US4849916A — Improved spatial resolution measurement system an…

Claim 1

Independent Claim 152 words

A system for measuring a parameter associated with an object, comprising: a probe, having a characteristic physical dimension, for providing successive first signals representative of the parameter wherein the parameter has a comparatively-large spatial resolution that is determined by the characteristic physical dimension of the probe; means for moving the probe and the object relative to each other controllably in predetermined intervals at least some of which define a preselected spatial dimension selected to be a minority portion of the characteristic physical dimension of the probe; and means coupled to the probe and responsive to the successive first signals as produced at corresponding ones of said predetermined intervals for providing a second signal representative of the parameter associated with the object with a comparatively-small spatial resolution that is determined by the preselected spatial dimension defined by said intervals selected to be a minority portion of the characteristic physical dimension of the probe.

Claim 2

Independent Claim 152 words

A system for measuring a parameter associated with an object, comprising: a probe, having a characteristic physical dimension, for providing successive first signals representative of the parameter wherein the parameter has a comparatively-large spatial resolution that is determined by the characteristic physical dimension of the probe; means for moving the probe and the object relative to each other controllably in predetermined intervals at least some of which define a preselected spatial dimension selected to be a minority portion of the characteristic physical dimension of the probe; and means coupled to the probe and responsive to the successive first signals as produced at corresponding ones of said predetermined intervals for providing a second signal representative of the parameter associated with the object with a comparatively-small spatial resolution that is determined by the preselected spatial dimension defined by said intervals selected to be a minority portion of the characteristic physical dimension of the probe.

Claim 3

Dependent Claim 17 words

The invention of claim 1, wherein said probe includes a capacitive probe having a substantially-rectangular sensing element.

Claim 4

Dependent Claim 15 words

The invention of claim 2, further including a substantially-rectangular guard surrounding said substantially-rectangular sensing element.

Claim 5

Dependent Claim 28 words

The invention of claim 1, wherein said moving means includes means for receiving the object, and means coupled to the receiving means for translating and rotating the object.

Claim 6

Dependent Claim 12 words

The invention of claim 4, wherein said object is a semiconductor wafer.

Claim 7

Dependent Claim 20 words

The invention of claim 5, wherein said moving and receiving means includes an X, Theta, Z, and vacuum actuator assembly.

Claim 8

Dependent Claim 18 words

The invention of claim 1, wherein said moving means is operative to move said object in discrete movements.

Claim 9

Dependent Claim 27 words

The invention of claim 1, wherein said second signal providing means includes a processor operative to digitally filter said successive first signals to provide said second signal.

Claim 10

Dependent Claim 45 words

The invention of claim 8, wherein said moving means is operative to continuously move said object and includes means to produce said successive first signals at time intervals that correspond to increments that individually are a fraction of the characteristic physical dimension of the probe.

Claim 11

Dependent Claim 61 words

The invention of claim 8, wherein said processor is operative to digitally filter said successive first signals by computing the difference between said first signal taken at successive ones of said predetermined intervals to provide corresponding difference signals therebetween; and by recursively computing the difference between said difference signals at intervals that correspond to the characteristic physical dimension of the probe.

Claim 12

Dependent Claim 25 words

The invention of claim 1, wherein said preselected dimension is selected to be an integral submultiple fraction of said characteristic physical dimension of the probe.

Claim 13

Independent Claim 175 words

A method for measuring a preselected characteristic associated with an object with a probe having a characteristic physical dimension with a spatial resolution that is determined by its characteristic physical dimension in such a way as to improve the spatial resolution of the probe, comprising the steps of: moving the probe and the object relative to each other in such a way as to define increments of motion that individually define a preselected dimension that is selected to be a minority portion of the characteristic physical dimension of the probe; obtaining data having a spatial resolution determined by the characteristic physical dimension of the probe representative of the preselected characteristic associated with the object at preselected points of the object selected to correspond to the increments of relative motion between the probe and the object; and controllably combining said data to provide second data representative of the preselected characteristic associated with the object with a spatial resolution that depends only on the dimension of the increment of relative motion between the probe and the object.

Claim 14

Independent Claim 175 words

A method for measuring a preselected characteristic associated with an object with a probe having a characteristic physical dimension with a spatial resolution that is determined by its characteristic physical dimension in such a way as to improve the spatial resolution of the probe, comprising the steps of: moving the probe and the object relative to each other in such a way as to define increments of motion that individually define a preselected dimension that is selected to be a minority portion of the characteristic physical dimension of the probe; obtaining data having a spatial resolution determined by the characteristic physical dimension of the probe representative of the preselected characteristic associated with the object at preselected points of the object selected to correspond to the increments of relative motion between the probe and the object; and controllably combining said data to provide second data representative of the preselected characteristic associated with the object with a spatial resolution that depends only on the dimension of the increment of relative motion between the probe and the object.

Claim 15

Dependent Claim 43 words

The invention of claim 12, wherein said moving step includes the steps of moving the object and probe continuously, and wherein said obtaining step includes the step of obtaining the output of the probe at times that correspond to the increments of motion.

Claim 16

Dependent Claim 22 words

The invention of claim 12, wherein said moving step includes the step of moving the object and probe discretely in said increments.

