Optical interconnections for integrated circuits

Claim 2

An optical interconnection in a semiconductor integrated circuit comprising: a semiconductor substrate having a main surface; optical pulse signal generating means, external to said semiconductor substrate, for generating light of different wavelengths toward said main surface of said semiconductor substrate as optical clock signals having different phases corresponding to said different wavelengths in response to electrical clock signals having different phases; a plurality of sets of photo-electric conversion elements formed in a region of said semiconductor substrate extending to said main surface, said photo-electric conversion elements being activated in response to optical clock signals generated from signal optical clock signal generating means; other electrical circuit devices formed in said semiconductor substrate; an opague layer covering said main surface of said semiconductor substrate, said opague layer having therein respective openings disposed above each one of said photo-electric conversion elements; and transparent layers being respectively provided in said openings, said transparent layers being grouped into a plurality of sets corresponding in number to the number of said plurality of sets of photo-electric conversion elements, respectively, each of said plurality of sets of transparent layers having a wavelength-selectivity corresponding to one of the lights of the different wavelengths so that all the photo-electric conversion elements in each associated set are simultaneously activated in response to a light having the same corresponding wavelength.

Claim 3

An optical interconnection in a semiconductor integrated circuit comprising: a semiconductor substrate having a main surface; optical pulse signal generating means, external to said semiconductor substrate, for generating lights of different wavelengths toward said main surface of said semiconductor substrate as optical pulse signals having different phases corresponding to said different wavelengths in response to electrical clock signals having said different phases; a plurality of sets of photo-electric conversion elements formed in a region of said semiconductor substrate extending to said main surface, said photo-electric conversion elements being activated in response to optical clock signals generated from said optical clock signal generating means; other electric circuit devices formed in said semiconductor substrate; an opague layer disposed to cover said main surface of said semiconductor substrate, said opague layer having therein respective openings disposed above each one of said photo-electric conversion elements; and transparent layers being respectively provided in said openings, each of said transparent layers having a lens action so as to converge incident light through the corresponding opening into the working area of the associated photo-electric conversion element, said transparent layers being grouped into a plurality of sets corresponding in number to the number of said plurality of sets of photo-electric conversion elements, respectively, each of said plurality of sets of transparent layers having a wavelength-selectivity corresponding to one of the lights of the different wavelengths so that all the photo-electric conversion elements in each associated set are simultaneously activated in response to a light having the same corresponding wavelength.

Claim 4

An optical interconnection in a semiconductor integrated circuit comprising: a semiconductor substrate having a main surface; optical pulse signal generating means, external to said semiconductor substrate, for generating lights of different wavelengths toward said main surface of said semiconductor substrate as optical pulse signals having different phases corresponding to said different wavelengths in response to electrical clock signals having said different phases; a plurality of sets of photo-electric conversion elements formed in a region of said semiconductor substrate extending to said main surface, said photo-electric conversion elements being activated in response to optical clock signals generated from said optical clock signal generating means; other electric circuit devices formed in said semiconductor substrate; an opague layer disposed to cover said main surface of said semiconductor substrate, said opague layer having therein respective openings disposed above each one of said photo-electric conversion elements; and transparent layers being respectively provided in said openings, each of said transparent layers having a lens action so as to converge incident light through the corresponding opening into the working area of the associated photo-electric conversion element, said transparent layers being grouped into a plurality of sets corresponding in number to the number of said plurality of sets of photo-electric conversion elements, respectively, each of said plurality of sets of transparent layers having a wavelength-selectivity corresponding to one of the lights of the different wavelengths so that all the photo-electric conversion elements in each associated set are simultaneously activated in response to a light having the same corresponding wavelength.

Claim 5

An optical interconnection in a semiconductor integrated circuit according to claim 2, wherein each of said openings has a size greater than a working area of an associated photo-electric conversion element.

Claim 6

An optical interconnection in a semiconductor integrated circuit according to claim 3, wherein at least one of said photo-electric conversion elements comprises a photodiode.

Claim 7

An optical interconnection in a semiconductor integrated circuit according to claim 4, wherein said photodiode is a P-I-N photodiode.

Claim 8

An optical interconnection in a semiconductor integrated circuit according to claim 3, wherein each of said transparent layers is provided with a lens for effecting said lens action, said lens being fixedly disposed over said transparent layer.

Claim 9

An optical interconnection in a semiconductor integrated circuit according to claim 2, wherein at least one of said photo-electric conversion elements comprises a P-I-N photodiode,

Claim 10

An optical interconnection in a semiconductor integrated circuit according to claim 2, further comprising a transparent resin layer disposed between said main surface of said semiconductor substrate and said opague layer.

Claim 11

An optical interconnection in a semiconductor integrated circuit according to claim 1, wherein at least one of said photo-electric conversion elements comprises a photodiode.

Claim 12

An optical interconnection in a semiconductor integrated circuit according to claim 9, wherein said photodiode is a P-I-N photodiode.

Claim 13

An optical interconnection in a semiconductor integrated circuit according to claim 1, further comprising a transparent resin layer disposed between said main surface of said semiconductor substrate and said opague layer.

Claim 14

an optical interconnection in a semiconductor integrated circuit according to claim 1, wherein at least one of said other electrical circuit devices comprises an amplifying means having an input coupled to a repsective photo-electric conversion element for producing an internal electrical phase clock signal in response to the activation of said photo-electric conversion element by an optical phase clock signal.

Claim 15

An optical interconnection in a semiconductor integrated circuit according to claim 12, wherein said amplifying means is a transistor amplifier.

Claim 16

An optical interconnection in a semiconductor integrated circuit according to claim 13, wherein said transistor amplifier comprises a MOS transistor having a gate electrode coupled to said photo-electric conversion element, a drain electrode, coupled to a voltage source through a load, for producing said internal electrical phase clock signal for controlling a circuit section formed in said semiconductor substrate and a source electrode coupled to a reference ground, said amplifier further including a resistance element coupled between said gate electrode and said reference ground and wherein said respective photo-electric conversion element and said resistance element are series-connected between said voltage source and said reference ground.

Claim 17

An optical interconnection in a semiconductor integrated circuit according to claim 14, wherein said respective photo-electric conversion element comprises a photodiode.

Claim 18

An optical interconnection in a semiconductor integrated circuit according to claim 15, wherein said photodiode is a P-I-N photodiode.

Claim 19

An optical interconnection in a semiconductor integrated circuit according to claim 2, wherein at least one of said other electrical circuit devices comprises an amplifying means having an input coupled to a respective photo-electric conversion element for producing an internal electrical phase clock signal in response to the activation of said photo-electric conversion element by an optical phase clock signal.

Claim 20

An optical interconnection in a semiconductor integrated circuit according to claim 17, wherein said amplifying means is a transistor amplifier.

Claim 21

An optical interconnection in a semiconductor integrated circuit according to claim 18, wherein said transistor amplifier comprises a MOS transistor having a gate electrode coupled to said photo-eletric conversion element, a drain electrode, coupled to a voltage source through a load, for producing said internal electrical clock signal for controlling a circuit section formed in said semiconductor substrate and a source electrode coupled to a reference ground, said amplifier further including a resistance element coupled between said gate electrode and said reference ground and wherein said respective photo-electric conversion element and said resistance element are series-connected between said voltage source and said reference ground.

Claim 22

An optical interconnection in a semiconductor integrated circuit according to claim 19, wherein said respective photo-electric conversion element comprises a photodiode.

Claim 23

An optical interconnection in a semiconductor integrated circuit according to claim 20, wherein said photodiode is a P-I-N photodiode.