Patent US1537230A successfully refreshed from Google Patents.
US4862490A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum windows for soft x-ray machines
Assignee: HP Inc
•
Filing: 1988-02-29
•
Granted: 1989-08-29
•
Expires: 2008-02-29
Abstract
Abstract A vacuum window including a support substrate provided with a window aperture, and a membrane attached to a front surface of the substrate. The membrane has a relatively thick perimeter portion attached to the support substrate, and has a window portion aligned with the window aperture. The window portion of the membrane includes a number of relatively thin pane sections separated by relatively thick, structural rib sections. The membrane material is preferably boron nitride, boron carbide, or silicon carbide.
Inventors
- 👤 Marcos Karnezos
- 👤 Randal S. Jones
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 04:42
CPC Classifications
H; H01; H01J; H01J5/00; H01J5/02; H01J5/18
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
77 words
A vacuum window for an x-ray device comprising: support means provided with an aperture; a membrane covering said aperture and being supported from said support means and said membrane having a window portion aligned with said aperture, where said window portion includes a plurality of pane sections which are relatively transparent to soft x-rays and a plurality of rib sections separating said pane sections; and wherein said rib and pane sections are made of the same material.
Claim 2
Dependent Claim
77 words
A vacuum window for an x-ray device comprising: support means provided with an aperture; a membrane covering said aperture and being supported from said support means and said membrane having a window portion aligned with said aperture, where said window portion includes a plurality of pane sections which are relatively transparent to soft x-rays and a plurality of rib sections separating said pane sections; and wherein said rib and pane sections are made of the same material.
Claim 3
Dependent Claim
19 words
A vacuum window as recited in claim 1 wherein said support means comprises silicon, glass, quartz, sapphire or tungsten.
Claim 4
Dependent Claim
28 words
The window of claim 1 wherein said membrane is made of a material selected from the group consisting of boron nitride, silicon carbide, boron carbide and silicon nitride.
Claim 5
Dependent Claim
16 words
The window of claim 1 wherein said rib and pane sections are made of boron nitride.
Claim 6
Dependent Claim
16 words
The window of claim 1 wherein said rib and pane sections are made of silicon carbide.
Claim 7
Dependent Claim
16 words
The window of claim 1 wherein said rib and pane sections are made of boron carbide.
Claim 8
Dependent Claim
20 words
The window of claim 1 wherein said pane sections are in tension and said rib section are in greater tension.
Claim 9
Dependent Claim
29 words
The window of claim 1 wherein said rib sections are within the range of 4 to 14 μm deep and said pane sections are 900 to 3000 Å thick.
Claim 10
Dependent Claim
118 words
In a method for making a vacuum window for an x-ray device, the steps of: forming a first membrane over a surface of a substrate; patterning said first membrane to provide a plurality of pane openings passing completely through said first membrane and terminating on said substrate and being separated by rib portions of said first membrane; forming a second membrane over said patterned first membrane to define a plurality of pane portions within said pane openings, said pane portions being sufficiently thin to pass a significant portion of soft x-rays and hold one atmosphere of pressure; and forming an aperture passing through said substrate in alignment with said rib and pane portions to define said vacuum window.
Claim 11
Dependent Claim
118 words
In a method for making a vacuum window for an x-ray device, the steps of: forming a first membrane over a surface of a substrate; patterning said first membrane to provide a plurality of pane openings passing completely through said first membrane and terminating on said substrate and being separated by rib portions of said first membrane; forming a second membrane over said patterned first membrane to define a plurality of pane portions within said pane openings, said pane portions being sufficiently thin to pass a significant portion of soft x-rays and hold one atmosphere of pressure; and forming an aperture passing through said substrate in alignment with said rib and pane portions to define said vacuum window.
Claim 12
Dependent Claim
24 words
The method of claim 9 wherein the step of forming said first membrane includes depositing a membrane substance over said surface of said substrate.
Claim 13
Dependent Claim
25 words
The method of claim 9 wherein the step of patterning said first membrane includes the step of etching said membrane to form said pane openings.
Claim 14
Dependent Claim
34 words
The method of claim 9 wherein the steps of forming said first and second membranes includes the step of forming said first membrane with a tension stress greater than that of said second membrane.
Claim 15
Dependent Claim
33 words
The method of claim 9 including the step of selecting said first and second membranes from a material selected from the group consisting of boron nitride, silicon carbide, boron carbide and silicon nitride.
Claim 16
Dependent Claim
91 words
The method of claim 9 wherein said substrate is a wafer and wherein the step of patterning said first membrane includes the step of patterning said first membrane to define a plurality of vacuum window patterns each having a plurality of pane openings separated by rib portions; and including the step of dicing the wafer to form individual vacuum window die after the step of forming the second membrane and before forming the aperture passing through said die substrate, such that the pane portions are not damaged by the dicing step.
Claim 17
Dependent Claim
15 words
The method of claim 9 wherein said first and second membranes are of boron nitride.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-08-28 | 1993-02-27 | 1993-08-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-08-28 | 1997-02-27 | 1997-08-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-08-28 | 2001-02-27 | 2001-08-29 | $7700.00 | Window Closed / Lapsed |