US4837097A
Expired / Lapsed
US
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Optical Shield for liquid crystal devices and method of fabrication
Assignee: Xerox Corp
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Filing: 1987-12-17
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Granted: 1989-06-06
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Expires: 2007-12-17
Abstract
Abstract An optical shield for a liquid crystal dot shutter image bar and fabrication process therefor. In one embodiment, a layer of dye-in-photoresist is formed on the interior surface of one of the glass substrates and over the one or more electrodes thereon. The photoresist layer is exposed through a mask and developed to form an optical shield having the desired configuration of optical apertures and a thickness of 2 to 3 micrometers. Alternate embodiments use two separate dye loaded layers that do not react with each other or dissolve in similar solvents. The first layer is dye loaded PMMA layer covered by a dye-in-photoresist. The dye can be selected to filter any desired spectral region.
Inventors
- 👤 Ram S. Narang
- 👤 Alain E. Perregaux
- 👤 Eugene C. Faucz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 21:52
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1335; G02F1/133509
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
211 words
A method of fabricating an optical shield for use in a liquid crystal image bar of the type having liquid crystal material disposed between a pair of transparent glass substrates containing transparent electrodes on confronting inner surfaces thereof, the optical shield formed on one of the glass substrate's inner surface and over the transparent electrodes thereon with an opening therethrough for passage of light, and a separate transparent alignment layer formed on each inner substrate surface covering the transparent electrodes and optical shield, the method comprising the steps of: (a) dissolving a dye in a first liquid photoresist material, the quality of dye being sufficient to render the photoresist substantially opaque; (b) spreading the dye-loaded photoresist of step (a) over a surface of a transparent glass substrate having at least one transparent electrode thereon to form a first opaque liquid film having a thickness of 1 to 4 micrometers; (c) solidifying the first liquid film for a predetermined time and temperature to form a first solid opaque film; (d) forming at least one light passing opening through the first solid film, the opening having a predetermined size; and (e) washing the first solid opaque film with the at least one opening therethrough with methanol and forming a transparent alignment layer thereon.
Claim 2
Independent Claim
211 words
A method of fabricating an optical shield for use in a liquid crystal image bar of the type having liquid crystal material disposed between a pair of transparent glass substrates containing transparent electrodes on confronting inner surfaces thereof, the optical shield formed on one of the glass substrate's inner surface and over the transparent electrodes thereon with an opening therethrough for passage of light, and a separate transparent alignment layer formed on each inner substrate surface covering the transparent electrodes and optical shield, the method comprising the steps of: (a) dissolving a dye in a first liquid photoresist material, the quality of dye being sufficient to render the photoresist substantially opaque; (b) spreading the dye-loaded photoresist of step (a) over a surface of a transparent glass substrate having at least one transparent electrode thereon to form a first opaque liquid film having a thickness of 1 to 4 micrometers; (c) solidifying the first liquid film for a predetermined time and temperature to form a first solid opaque film; (d) forming at least one light passing opening through the first solid film, the opening having a predetermined size; and (e) washing the first solid opaque film with the at least one opening therethrough with methanol and forming a transparent alignment layer thereon.
Claim 3
Dependent Claim
22 words
The method of claim 1, wherein the dye is two to three percent by weight, based on the total weight of photoresist.
Claim 4
Dependent Claim
12 words
The method of claim 2, wherein the spreading is by spin coating.
Claim 5
Dependent Claim
143 words
The method of claim 3, wherein solidifying step is accomplished by baking the glass substrate, electrode, and first liquid film at 80° to 85° C. for 20 to 25 minutes; and wherein the forming of the light passing opening is accomplished by the steps of: (e) exposing the solidified film to UV radiation through a mask to delineate said light passing opening, the UV radiation energy being about 5 mW/cm 2 and the exposure time being for about five minutes; (f) developing the first film in a developer solution diluted with an equal quantity of water for about one minute; (g) repeat steps (e) and (f) to fully develop the film in the slit areas; (h) washing the substrate and first film with the opening in a stream of deionized water for about 15 minutes; and (i) annealing the substrate and first film.
Claim 6
Dependent Claim
49 words
The method of claim 4, wherein the dye is Sudan Black sold by the Mobay Chemical Corporation, wherein the photoresist is 1350J sold by the Shipley Corporation, and wherein the annealing step (i) is performed at 150° C. for about 18 hours to fully hard brake the first film.
Claim 7
Dependent Claim
20 words
The method of claim 5, wherein the film opening is a slit having a width of 50 to 100 micrometers.
Claim 8
Dependent Claim
14 words
The method of claim 5, wherein the film opening is an array of apertures.
Claim 9
Dependent Claim
20 words
The method of claim 7, wherein the apertures are circular and each has a diameter of 50 to 85 micrometers.
