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US4866291A Expired / Lapsed US ⏱️ 0.0 years remaining

Photosensor with charge storage unit and switch unit formed on a single-crystal semiconductor film

Assignee: Canon Inc
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Filing: 1988-06-24
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Granted: 1989-09-12
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Expires: 2008-06-24
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Abstract

Abstract An image photosensor includes a photosensor unit a charge storage unit, and a switch unit, all of which are formed on a single-crystal semiconductor film grown from a single nucleus such that crystal formation is performed on a substrate having a free surface including a non-nucleus formation surface and a nucleus formation surface adjacent thereto. The non-nucleus formation surface has a low nucleation density. The nucleus formation surface has a sufficiently small area to allow growth of only the single nucleus and has a higher nucleation density than that of the non-nucleus formation surface.

Inventors

  • 👤 Tetsuya Shimada
  • 👤 Satoshi Itabashi
  • 👤 Katsunori Hatanaka

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 20:29
CPC Classifications
H; H04; H04N; H04N1/00; H04N1/40; H04N1/401; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/191; H10F39/197; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/27; H10P14/271; H10P14/29; H10P14/2901; H10P14/2921; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P14/3424; H10P14/3428; H10P14/3431; Y; Y10; Y10S; Y10S148/00; Y10S148/014; Y10S148/097; Y10S148/152

