US4866264A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for measuring non-reciprocal loss of thin magnetic films and magnetic mirrors
Assignee: Northrop Grumman Corp
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Filing: 1988-10-31
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Granted: 1989-09-12
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Expires: 2008-10-31
Abstract
Abstract Method and apparatus for high accuracy measurement of non-reciprocal reflectivity of magnetic thin film materials and magnetic mirrors. An ellipsometer which employs a Helmholtz coil to supply magneto-optic modulation to p-polarized light and an acousto-optic modulator to provide intensity modulation is utilized in conjunction with a novel scheme of analyzer rotation and computational techniques to accurately measure non-reciprocal reflectivity. A microcomputer is used to provide controlled rotation of polarizing elements, data logging, data analysis, and output. The non-reciprocal reflectivity value is determined by the slope of the measured ratio of magneto-optically modulated and absolute intensities (δI magnetic /I total ), plotted against a function of the analyzer angle G(Ψ).
Inventors
- 👤 V. Warren Biricik
- 👤 Frank R. Nakatsukasa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 19:27
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/21; G01N21/211; G01N2021/218
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
238 words
A magnetically and acousto-optically modulated transverse Kerr effect ellipsometer for the measurement of the non-reciprocal reflectivity of a magnetic member comprising: a source of coherent radiation for generating a coherent light beam; an optical polarizer mounted on a computer controlled rotational member and responsive to said coherent beam; a holder for said magnetic member; means for generating an external magnetic modulating field which is switched at predetermined frequencies, said magnetic field being perpendicular to the plane of incidence of said coherent light beam and in the plane of the magnetic member. an analyzer mounted on a computer controlled rotational member, and responsive to the light beam reflected from said magnetic member; an acousto-optic modulator for modulating the light beam transmitted through said analyzer; a detector for measuring the light intensity transmitted through said modulator; phase sensitive detection means responsive to signals from said acousto-optic modulator and said magnetic field generating means; and computer means for setting said polarizer at its null angle and modulating said analyzer around the null angle, measuring at each analyzer angle location both the magneto-optic and total intensities; said computer means also calculating the ratio of the magneto-optic and total intensities (δI mag /I) as a function of G(Ψ) defined by G(Ψ)=tan Ψ/(tan Ψ-tan A.sub.null) wherein Ψ is the analyzer angle, A null is the null angle of the analyzer; and measuring the slope of the calculation, the measured slope comprising the non-reciprocal reflectivity.
Claim 2
Dependent Claim
238 words
A magnetically and acousto-optically modulated transverse Kerr effect ellipsometer for the measurement of the non-reciprocal reflectivity of a magnetic member comprising: a source of coherent radiation for generating a coherent light beam; an optical polarizer mounted on a computer controlled rotational member and responsive to said coherent beam; a holder for said magnetic member; means for generating an external magnetic modulating field which is switched at predetermined frequencies, said magnetic field being perpendicular to the plane of incidence of said coherent light beam and in the plane of the magnetic member. an analyzer mounted on a computer controlled rotational member, and responsive to the light beam reflected from said magnetic member; an acousto-optic modulator for modulating the light beam transmitted through said analyzer; a detector for measuring the light intensity transmitted through said modulator; phase sensitive detection means responsive to signals from said acousto-optic modulator and said magnetic field generating means; and computer means for setting said polarizer at its null angle and modulating said analyzer around the null angle, measuring at each analyzer angle location both the magneto-optic and total intensities; said computer means also calculating the ratio of the magneto-optic and total intensities (δI mag /I) as a function of G(Ψ) defined by G(Ψ)=tan Ψ/(tan Ψ-tan A.sub.null) wherein Ψ is the analyzer angle, A null is the null angle of the analyzer; and measuring the slope of the calculation, the measured slope comprising the non-reciprocal reflectivity.
Claim 3
Dependent Claim
23 words
The ellipsometer of claim 1 wherein the magnetic modulation means is an Helmholtz coil whose axis is perpendicular to the plane of incidence.
Claim 4
Dependent Claim
22 words
The ellipsometer of claim 1 wherein said acousto-optic modulator modulates said light beam at a frequency substantially higher than the magneto-optic modulation.
Claim 5
Independent Claim
213 words
A method for measuring a thin magnetic member comprising the steps of: generating a beam of coherent radiation and directing the radiation beam to first an optical polarizer mounted on a computer controlled rotational stage and then a quarterwave plate; providing an external magnetic modulating field perpendicular to the plane of incidence of coherent light beam and in the plane of the magnetic member for modulating said magnetic member; directing the light output from said magnetic member to an analyzer mounted to a computer controlled rotational member; providing an acousto-optic modulator for modulating the output light beam from said analyzer; measuring the light intensity of the output from said acousto-optic modulator; amplifying the measured light intensity in a manner to reduce the effects of noise on the measurement; setting the polarizer at its null angle and modulating the analyzer around the null angle; measuring at each analyzer angle location both the magneto-optic and total intensities; calculating the ratio of the magneto-optic intensity and the total intensity as a function of G(Ψ) defined by G(Ψ)=tan Ψ/ (tan Ψ-tan A.sub.null) wherein Ψ is the analyzer angle, A null is the null angle of the analyzer; and measuring the slope of the calculation, the measured slope being equal to the non-reciprocal reflectivity of the magnetic member.
Claim 6
Independent Claim
213 words
A method for measuring a thin magnetic member comprising the steps of: generating a beam of coherent radiation and directing the radiation beam to first an optical polarizer mounted on a computer controlled rotational stage and then a quarterwave plate; providing an external magnetic modulating field perpendicular to the plane of incidence of coherent light beam and in the plane of the magnetic member for modulating said magnetic member; directing the light output from said magnetic member to an analyzer mounted to a computer controlled rotational member; providing an acousto-optic modulator for modulating the output light beam from said analyzer; measuring the light intensity of the output from said acousto-optic modulator; amplifying the measured light intensity in a manner to reduce the effects of noise on the measurement; setting the polarizer at its null angle and modulating the analyzer around the null angle; measuring at each analyzer angle location both the magneto-optic and total intensities; calculating the ratio of the magneto-optic intensity and the total intensity as a function of G(Ψ) defined by G(Ψ)=tan Ψ/ (tan Ψ-tan A.sub.null) wherein Ψ is the analyzer angle, A null is the null angle of the analyzer; and measuring the slope of the calculation, the measured slope being equal to the non-reciprocal reflectivity of the magnetic member.
References Cited (Backward Citations)
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