US4866782A
Expired / Lapsed
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Pattern recognition method
Assignee: Tokyo Electron Ltd
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Filing: 1988-09-29
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Granted: 1989-09-12
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Expires: 2008-09-29
Abstract
Abstract According to this invention, light is radiated on a pattern to be measured while being scanned, and light reflected by the pattern is received so as to form a light intensity profile curve based on the reflection light corresponding to the pattern width of the pattern to be measured. Then, coefficients of optimal values are calculated by the method of least squares using three sets or more of pattern width values and light intensity values obtained from the light intensity profile curve. A pattern width value (X1) of the pattern to be measured is calculated using equation (II) below having these optimal values as coefficients. A very small line width of a resist film can be easily and accurately measured as a bottom value using an optical apparatus without being influenced by light interference at an edge portion of the pattern to be measured. y1=d/{1+a1·exp(-b1X1)} (II) y1=a1.sub.1 X.sup.n-2 +a1.sub.2 X.sup.n-3 . . . c1 (IV)
Inventors
- 👤 Kazuo Sugie
- 👤 Yoshimasa Sainen
- 👤 Yuji Kimura
- 👤 Tadashi Nishiyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 21:07
CPC Classifications
G; G06; G06V; G06V10/00; G06V10/40; G06V10/42; G01; G01B; G01B11/00; G01B11/02; G01B11/024
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
234 words
A pattern recognition method comprising: the step of radiating scanning light to cross a pattern to be measured; the step of receiving reflection light of the scanning light and converting the received light into an electrical light intensity signal; the step of generating a light intensity profile curve of a light intensity of the reflection light as a function of a position on the pattern to be measured on a coordinate system wherein the position on the scanned pattern to be measured is plotted along the abscissa, and the light intensity represented by the light intensity signal is plotted along the ordinate; the step of obtaining, from the light intensity profile curve, at least three sets of pattern width values (X) and corresponding light intensity values (Y) between leading and trailing portions of the light intensity profile curve; the step of obtaining optimal values (a1, b1) of coefficients a and b in equation (I) below by the method of least squares using the at least three sets of pattern width values (X) and light intensity values (Y); and the step of calculating, from equation (II) below having the optimal values (al, bl) as coefficients, a pattern width value (X1) of a portion corresponding to a region of the pattern to be measured which is scanned by the scanning light, y=d/{1+a·exp(-bX) (I) y1=d/{1+a1·exp(-b1X1)} (II) where d in equations (I) and (II) is a preset constant.
Claim 2
Dependent Claim
234 words
A pattern recognition method comprising: the step of radiating scanning light to cross a pattern to be measured; the step of receiving reflection light of the scanning light and converting the received light into an electrical light intensity signal; the step of generating a light intensity profile curve of a light intensity of the reflection light as a function of a position on the pattern to be measured on a coordinate system wherein the position on the scanned pattern to be measured is plotted along the abscissa, and the light intensity represented by the light intensity signal is plotted along the ordinate; the step of obtaining, from the light intensity profile curve, at least three sets of pattern width values (X) and corresponding light intensity values (Y) between leading and trailing portions of the light intensity profile curve; the step of obtaining optimal values (a1, b1) of coefficients a and b in equation (I) below by the method of least squares using the at least three sets of pattern width values (X) and light intensity values (Y); and the step of calculating, from equation (II) below having the optimal values (al, bl) as coefficients, a pattern width value (X1) of a portion corresponding to a region of the pattern to be measured which is scanned by the scanning light, y=d/{1+a·exp(-bX) (I) y1=d/{1+a1·exp(-b1X1)} (II) where d in equations (I) and (II) is a preset constant.
Claim 3
Dependent Claim
26 words
A method according to claim 1, wherein a substrate is a semiconductor substrate, and the pattern to be measured is a micropattern on said semiconductor substrate.
Claim 4
Dependent Claim
28 words
A method according to claim 1, wherein means for receiving the scanning light and converting the received light into an electrical light intensity signal comprises a two-dimensional camera.
Claim 5
Dependent Claim
15 words
A method according to claim 3, wherein said two-dimensional camera comprises a solid-state imaging element.
Claim 6
Dependent Claim
20 words
A method according to claim 1, wherein means for generating the light intensity profile curve comprises an image analysis apparatus.
Claim 7
Dependent Claim
131 words
A method according to claim 1, wherein the number of data of the pattern width values (Y) and the corresponding light intensity values is given by n (n≧3), optimal values (a1 1 , a2, . . . , an n , and c1) of coefficients a1, a2, . . . , an, and c in equation (III) below are calculated by the method of least squares using the pattern width values (X) and light intensity values (Y), and the pattern width value (X1) of the pattern to be measured is calculated from equation (IV) below having the optimal values (a1 1 , a2 2 , . . . , an n , and c1) as coefficients, y=a1Xn-2+a2Xn-3 . . . c (III) y1=a1.sub.1 X1.sup.n-2 +a1.sub.2 X1.sup.n-3 . . . c1 (IV)
Claim 8
Dependent Claim
27 words
A method according to claim 6, wherein a substrate is a semiconductor substrate, and the pattern to be measured is a micropattern formed on said semiconductor substrate.
Claim 9
Dependent Claim
28 words
A method according to claim 6, wherein means for receiving the scanning light and converting the received light into an electrical light intensity signal comprises a two-dimensional camera.
Claim 10
Dependent Claim
15 words
A method according to claim 8, wherein said two-dimensional camera comprises a solid-state imaging element.
Claim 11
Dependent Claim
20 words
A method according to claim 6, wherein means for generating the light intensity profile curve comprises an image analysis apparatus.
References Cited (Backward Citations)
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