US4871692A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Passivation of group III-V surfaces
Assignee: University of Florida
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Filing: 1988-09-30
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Granted: 1989-10-03
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Expires: 2008-09-30
Abstract
Abstract A method of passivating a Group III-V compound surface by exposing the surface to a compound A-B, wherein A is an element having a heat of oxide formation greater than the heats of oxide formation of Group III and V elements and B is an element: S, Se, Te or Po.
Inventors
- 👤 Hong H. Lee
- 👤 Sang H. Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 23:09
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/01; H10P; H10P14/00; H10P14/60; Y; Y10; Y10S; Y10S438/00; Y10S438/958; Y10S438/974
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
77 words
A method of passivating a surface of a Group III-V compound substrate comprising exposing said surface to a compound selected from the group consisting of P 2 S 5 , P 2 Se 5 , P 2 Te 5 and P 2 PO 5 for a time sufficient for deposition and chemisorption thereon of an amount of said compound sufficient to prevent formation of segregated surface atoms and oxides, thereby minimizing the density of surface states thereof.
Claim 2
Independent Claim
77 words
A method of passivating a surface of a Group III-V compound substrate comprising exposing said surface to a compound selected from the group consisting of P 2 S 5 , P 2 Se 5 , P 2 Te 5 and P 2 PO 5 for a time sufficient for deposition and chemisorption thereon of an amount of said compound sufficient to prevent formation of segregated surface atoms and oxides, thereby minimizing the density of surface states thereof.
Claim 3
Dependent Claim
23 words
The method of claim 1 wherein said surfaces exposed to said compound by contacting said surface with an alkaline solution containing said compound.
Claim 4
Dependent Claim
20 words
The method of claim 2 wherein said alkaline solution is an ammonium hydroxide solution of P 2 S 5 .
References Cited (Backward Citations)
JPS5868936A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-02 | 1993-04-03 | 1993-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-02 | 1997-04-03 | 1997-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-02 | 2001-04-03 | 2001-10-03 | $7700.00 | Window Closed / Lapsed |