Claim 10
Dependent Claim
86 words
The method of claim 1, wherein the dye in step (a) is also dissolved in a second liquid material, and wherein the second liquid material is spread and solidified over the surface of the glass substrate with at least one transparent electrode prior the first dye-loaded liquid material, so that the light shield is made up of two separate dye-loaded layers, one on top of the other, and wherein the two separate layers are substances which neither react with each other nor dissolve in similar solvents.
Claim 11
Dependent Claim
67 words
The method of claim 9, wherein the second liquid material is a 15 percent by weight solution of dye-loaded poly methyl methacrylate (PMMA) in amyl acetate, wherein the dye is Sudan Black and is two to three percent by weight, based on the total weight of the PMMA, and wherein the first liquid material is a photoresist sold by the Shipley Corporation under the trade name 1350J.
Claim 12
Dependent Claim
30 words
The method of claim 10, wherein the method further comprises the step of coating the surface of the glass substrate having the transparent electrode with a layer of adhesion promoter.
Claim 13
Dependent Claim
29 words
The method of claim 11, wherein the adhesion promoter is a silane derivative, and wherein the coating is accomplished by spinning at around 3000 rpm for about 30 seconds.
Claim 14
Dependent Claim
101 words
The method of claim 12, wherein the 15 percent solution of dye-loaded PMMA is applied over the silane derivative by spin coating at 1000 rpm for about two minutes, followed by a solidification step whereby the substrate with the silane derivative and dye-loaded PMMA layers are annealed at about 120° C. for one to two hours, wherein the substrate is cooled to room temperature, and wherein the 1350J photoresist is spin coated over the second solidified layer of dye-loaded PMMA at 2500 rpm for 1 to 2 minutes and then annealed for 20 to 25 minutes at 80° to 85° C.
Claim 15
Dependent Claim
201 words
The method of claim 13, wherein the light passing opening is accomplished by the steps of: (e) exposing the first solidified film to UV radiation through a mask to delineate said light passing opening, the UV radiation energy being about 5 mW/cm 2 and the exposure time being for about five minutes; (f) developing the first film in a AZ 351 developer solution diluted with an equal quantity of water for about one minute in order to etch the delineated opening and expose the second film through said opening; (g) washing the substrate, the first film, and the exposed portion of the dye-loaded PMMA layer in a stream of deionized water for about 15 minutes; (h) annealing the substrate and first and second films; (i) plasma etching the residual part of the first film and exposed portion of the second film of dye-loaded PMMA in an environment of 80 percent oxygen and CF 4 with a 400 W intensity for about three minutes; and (j) dissolving the exposed second film of dye-loaded PMMA by dipping the substrate in chlorobenzene for about two minutes, so that a two layer optical shield is formed having a total thickness of 2.0 to 4 micrometers.
Claim 16
Dependent Claim
22 words
The method of claim 14, wherein the annealing step (h) is conducted at 120° to 150° C. for one to two hours.
Claim 17
Dependent Claim
35 words
The method of claim 15, wherein one or more different dyes may be dissolved in the first film of 1350J photoresist to produce a light shield suitable for all regions of the visible light spectrum.
Claim 18
Dependent Claim
78 words
The method of claim 1, wherein the first liquid material is a 15 percent by weight solution of dye-loaded PMMA in amyl acetate, and wherein the dye is Sudan Black sold by the Mobay Chemical Corporation and is two to three percent by weight, based on the total weight of the PMMA, and wherein the substrate with the electrode is cleaned by washing in a stream of deionized water for about 15 minutes to remove any contaminating particles.
Claim 19
Dependent Claim
105 words
The method of claim 17, wherein the spreading step (b) is accomplished by spinning the filtered dye-loaded PMMA solution on the precleaned glass substrate surface having the electrode at 1500 to 1800 rpm to achieve a thickness of 2 to 3 micrometers, wherein the solidifying step is performed at about 120° C. for about one hour, and wherein the opening is formed at step (d) by the steps of: (i) coating the dye-loaded PMMA film with a layer of photo-patternable material; (ii) photopatterning the photopatternable material; (iii) plasma etching the patterned photopatternable material and exposed dye-loaded PMMA film; and (iv) removing the residual photopatternable material.
Claim 20
Dependent Claim
70 words
The method of claim 18, wherein the photopatternable material is 210 Riston®, the photopatterning is accomplished by exposing the 210 Riston® to 5 to 7 mW/cm 2 UV through a patterned mask and then developing to produce the desired light passing opening, the plasma etching is accomplished by a 300W RF plasma for 4 to 5 minutes, and the residual 210 Riston® is removed by S-1100X Stripper sold by DuPont.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-06-05 | 1992-12-05 | 1993-06-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-06-05 | 1996-12-05 | 1997-06-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-06-05 | 2000-12-05 | 2001-06-06 | $7700.00 | Window Closed / Lapsed |