US4865830A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Gas phase preparation of aluminum nitride
Assignee: EIDP Inc
•
Filing: 1988-01-27
•
Granted: 1989-09-12
•
Expires: 2008-01-27
Abstract
Abstract Admixing an aluminum alkyl, and optionally a boron compound, with a hydride of nitrogen in the gas phase and maintaining a gas phase temperature, optionally in the presence of a carrier gas, and producing aluminum nitride alone or in admixture with a precursor thereof or boron nitride or both.
Inventors
- 👤 Ulrich Klabunde
- 👤 Edward J. Newitt
- 👤 Frederick N. Tebbe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 00:12
CPC Classifications
B; B82; B82Y; B82Y30/00; C; C01; C01B; C01B21/00; C01B21/06; C01B21/0602; C01B21/072; C01P; C01P2004/00; C01P2004/10; C01P2004/60; C01P2004/62; C01P2004/64
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
115 words
A method for preparing particulate aluminum nitride, an aluminum nitride precursor, or mixtures of one or both of them with boron nitride or a precursor for boron nitride comprising the steps: (i) admixing an aluminum alkyl and optionally, a volatile compound of boron with nitrogen or a hydride of nitrogen, or both, in the gas phase, (ii) maintaining a gas phase temperature, and (iii) producing particles of aluminum nitride, an aluminum nitride precursor, or mixtures of one or both of them with boron nitride or a precursor for boron nitride; the aluminum alkyl having the formula R 3-x H x Al wherein R is C 1 to 6 alkyl and x is 0 or 1.
Claim 2
Independent Claim
115 words
A method for preparing particulate aluminum nitride, an aluminum nitride precursor, or mixtures of one or both of them with boron nitride or a precursor for boron nitride comprising the steps: (i) admixing an aluminum alkyl and optionally, a volatile compound of boron with nitrogen or a hydride of nitrogen, or both, in the gas phase, (ii) maintaining a gas phase temperature, and (iii) producing particles of aluminum nitride, an aluminum nitride precursor, or mixtures of one or both of them with boron nitride or a precursor for boron nitride; the aluminum alkyl having the formula R 3-x H x Al wherein R is C 1 to 6 alkyl and x is 0 or 1.
Claim 3
Dependent Claim
26 words
A method according to claim 1 wherein the alkyl is trimethyl- or triethyl-aluminum and is mixed with a hydride of nitrogen selected from ammonia and hydrazine.
Claim 4
Dependent Claim
20 words
A method according to claim 2 wherein the molar ratio of aluminum alkyl to hydride is about 0.001:1 to 1:1.
Claim 5
Dependent Claim
16 words
A method according to claim 3 wherein the gas phase temperature is at least 300° C.
Claim 6
Dependent Claim
20 words
A method according to claim 1 employing a carrier gas to entrain the gas phase admixture formed in step (i).
Claim 7
Dependent Claim
20 words
A method according to claim 2 employing a carrier gas to entrain the gas phase admixture formed in step (i).
Claim 8
Dependent Claim
20 words
A method according to claim 3 employing a carrier gas to entrain the gas phase admixture formed in step (i).
Claim 9
Dependent Claim
20 words
A method according to claim 4 employing a carrier gas to entrain the gas phase admixture formed in step (i).
Claim 10
Dependent Claim
34 words
A method according to claim 1 wherein the product of step (iii) comprises aluminum nitride and boron nitride in the ratio of 0.2 to 20 g atoms of aluminum per g atom of boron.
Claim 11
Dependent Claim
36 words
A method according to claim 1 employing a compound of boron selected from the group borazine, boranes of up to about 6 boron atoms, alkylated boranes, aminoboranes, and adducts of the boranes with ammonia or amine.
Claim 12
Dependent Claim
14 words
A method according to claim 10 wherein the boron compound is borazine or diborane.
References Cited (Backward Citations)
EP0087798A2
Cited
US4519966A
Cited
JPS616104A
Cited
JPS61183108A
Cited
US4783430A
Cited
US4746501A
Cited
US4764489A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-09-11 | 1993-03-13 | 1993-09-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-09-11 | 1997-03-13 | 1997-09-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-09-11 | 2001-03-13 | 2001-09-12 | $7700.00 | Window Closed / Lapsed |