Claim 17

Dependent Claim 45 words

The invention of claim 12, wherein each of the points on the object have a spacial location, and further including the step of storing said data in memory at address locations thereof that respectively correspond to the spatial location of the points on the object.

Claim 18

Dependent Claim 30 words

The invention of claim 15, wherein said combining step includes the steps of reading said data from memory, and the step digitally filtering said data to provided said second data.

Claim 19

Dependent Claim 170 words

A wafer profiling station for profiling the thickness of a semiconductor wafer, comprising: a sensing head having a probe defining a characteristic physical dimension; means disposed relative to the wafer for moving preselected points of the wafer selected to lie on a spatial locus of the wafer that defines between predetermined ones thereof a spatial interval that is a fraction of the characteristic physical dimension of the probe within the sensing head; means coupled to said sensing head and responsive to said moving means for storing successive first data respectively representative of the thickness of the wafer at each of said preselected points having a spatial resolution that is determined by the characteristic physical dimension of said probe; and means coupled to said storing means and responsive to said predetermined ones of said preselected points of said wafer for providing successive second data representative of the thickness of said preselected points with a spatial resolution that is determined by said minority portion of said characteristic physical dimension of said probe.

Claim 20

Dependent Claim 170 words

A wafer profiling station for profiling the thickness of a semiconductor wafer, comprising: a sensing head having a probe defining a characteristic physical dimension; means disposed relative to the wafer for moving preselected points of the wafer selected to lie on a spatial locus of the wafer that defines between predetermined ones thereof a spatial interval that is a fraction of the characteristic physical dimension of the probe within the sensing head; means coupled to said sensing head and responsive to said moving means for storing successive first data respectively representative of the thickness of the wafer at each of said preselected points having a spatial resolution that is determined by the characteristic physical dimension of said probe; and means coupled to said storing means and responsive to said predetermined ones of said preselected points of said wafer for providing successive second data representative of the thickness of said preselected points with a spatial resolution that is determined by said minority portion of said characteristic physical dimension of said probe.

Claim 21

Dependent Claim 33 words

The invention of claim 17, wherein said spatial locus includes plural concentric rings located adjacent the edge of said wafer and spaced apart by a radial distance that corresponds to said minority portion.

Claim 22

Dependent Claim 21 words

The invention of claim 17, wherein said minority portion is selected to be an integral submultiple of said characteristic physical dimension.

Claim 23

Dependent Claim 16 words

The invention of claim 19, wherein said characteristic physical dimension is the width of said probe.

Claim 24

Dependent Claim 87 words

An object measurement system, comprising: first means including a probe having a characteristic physical dimension for providing first data representative of a preselected characteristic associated with an object to be measured with a spatial resolution that is determined by its characteristic physical dimension; and second means coupled to said probe and responsive to said first data for providing second data representative of the preselected characteristic of said object with a spatial resolution that is determined as a minority portion of the characteristic physical dimension of the probe.

Claim 25

Dependent Claim 87 words

An object measurement system, comprising: first means including a probe having a characteristic physical dimension for providing first data representative of a preselected characteristic associated with an object to be measured with a spatial resolution that is determined by its characteristic physical dimension; and second means coupled to said probe and responsive to said first data for providing second data representative of the preselected characteristic of said object with a spatial resolution that is determined as a minority portion of the characteristic physical dimension of the probe.

Claim 26

Dependent Claim 44 words

The invention of claim 21, wherein said first means includes means for imparting a relative motion between said prove and said object in such a way that said first data is measured in increments that are a minority portion of said characteristic physical dimension.

Claim 27

Dependent Claim 18 words

The invention of claim 22, wherein said minority portion is an integral sub-multiple of said characteristic physical dimension.

Claim 28

Dependent Claim 20 words

The invention of claim 21, wherein said second means includes a processor operative to digitally filter said successive first data.

Claim 29

Dependent Claim 12 words

The invention of claim 21, wherein said probe has a generally-rectangular geometry.

Claim 30

Dependent Claim 14 words

The invention of claim 25, further including a generally-rectangular guard surrounding said generally-rectangular probe.

Claim 31

Dependent Claim 83 words

A measurement system, comprising: a sensor operative to sense a parameter associated with the whole of an area of a surface of an object; means for providing relative motion between the sensor and object in steps which change the area along said surface by a minority portion thereof between steps; and means for processing a series of sensed parameters corresponding to a sequence of the steps to provide a plurality of output parameters each corresponding to a minority portion of the area sensed.

Claim 32

Dependent Claim 83 words

A measurement system, comprising: a sensor operative to sense a parameter associated with the whole of an area of a surface of an object; means for providing relative motion between the sensor and object in steps which change the area along said surface by a minority portion thereof between steps; and means for processing a series of sensed parameters corresponding to a sequence of the steps to provide a plurality of output parameters each corresponding to a minority portion of the area sensed.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1992-07-17	1993-01-16	1993-07-18	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1996-07-17	1997-01-16	1997-07-18	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2000-07-17	2001-01-16	2001-07-18	$7700.00	Window Closed / Lapsed

Improved spatial resolution measurement system and method

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