between a visual field detected by said photo-electric converter and a detected cross-sectional position of the object on the basis of said image signal displayed on the means for displaying; an analog to digital converter circuit sequentially quantizing the electrical signals from said photoelectric converter for each predetermined rotation angle Δθ of the object holder for a plurality of directions and an image memory storing the quantized electrical signals to obtain data; and a computer reconstructing an image of a cross section of the object by processing said data for a plurality directions.
Claim 2
Dependent Claim
219 words
An X-ray tomographic imaging system comprising: an X-ray source irradiating an object to be inspected with X-rays to obtain an X-ray transmission image thereof; means for converting said transmission image into a detection light image and intensifying the intensity of said detection light image; photo-electric converter converting said light image from said means for converting into an electrical signal; an object holder holding said object rotatably at position in proximity to said X-ray source and movably in a first direction along the axis of rotation of said object holder and in a second direction perpendicular to said first direction of the rotation axis; means for detecting an image signal from said detection light image; means for displaying said image signal; means for adjusting a relative position between a visual field detected by said photo-electric converter and a detected cross-sectional position of the object on the basis of said image signal displayed on the means for displaying; an analog to digital converter circuit sequentially quantizing the electrical signals from said photoelectric converter for each predetermined rotation angle Δθ of the object holder for a plurality of directions and an image memory storing the quantized electrical signals to obtain data; and a computer reconstructing an image of a cross section of the object by processing said data for a plurality directions.
Claim 3
Dependent Claim
27 words
An X-ray tomographic imaging system according to claim 1, further comprising means for correcting a geometrical distortion in said detection light images produced by said converting means.
Claim 4
Dependent Claim
75 words
An X-ray tomographic imaging system according to claim 1, further comprising a linear image sensor, wherein in sequentially detecting X-ray images of said object from a plurality of directions, said linear image sensor detects the intensities of directed incident X-rays which do not pass through said object, such that data of the detected intensities of directly incident X-rays are used to correct the distribution of intensities of irradiation X-rays when the X-ray images are detected.
Claim 5
Dependent Claim
28 words
An X-ray tomographic imaging system according to claim 1, wherein said object to be inspected includes a portion at which an LSI chip is soldered to a substrate.
Claim 6
Dependent Claim
20 words
An X-ray tomographic imaging system according to claim 1, wherein said means for converting includes an X-ray fluorescence image intensifier.
Claim 7
Dependent Claim
183 words
An X-ray tomographic imaging system comprising: an X-ray source having a minute spot size; first means for detecting an enlarged projected X-ray transmission image of an object which is to be inspected and irradiated with X-rays from said X-ray source and converting said transmission image into a detection image and intensifying the amount of light of said detection image; a linear image sensor receiving an output image of said first means to convert it into an electrical signal; second means for reconstructing the image of a cross section of said object on the basis of an output signal of said linear image sensor; a scale including a plate which is made of a material having an X-ray shielding characteristic and is provided with slit-like graduations thereon; and third means for detecting an X-ray image obtained by the irradiation of said scale with X-rays from said X-ray source and storing data of the detected X-ray image, such that upon detection of an X-ray image, the stored data are read to correct a geometrical distortion in an X-ray detection image produced by said first means.
Claim 8
Dependent Claim
183 words
An X-ray tomographic imaging system comprising: an X-ray source having a minute spot size; first means for detecting an enlarged projected X-ray transmission image of an object which is to be inspected and irradiated with X-rays from said X-ray source and converting said transmission image into a detection image and intensifying the amount of light of said detection image; a linear image sensor receiving an output image of said first means to convert it into an electrical signal; second means for reconstructing the image of a cross section of said object on the basis of an output signal of said linear image sensor; a scale including a plate which is made of a material having an X-ray shielding characteristic and is provided with slit-like graduations thereon; and third means for detecting an X-ray image obtained by the irradiation of said scale with X-rays from said X-ray source and storing data of the detected X-ray image, such that upon detection of an X-ray image, the stored data are read to correct a geometrical distortion in an X-ray detection image produced by said first means.
Claim 9
Dependent Claim
28 words
An X-ray tomographic imaging system according to claim 6, wherein said object to be inspected includes a portion at which an LSI chip is soldered to a substrate.
Claim 10
Dependent Claim
75 words
An X-ray tomographic imaging system according to claim 6, further comprising a linear image sensor, wherein in sequentially detecting X-ray images of said object from a plurality of directions, said linear image sensor detects the intensities of directly incident X-rays which do not pass through said object such that data of the detected intensities of directly incident X-rays are used to correct the distribution of intensities of irradiation X-rays when the X-ray images are detected.
