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US4847844A Expired / Lapsed US ⏱️ 0.0 years remaining

Surface-emitting semiconductor laser device

Assignee: Mitsubishi Electric Corp
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Filing: 1988-01-26
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Granted: 1989-07-11
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Expires: 2008-01-26
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Abstract

Abstract A surface-emitting semiconductor laser device comprises a first electrode, a first-conductivity-type clad layer provided on the first electrode, an active layer provided on the first-conductivity-type clad layer, a guide layer provided on the active layer and having an even-numbered-order diffraction grating opposite to the active layer, a second-conductivity-type clad layer provided on the guide layer, contact layers provided on portions of the second-conductivity-type clad layer, and second electrodes provided on the contact layers.

Inventors

  • 👤 Susumu Noda
  • 👤 Keisuke Kojima
  • 👤 Kazuo Kyuma

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 09:39
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/10; H01S5/18; H01S5/185; H01S5/187

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 121 words
A surface-emitting semiconductor laser device, comprising: a first electrode (1); a substrate (2) provided on said first electrode (1); a first-conductivity-type clad layer (4) provided over said first electrode; an active layer (5) provided on said first-conductivity-type clad layer; a guide layer (7) provided over said active layer and having an even-numbered order diffraction grating opposite to said active layer; a second-conductivity-type clad layer (9) provided over said diffraction grating in said guide layer and having a laser beam take-out position (19) provided therein; contact layers (10) provided on respective portions of said second-conductivity-type clad layer; and second electrodes (18) provided on respective ones of said contact layers, wherein end faces of said layers and said diffraction grating constitute a resonator.
Claim 2
Dependent Claim 121 words
A surface-emitting semiconductor laser device, comprising: a first electrode (1); a substrate (2) provided on said first electrode (1); a first-conductivity-type clad layer (4) provided over said first electrode; an active layer (5) provided on said first-conductivity-type clad layer; a guide layer (7) provided over said active layer and having an even-numbered order diffraction grating opposite to said active layer; a second-conductivity-type clad layer (9) provided over said diffraction grating in said guide layer and having a laser beam take-out position (19) provided therein; contact layers (10) provided on respective portions of said second-conductivity-type clad layer; and second electrodes (18) provided on respective ones of said contact layers, wherein end faces of said layers and said diffraction grating constitute a resonator.
Claim 3
Dependent Claim 19 words
A surface-emitting semiconductor laser device according to claim 1, wherein said active layer is of a quantum well structure.
Claim 4
Dependent Claim 25 words
A surface-emitting semiconductor laser device according to claim 1, further comprising a highly reflective coating provided over said end faces of each of said layers.
Claim 5
Dependent Claim 22 words
A surface-emitting semiconductor laser device according to claim 1, wherein the horizontal transverse confinement of light is performed by a self-aligned structure.
Claim 6
Dependent Claim 23 words
A surface-emitting semiconductor laser device according to claim 1, wherein the horizontal transverse confinement of light is performed by a ridge waveguide structure.
Claim 7
Dependent Claim 23 words
A surface-emitting semiconductor laser device according to claim 2, wherein the horizontal transverse confinement of light is performed by a ridge waveguide structure.
Claim 8
Dependent Claim 36 words
A surface-emitting semiconductor laser device according to claim 5, wherein a period of said diffraction grating is such that a Bragg wavelength determined by said period is larger than a wavelength at the peak of gain.
Claim 9
Dependent Claim 36 words
A surface-emitting semiconductor laser device according to claim 5, wherein a period of said diffraction grating is such that a Bragg wavelength determined by said period is smaller than a wavelength at the peak of gain.
Claim 10
Dependent Claim 115 words
