US4867799A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ammonium vapor phase stripping of wafers
Assignee: PURUSAR Corp A CA Co
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Filing: 1987-09-10
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Granted: 1989-09-19
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Expires: 2007-09-10
Abstract
Abstract A method is set forth of treating a surface of an object to remove impurities. The object is positioned within a treating chamber with the surface exposed. Ammonia vapor is contacted with water vapor and/or hydrogen peroxide vapor adjacent to the surface to provide a hot mixture comprising at least ammonia and ammonium hydroxide. The hot mixture is impinged on the surface. The contacting is immediately prior to and/or simultaneous with the impinging. Resist is quickly stripped from the surfaces of semiconductors by this method. And, the stripping is very complete. Group I and Group II metals are also removed.
Inventors
- 👤 Thomas J. Grebinski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:10
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/18; H10P70/12; H10P70/15; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
84 words
A method of treating a surface of an object to remove impurities, comprising: positioning the object, with the surface exposed, within a sealed treating chamber; contacting ammonia vapor with hydrogen peroxide vapor and/or water vapor adjacent said surface to provide a hot mixture comprising at least ammonia, water and ammonium hydroxide; and impinging said hot mixture on said surface at a sufficient velocity to provide a scrubbing action to dislodge any particulate materials, said contacting being immediately prior to and/or simultaneous with said impinging.
Claim 2
Independent Claim
84 words
A method of treating a surface of an object to remove impurities, comprising: positioning the object, with the surface exposed, within a sealed treating chamber; contacting ammonia vapor with hydrogen peroxide vapor and/or water vapor adjacent said surface to provide a hot mixture comprising at least ammonia, water and ammonium hydroxide; and impinging said hot mixture on said surface at a sufficient velocity to provide a scrubbing action to dislodge any particulate materials, said contacting being immediately prior to and/or simultaneous with said impinging.
Claim 3
Dependent Claim
16 words
A method as set forth in claim 1, wherein said contacting is of ammonia with water.
Claim 4
Dependent Claim
17 words
A method as set forth in claim 1, wherein said contacting is of ammonia with hydrogen peroxide.
Claim 5
Dependent Claim
18 words
A method as set forth in claim 1, wherein said contacting is of water, ammonia and hydrogen peroxide.
Claim 6
Dependent Claim
23 words
A method as set forth in claim 4, wherein said water and hydrogen peroxide are premixed prior to being contacted with said ammonia.
Claim 7
Dependent Claim
19 words
A method as set forth in claim 1, wherein said impinging is at a temperature above about 65° C.
Claim 8
Dependent Claim
19 words
A method as set forth in claim 1, wherein said impinging is at a temperature above about 100° C.
Claim 9
Dependent Claim
19 words
A method as set forth in claim 5, wherein said impinging is at a temperature above about 100° C.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-09-18 | 1993-03-20 | 1993-09-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-09-18 | 1997-03-20 | 1997-09-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-09-18 | 2001-03-20 | 2001-09-19 | $7700.00 | Window Closed / Lapsed |