Claim 11
Dependent Claim
19 words
An X-ray tomographic imaging system according to claim 6, wherein said first means includes an X-ray fluorescence image intensifier.
Claim 12
Dependent Claim
157 words
An X-ray tomographic imaging system comprising: means for irradiating an object to be inspected with x-rays; means for converting an X-ray transmission image of said object irradiated with the X-rays into a light image; a sensor for picking up said light image obtained by said means for converting; means for changing the posture of said object; means for picking up a two-dimensional X-ray image of said object to display a monitor image; means for adjusting a relative positional relationship between said object and said sensor; and means for performing a remote control of said means for adjusting to adjust a display position of said means for displaying which is displayed on said means for picking up in an interlocking manner with the movement of said sensor, such that X-ray images from a plurality directions are detected on the basis of a video signal from said sensor to obtain an image of a cross section of said object.
Claim 13
Dependent Claim
157 words
An X-ray tomographic imaging system comprising: means for irradiating an object to be inspected with x-rays; means for converting an X-ray transmission image of said object irradiated with the X-rays into a light image; a sensor for picking up said light image obtained by said means for converting; means for changing the posture of said object; means for picking up a two-dimensional X-ray image of said object to display a monitor image; means for adjusting a relative positional relationship between said object and said sensor; and means for performing a remote control of said means for adjusting to adjust a display position of said means for displaying which is displayed on said means for picking up in an interlocking manner with the movement of said sensor, such that X-ray images from a plurality directions are detected on the basis of a video signal from said sensor to obtain an image of a cross section of said object.
Claim 14
Dependent Claim
28 words
An X-ray tomographic imaging system according to claim 10, wherein said object to be inspected includes a portion at which an LSI chip is soldered to a substrate.
Claim 15
Dependent Claim
20 words
An X-ray tomographic imaging system according to claim 1, wherein said means for converting includes an X-ray fluorescence image intensifier.
Claim 16
Dependent Claim
190 words
An X-ray tomographic imaging method comprising the steps of: holding an object with a plurality of soldering portions at which an LSI chip is soldered to a multi-layer substrate which has through-holes filled with a metal material and circuit wirings made of a metal material on an object holder; irradiating an X-ray from an X-ray source directly to said soldering portions from a peripheral direction of a side face of the chip to obtain an X-ray transmission image thereof; converting said transmission image into a detection light image and intensifying the intensity of said detection light image; converting said light image into an electrical signal by a photo-electric converter of the soldering portions; displaying a visual transmission image of the solder portions adjusting a relative position between said visual image selected by said photo-electric converter and a detected cross-sectional position of the soldering portions; rotating the object through a plurality rotation angle positions displaced by Δθ; obtaining electrical signals from each of the rotation angle positions; processing said electrical signals obtained at said rotation angle positions; and displaying a cross-sectional image of the soldering portions using said processed electrical signals.
Claim 17
Dependent Claim
190 words
An X-ray tomographic imaging method comprising the steps of: holding an object with a plurality of soldering portions at which an LSI chip is soldered to a multi-layer substrate which has through-holes filled with a metal material and circuit wirings made of a metal material on an object holder; irradiating an X-ray from an X-ray source directly to said soldering portions from a peripheral direction of a side face of the chip to obtain an X-ray transmission image thereof; converting said transmission image into a detection light image and intensifying the intensity of said detection light image; converting said light image into an electrical signal by a photo-electric converter of the soldering portions; displaying a visual transmission image of the solder portions adjusting a relative position between said visual image selected by said photo-electric converter and a detected cross-sectional position of the soldering portions; rotating the object through a plurality rotation angle positions displaced by Δθ; obtaining electrical signals from each of the rotation angle positions; processing said electrical signals obtained at said rotation angle positions; and displaying a cross-sectional image of the soldering portions using said processed electrical signals.
Claim 18
Dependent Claim
39 words
An X-ray tomographic imaging method according to claim 13, wherein said X-ray source that has a minute spot size is used and an X-ray fluorescene image intensifier is used to convert said transmission image into a detection light image.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-02 | 1993-04-03 | 1993-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-02 | 1997-04-03 | 1997-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-02 | 2001-04-03 | 2001-10-03 | $7700.00 | Window Closed / Lapsed |