A surface-emitting semiconductor laser device, comprising: a first electrode (51); a substrate (52) provide on said first electrode (51); a first-conductivity-type clad layer (53) provided on said substrate; an active layer (54) provided on said first-conductivity-type clad layer and having a quantum well structure; a second-conductivity-type clad layer (55) opposite to said active layer; an even-numbered order diffraction grating (58) provided on a first portion of said second-conductivity-type clad layer opposite to said active layer; and a second electrode (57) provided on a second portion of said second-conductivity-type clad layer opposite to said active layer, wherein said first portion and said second portion comprise a Bragg reflection region (60) and an active region (59), respectively.
Claim 11
Dependent Claim 115 words
A surface-emitting semiconductor laser device, comprising: a first electrode (51); a substrate (52) provide on said first electrode (51); a first-conductivity-type clad layer (53) provided on said substrate; an active layer (54) provided on said first-conductivity-type clad layer and having a quantum well structure; a second-conductivity-type clad layer (55) opposite to said active layer; an even-numbered order diffraction grating (58) provided on a first portion of said second-conductivity-type clad layer opposite to said active layer; and a second electrode (57) provided on a second portion of said second-conductivity-type clad layer opposite to said active layer, wherein said first portion and said second portion comprise a Bragg reflection region (60) and an active region (59), respectively.
Claim 12
Dependent Claim 34 words
A surface-emitting semiconductor laser device according to claim 9, wherein a period of said diffraction grating is such that a wavelength of laser oscillation is larger than a wavelength at the peak of gain.
Claim 13
Dependent Claim 22 words
A surface-emitting semiconductor laser device according to claim 9, wherein the transverse confinement of light is performed by a ridge waveguide structure.
Claim 14
Dependent Claim 22 words
A surface-emitting semiconductor laser device according to claim 10, wherein the transverse confinement of light is performed by a ridge waveguide structure.
Claim 15
Dependent Claim 116 words
A surface-emitting semiconductor laser device comprising: a first electrode (1); a substrate (2) provided on said first electrode; a first-conductivity-type clad layer (4) provided over said substrate; an active layer (5) provided on said first-conductivity-type clad layer, said active layer having a quantum well structure; a guide layer (7) provided over said active layer and having an even-numbered order diffraction grating opposite said active layer; a second-conductivity-type clad layer (9) provided on said diffraction grating in said guide layer; a contact layer (10) provided on a portion of said second conductivity clad layer; and a second electrode (18) provided on said contact layer, wherein end faces of said layers and said diffraction grating constitute a resonator.
Claim 16
Dependent Claim 116 words
A surface-emitting semiconductor laser device comprising: a first electrode (1); a substrate (2) provided on said first electrode; a first-conductivity-type clad layer (4) provided over said substrate; an active layer (5) provided on said first-conductivity-type clad layer, said active layer having a quantum well structure; a guide layer (7) provided over said active layer and having an even-numbered order diffraction grating opposite said active layer; a second-conductivity-type clad layer (9) provided on said diffraction grating in said guide layer; a contact layer (10) provided on a portion of said second conductivity clad layer; and a second electrode (18) provided on said contact layer, wherein end faces of said layers and said diffraction grating constitute a resonator.
Claim 17
Dependent Claim 36 words
A surface-emitting semiconductor laser device according to claim 13, wherein a period of said diffraction grating is such that a Bragg wavelength determined by said period is larger than a wavelength at the peak of gain.
Claim 18
Dependent Claim 36 words
A surface-emitting semiconductor laser device according to claim 13, wherein a period of said diffraction grating is such that a Bragg wavelength determined by said period is smaller than a wavelength at the peak of gain.
Claim 19
Dependent Claim 22 words
A surface-emitting semiconductor laser device according to claim 13, wherein the transverse confinement of light is performed by a ridge waveguide structure.

References Cited (Backward Citations)

JPS61168980A Cited
JPS61189685A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-07-10 1993-01-09 1993-07-11 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-07-10 1997-01-09 1997-07-11 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-07-10 2001-01-09 2001-07-11 $7700.00 Window Closed / Lapsed

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