US4853148A
Expired / Lapsed
US
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Process and composition for drying of gaseous hydrogen halides
Assignee: Entegris Inc
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Filing: 1987-03-24
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Granted: 1989-08-01
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Expires: 2007-03-24
Abstract
Abstract A process for drying a gaseous hydrogen halide of the formula HX, wherein X is selected from the group consisting of bromine, chlorine, fluorine, and iodine, to remove water impurity therefrom, comprising: contacting the water impurity-containing gaseous hydrogen halide with a scavenger including a support having associated therewith one or more members of the group consisting of: (a) an active scavenging moiety selected from one or more members of the group consisting of: (i) metal halide compounds dispersed in the support, of the formula MX y ; and (ii) metal halide pendant functional groups of the formula -MX y-1 covalently bonded to the support, wherein M is a y-valent metal, and y is an integer whose value is from 1 to 3; (b) corresponding partially or fully alkylated compounds and/or pendant functional groups, of the metal halide compounds and/or pendant functional groups of (a); wherein the alkylated compounds and/or pendant functional groups, when present, are reactive with the gaseous hydrogen halide to form the corresponding halide compounds and/or pendant functional groups of (a); and M being selected such that the heat of formation, ΔH f of its hydrated halide, MX y .(H 2 O) n , is governed by the relationship: ΔH f ≧n×10.1 kilocalories/mole of such hydrated halide compound wherein n is the number of water molecules bound to the metal halide in the metal halide hydrate. Also disclosed is an appertaining scavenger composition and a contacting apparatus wherein the scavenger is deployed in a bed for contacting with the water impurity-containing gaseous hydrogen halide.
Inventors
- 👤 Glenn M. Tom
- 👤 Duncan W. Brown
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 19:41
CPC Classifications
C; C01; C01B; C01B7/00; C01B7/19; C01B7/191; C01B7/195; C01B7/197; B; B01; B01D; B01D53/00; B01D53/26; B01D53/28; C01B7/01; C01B7/07; C01B7/0706; C01B7/0718; C01B7/09; C01B7/093; C01B7/13; C01B7/135; C01G; C01G1/00; C01G1/06; Y; Y10; Y10S; Y10S34/00; Y10S34/01
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
306 words
A scavenger, having utility for drying a gaseous hydrogen halide of the formula HX, wherein X is selected from the group consisting of bromine, chlorine, fluorine, and iodine, to remove water impurity therefrom and produce an essentially completely water-free gaseous hydrogen halide effluent characterized by residual water concentration of below 0.1 part per million by volume (ppm), said scavenger comprising: (a) a support; and (b) associated with said support an active scavenging moiety selected from one or more members of the group consisting of: (i) metal halide compounds dispersed in the support, of the formula MX y ; (ii) metal halide pendant functional groups, of the formula -MX y-1 , covalently bonded to the support, wherein: M is a y-valent metal selected from the group consisting of lithium (I), beryllium (II), magnesium (II), calcium (II), strontium (II), barium (II), cadmium (II), nickel (I), iron (II), iron (III), zinc (II), and aluminum (III); y is an integer whose value is from 1 to 3; and the active scavenging moiety metal halide compounds and/or metal halide pendant functional groups have been formed by reaction of corresponding partially or fully akylated compounds and/or pendant functional groups, with the gaseous hydrogen halide, to form the ative scavenging moiety metal halide compounds and/or metal halide pendant functional groups; the vapor pressure of the support is less than 1 ppm; M is selected such that the heat of formation of its hydrated halide, MX y . (H 2 O) n , is greater than or equal to 10.1 kilocalories per mole of such hydrated halide compound for each hydrated water molecule, wherein n is the number of water molecules bound to the metal halide in the metal halide hydrate; with the proviso that the support is formed of a material which is both chemically and physically different from said active scavenging moiety.
Claim 2
Dependent Claim
306 words
A scavenger, having utility for drying a gaseous hydrogen halide of the formula HX, wherein X is selected from the group consisting of bromine, chlorine, fluorine, and iodine, to remove water impurity therefrom and produce an essentially completely water-free gaseous hydrogen halide effluent characterized by residual water concentration of below 0.1 part per million by volume (ppm), said scavenger comprising: (a) a support; and (b) associated with said support an active scavenging moiety selected from one or more members of the group consisting of: (i) metal halide compounds dispersed in the support, of the formula MX y ; (ii) metal halide pendant functional groups, of the formula -MX y-1 , covalently bonded to the support, wherein: M is a y-valent metal selected from the group consisting of lithium (I), beryllium (II), magnesium (II), calcium (II), strontium (II), barium (II), cadmium (II), nickel (I), iron (II), iron (III), zinc (II), and aluminum (III); y is an integer whose value is from 1 to 3; and the active scavenging moiety metal halide compounds and/or metal halide pendant functional groups have been formed by reaction of corresponding partially or fully akylated compounds and/or pendant functional groups, with the gaseous hydrogen halide, to form the ative scavenging moiety metal halide compounds and/or metal halide pendant functional groups; the vapor pressure of the support is less than 1 ppm; M is selected such that the heat of formation of its hydrated halide, MX y . (H 2 O) n , is greater than or equal to 10.1 kilocalories per mole of such hydrated halide compound for each hydrated water molecule, wherein n is the number of water molecules bound to the metal halide in the metal halide hydrate; with the proviso that the support is formed of a material which is both chemically and physically different from said active scavenging moiety.
Claim 3
Dependent Claim
42 words
A scavenger according to claim 1, wherein the reaction product of the active scavenging moiety and said water impurity is selected from the group consisting of metal halide hydrate compounds and pendant functional groups, and metal oxide compounds and pendant functional groups.
Claim 4
Dependent Claim
33 words
A scavenger according to claim 1, wherein the vapor pressure of non-hydrogen halide reaction products of the active scavenging moiety and said water impurity is less than 1 part per million by volume.
Claim 5
Dependent Claim
19 words
A scavenger according to claim 1, wherein M is selected from the group consisting of lithium, magnesium, and aluminum.
Claim 6
Dependent Claim
15 words
A scavenger according to claim 1, wherein said support is formed of an inorganic material.
Claim 7
Dependent Claim
48 words
A scavenger according to claim 1, wherein said support is formed of a material which is stable in said process, and selected from the group consisting of aluminosilicates, alumina, silica, and metal halides whose halide constituent is the same as the halide of the hydrogen halide being dried.
Claim 8
Dependent Claim
43 words
A scavenger according to claim 1, wherein said support is a metal halide whose halide constituent is the same as the halide in the hydrogen halide being dried, and whose metal constituent is selected from the group consisting of calcium, magnesium, and aluminum.
Claim 9
Dependent Claim
27 words
A scavenger according to claim 1, having a water removal capacity of from about 0.5 to about 20 liters gaseous water per liter of a bed thereof.
Claim 10
Dependent Claim
77 words
An apparatus for drying a gaseous hydrogen halide of the formula HX, wherein X is selected from the group consisting of bromine, chlorine, fluorine, and iodine, to remove water impurity therefrom, comprising: (a) a vessel containing a bed of a scavenger according to claim 1; (b) means for introducing the water impurity-containing gaseous hydrogen halide to said vessel for passage through said bed therein; and (c) means for discharging water impurity-depleted gaseous hydrogen halide from said vessel.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-31 | 1993-01-30 | 1993-08-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-31 | 1997-01-30 | 1997-08-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-31 | 2001-01-30 | 2001-08-01 | $7700.00 | Window Closed / Lapsed |