Claims Analysis

Total Claims: 22
Claim 1
Independent Claim 95 words
An image photosensor including a photosensor unit, a charge storage unit, and a switch unit, all of which are formed on a single-crystal semiconductor film grown from a single nucleus such that crystal formation is performed on a substrate having a free surface including a non-nucleus formation surface and a nucleus formation surface adjacent thereto, the non-nucleus formation surface having a low nucleation density, and the nucleus formation surface having a sufficiently small area to allow growth of only the single nucleus and having a higher nucleation density than that of the non-nucleus formation surface.
Claim 2
Dependent Claim 95 words
An image photosensor including a photosensor unit, a charge storage unit, and a switch unit, all of which are formed on a single-crystal semiconductor film grown from a single nucleus such that crystal formation is performed on a substrate having a free surface including a non-nucleus formation surface and a nucleus formation surface adjacent thereto, the non-nucleus formation surface having a low nucleation density, and the nucleus formation surface having a sufficiently small area to allow growth of only the single nucleus and having a higher nucleation density than that of the non-nucleus formation surface.
Claim 3
Dependent Claim 21 words
A photosensor according to claim 1, wherein light is incident on the photosensor unit from a lower surface of the substrate.
Claim 4
Dependent Claim 21 words
A photosensor according to claim 1, wherein light is incident on the photosensor unit from an upper surface of the substrate.
Claim 5
Dependent Claim 28 words
A photosensor according to claim 1, wherein light reflected by an object to be scanned is incident on the photosensor unit from a lower surface of the substrate.
Claim 6
Dependent Claim 15 words
A photosensor according to claim 1, wherein the single-crystal semiconductor film essentially consists of silicon.
Claim 7
Dependent Claim 15 words
A photosensor according to claim 2, wherein the single-crystal semiconductor film essentially consists of silicon.
Claim 8
Dependent Claim 14 words
A photosensor according claim 3, wherein the single-crystal semiconductor film essentially consists of silicon.
Claim 9
Dependent Claim 14 words
A photosensor according claim 4, wherein the single-crystal semiconductor film essentially consists of silicon.
Claim 10
Dependent Claim 101 words
An image reading apparatus including a set of a sensor unit and a transfer unit for transferring an output signal from the sensor unit, the sensor unit and the transfer unit being formed on a substrate whose at least surface portion has an insulating property, the signal transfer unit being formed so as to include a single-crystal semiconductor layer formed on a nucleus formation surface, the nucleus formation surface having a sufficiently small size and essentially consisting of a material different from that of the surface portion of the substrate, and the sensor unit being formed on the signal transfer unit.
Claim 11
Dependent Claim 101 words
An image reading apparatus including a set of a sensor unit and a transfer unit for transferring an output signal from the sensor unit, the sensor unit and the transfer unit being formed on a substrate whose at least surface portion has an insulating property, the signal transfer unit being formed so as to include a single-crystal semiconductor layer formed on a nucleus formation surface, the nucleus formation surface having a sufficiently small size and essentially consisting of a material different from that of the surface portion of the substrate, and the sensor unit being formed on the signal transfer unit.
Claim 12
Dependent Claim 15 words
An apparatus according to claim 9, wherein the signal transfer unit includes a switching element.
Claim 13
Dependent Claim 23 words
An apparatus according to claim 10, wherein the switching element is one of a MOS transistor, a CMOS transistor, and a bipolar transistor.
Claim 14
Dependent Claim 20 words
An apparatus according to claim 9, wherein the sensor unit is one of a photoconductive sensor and a diode sensor.
Claim 15
Dependent Claim 95 words
An image reading apparatus including a set of a sensor unit and a transfer unit for transferring an output signal from the sensor unit, the sensor unit and the transfer unit being formed on a substrate whose at least surface portion has an insulating property, the signal transfer unit being formed so as to include a single-crystal semiconductor layer formed on a nucleus formation surface on the insulating surface portion, the nucleus formation surface having a sufficiently small size and essentially consisting of a material different from that of the surface portion of the substrate.
Claim 16
Dependent Claim 95 words
An image reading apparatus including a set of a sensor unit and a transfer unit for transferring an output signal from the sensor unit, the sensor unit and the transfer unit being formed on a substrate whose at least surface portion has an insulating property, the signal transfer unit being formed so as to include a single-crystal semiconductor layer formed on a nucleus formation surface on the insulating surface portion, the nucleus formation surface having a sufficiently small size and essentially consisting of a material different from that of the surface portion of the substrate.
Claim 17
Dependent Claim 15 words
An apparatus according to claim 13, wherein the signal transfer unit includes a switching element.
Claim 18
Dependent Claim 23 words
An apparatus according to claim 14, wherein the switching element is one of a MOS transistor, a CMOS transistor, and a bipolar transistor.
Claim 19
Dependent Claim 20 words
An apparatus according to claim 13, wherein the sensor unit is one of a photoconductive sensor and a diode sensor.
Claim 20
Dependent Claim 123 words
A photoelectric transducer apparatus including a photosensor unit, a transfer switch unit for time-serially outputting a signal from the photosensor unit, a drive unit for driving the transfer switch unit, and a correction memory for storing variation information of sensitivity in photosensor elements, all of which are formed on a single-crystal semiconductor film grown from a single nucleus such that crystal formation is performed on a substrate having a free surface including a non-nucleus formation surface and a nucleus formation surface adjacent thereto, the non-nucleus formation surface having a low nucleation density, and the nucleus formation surface having a sufficiently small area to allow growth of only the single nucleus and having a higher nucleation density than that of the non-nucleus formation surface.
Claim 21
Dependent Claim 123 words
A photoelectric transducer apparatus including a photosensor unit, a transfer switch unit for time-serially outputting a signal from the photosensor unit, a drive unit for driving the transfer switch unit, and a correction memory for storing variation information of sensitivity in photosensor elements, all of which are formed on a single-crystal semiconductor film grown from a single nucleus such that crystal formation is performed on a substrate having a free surface including a non-nucleus formation surface and a nucleus formation surface adjacent thereto, the non-nucleus formation surface having a low nucleation density, and the nucleus formation surface having a sufficiently small area to allow growth of only the single nucleus and having a higher nucleation density than that of the non-nucleus formation surface.
Claim 22
Dependent Claim 14 words
An apparatus according to claim 17, wherein the correction memory comprises a read-only memory.

References Cited (Backward Citations)

US4791493A Cited
US4763183A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-09-11 1993-03-13 1993-09-12 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-09-11 1997-03-13 1997-09-12 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-09-11 2001-03-13 2001-09-12 $7700.00 Window Closed / Lapsed

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