US4841156A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Measurement of the thickness of thin films
Assignee: ELECTRONIC INSTRUMENTATION AND TECHNOLOGY Inc A CORP OF
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Filing: 1987-05-15
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Granted: 1989-06-20
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Expires: 2007-05-15
Abstract
Abstract An ultraviolet source (14) directs selected ultraviolet radiation onto a thin film (10) to excite it. The thin film fluoresces, either naturally or as a result of adding fluorescing material. The amount of light fluoresced is proportional to the film thickness. An optical filter (16) selectively transmits fluoresced wavelengths, excluding exciting wavelengths. A photodetector (18) converts the light to an electrical signal which is processed by signal processing circuits (20) and displayed on a readout (26). The output is compensated for variations in the intensity of the exciting ultraviolet radiation by generating a second electrical signal (13', 18') proportional to the intensity of the exciting radiation and dividing the first electrical signal by a function of said second electrical signal. The compensated output is then calibrated to assure precision and accurate measurements. Various materials may be selectively measured, individually in the presence of others by choosing appropriate excitation and emission wavelengths. The amount of fluoresced light is linear with respect to the amount of material present as long as the layer is quite thin. As the layer thickness increases, the amount of light to thickness relationship becomes non-linear.
Inventors
- 👤 Joe T. May
- 👤 Edward A. Casacia
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 20:29
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/62; G01N21/63; G01N21/64; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0658; G01N21/84; G01N21/8422; G01J; G01J1/00; G01J1/10; G01J1/16; G01J1/1626; G01J2001/1636
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
153 words
A method of selectively measuring the thickness of a film or a film on a substrate comprising the steps of: exciting the film with ultraviolet radiation of first wavelengths selected based on the florescence characteristics of the material of the film to cause the film to fluoresce by emitting light of a longer ultraviolet wavelength than the exciting radiation; detecting the uItraviolet radiation of said first selected wavelengths to produce a first electrical signal proportional to an instantaneous intensity of said ultraviolet radiation of said first selected wavelengths; filtering and detecting the emitted light from the film to produce a second electrical signal proportional to second selected wavelengths of the emitted light; dividing said second electrical signal by said first electrical signal to produce an instantaneous quotient output calibrated to the intensity of the exciting radiation and which is a direct measurement of the thickness of the film; and displaying the calibrated output.
Claim 2
Independent Claim
153 words
A method of selectively measuring the thickness of a film or a film on a substrate comprising the steps of: exciting the film with ultraviolet radiation of first wavelengths selected based on the florescence characteristics of the material of the film to cause the film to fluoresce by emitting light of a longer ultraviolet wavelength than the exciting radiation; detecting the uItraviolet radiation of said first selected wavelengths to produce a first electrical signal proportional to an instantaneous intensity of said ultraviolet radiation of said first selected wavelengths; filtering and detecting the emitted light from the film to produce a second electrical signal proportional to second selected wavelengths of the emitted light; dividing said second electrical signal by said first electrical signal to produce an instantaneous quotient output calibrated to the intensity of the exciting radiation and which is a direct measurement of the thickness of the film; and displaying the calibrated output.
Claim 3
Dependent Claim
33 words
The method of claim 1 further comprising the step of filtering the ultraviolet radiation of the exciting radiation so that the film is excited only by said first selected wavelengths of ultraviolet radiation.
Claim 4
Dependent Claim
23 words
The method of claim 1 wherein the calibrated output is further produced by the step of multiplying said quotient by a predetermined constant
Claim 5
Dependent Claim
33 words
The method of claim 1 further comprising the step of adding a fluorescing agent to the film and wheein the emitted light which is filtered and detected is produced by said fluorescing agent.
Claim 6
Independent Claim
172 words
A system for selectively measuring the thickness of a film or a film on a substrate comprising: a source of ultraviolet radiation positioned to direct ultraviolet radiation of first wavelengths selected based on the florescence characteristics of the material of the film onto said film, said film being excited by the ultraviolet radiation to fluoresce by emitting ultraviolet light of a longer wavelength than the exciting wavelength; first detecting means for receiving light from said source of ultraviolet radiation and producing a first electrical signal proportional to an instantaneous intensity of said ultraviolet radiation of said first selected wavelengths; filtering and second detecting means positioned adjacent said film for filtering the emitted light and producing a second electrical signal proportional to second selected wavelengths of the emitted light; dividing means connected to receive said first and second electrical signals for producing an instantaneous quotient output calibrated to the intensity of the exciting radiation and which is a direct measurement of the thickness of said film; and means for displaying said calibrated output.
Claim 7
Independent Claim
172 words
A system for selectively measuring the thickness of a film or a film on a substrate comprising: a source of ultraviolet radiation positioned to direct ultraviolet radiation of first wavelengths selected based on the florescence characteristics of the material of the film onto said film, said film being excited by the ultraviolet radiation to fluoresce by emitting ultraviolet light of a longer wavelength than the exciting wavelength; first detecting means for receiving light from said source of ultraviolet radiation and producing a first electrical signal proportional to an instantaneous intensity of said ultraviolet radiation of said first selected wavelengths; filtering and second detecting means positioned adjacent said film for filtering the emitted light and producing a second electrical signal proportional to second selected wavelengths of the emitted light; dividing means connected to receive said first and second electrical signals for producing an instantaneous quotient output calibrated to the intensity of the exciting radiation and which is a direct measurement of the thickness of said film; and means for displaying said calibrated output.
Claim 8
Dependent Claim
128 words
The system recited in claim 5 wherein said first detecting means and said filtering and second detecting means comprises: first and second optical filters, said first optical filter being positioned to receive radiation directly from said source of ultraviolet radiation and pass only said first selected wavelengths and said second optical filter being positioned to receive emitted light from said film and pass only said second selected wavelengths; and first and second photodetectors positioned to receive light passed by said first and second filters, respectively, said first photodetector producing a first electrical signal proportional to the intensity of the ultraviolet radiation of said first selected wavelengths and said second photodector producing a second electrical signal proportional to the intensity of the emitted light of said second selected wavelengths.
Claim 9
Dependent Claim
96 words
The system recited in claim 6 further comprising: first and second amplifying means connected to receive said first and second electrical signals, respectively, for producing first and second amplified outputs; said dividing means being connected to receive said first and second amplified outputs for generating a compensated output proportional to the quotient of said second amplified output divided by a function of said first amplified output; and zero adjust and span control means responsive to said compensated output for adjusting said compensated output to the absence of a film and to a known film thickness, respectively.
Claim 10
Dependent Claim
26 words
The system as recited in claim 7 wherein said means for displaying comprises a numerical display means for providing a digital disolay of said calibrated output.
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