US4835083A
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Method for patterning electroconductive film and patterned electroconductive film
Assignee: Canon Inc
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Filing: 1987-04-15
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Granted: 1989-05-30
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Expires: 2007-04-15
Abstract
Abstract An electroconductive film is provided which has a first region constituted of a lamination layer comprising an electroconductive layer and an insulating layer, and a second layer having reduced or eliminated electroconductivity. Another type of electroconductive film is also provided having a first region constituted of a limination layer containing a compound having a polymerizable double bond and comprising an electroconductive layer and an insulating layer, and a second layer which is modified and having changed dissolution characteristics. The layer may be formed of a monomolecular film or monomolecular built-up film. A patterning method by use of the above electroconductive film is also provided.
Inventors
- 👤 Kunihiro Sakai
- 👤 Kenji Saitoh
- 👤 Toshihiko Miyazaki
- 👤 Ken Eguchi
- 👤 Haruki Kawada
- 👤 Toshiaki Kimura
- 👤 Kiyoshi Takimoto
- 👤 Hiroshi Matsuda
- 👤 Yukuo Nishimura
- 👤 Yoshinori Tomida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 15:55
CPC Classifications
H; H01; H01B; H01B1/00; H01B1/06; H01B1/12; H01B1/121; B; B82; B82Y; B82Y10/00; H10; H10K; H10K85/00
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
55 words
An organic film comprising an alternate laminate of electroconductive layers and insulating layers provided on a substrate, said film comprising at least one electroconductive region and at least one low or non-electroconductive region in each of said electroconductive layers arranged in superposition and said organic film comprising a molecular film or a molecular film built-up.
Claim 2
Dependent Claim
55 words
An organic film comprising an alternate laminate of electroconductive layers and insulating layers provided on a substrate, said film comprising at least one electroconductive region and at least one low or non-electroconductive region in each of said electroconductive layers arranged in superposition and said organic film comprising a molecular film or a molecular film built-up.
Claim 3
Dependent Claim
17 words
An organic film according to claim 1, wherein said film is formed according to the LB method.
Claim 4
Dependent Claim
21 words
An organic film according to claim 1, wherein said low- or non-electroconductive region is formed by exposure to an energy beam.
Claim 5
Dependent Claim
20 words
An organic film according to claim 3, wherein said energy beam is one of light, heat and flux of particles.
Claim 6
Dependent Claim
21 words
An organic film according to claim 4, wherein said heat is generated by irradiation of a laser beam or a UV-ray.
Claim 7
Dependent Claim
19 words
An organic film according to claim 4, wherein said flux of particles is anion beam or an electron beam.
Claim 8
Dependent Claim
28 words
An organic film according to claim 1, wherein said low or non-electroconductive region is formed in such a manner that peeling off of said layer does not occur.
Claim 9
Dependent Claim
20 words
An organic film according to claim 1, wherein said electroconductive region in said electroconductive layer is insoluble in a solvent.
Claim 10
Dependent Claim
21 words
An organic film according to claim 8, wherein said electroconductive region is formed by polymerizing a compound having a double bond.
Claim 11
Dependent Claim
18 words
An organic film according to claim 8, wherein said energy beam is an electron beam or a UV-ray.
Claim 12
Dependent Claim
47 words
A patterning method, comprising the steps of laminating an electroconductive layer and an insulating layer in the form of a molecular film or monomolecular built-up film on a substrate and forming a low- or non-electroconductive region in the electroconductive layer by exposing same to energy beam irradiation.
Claim 13
Dependent Claim
47 words
A patterning method, comprising the steps of laminating an electroconductive layer and an insulating layer in the form of a molecular film or monomolecular built-up film on a substrate and forming a low- or non-electroconductive region in the electroconductive layer by exposing same to energy beam irradiation.
Claim 14
Dependent Claim
18 words
A patterning method according to claim 11, wherein said energy beam is light, heat or flux of particles.
Claim 15
Dependent Claim
21 words
A patterning method according to claim 12, wherein said heat is generated by irradiation of a laser beam or a UV-ray.
Claim 16
Dependent Claim
20 words
A patterning method according to claim 12, wherein said flux of particles is an ion beam of an electron beam.
Claim 17
Dependent Claim
72 words
A patterning method comprising the steps of laminating an electroconductive layer and an insulating layer in the form of a monomolecular film or a molecular built-up film composed of a compound having a polymerizable double bond on a substrate and forming a region having changed solubility in a solvent by projecting an energy beam to the electroconductive layer in the direction perpendicular to the layer direction to cause polymerization of said compound.
Claim 18
Dependent Claim
72 words
A patterning method comprising the steps of laminating an electroconductive layer and an insulating layer in the form of a monomolecular film or a molecular built-up film composed of a compound having a polymerizable double bond on a substrate and forming a region having changed solubility in a solvent by projecting an energy beam to the electroconductive layer in the direction perpendicular to the layer direction to cause polymerization of said compound.
Claim 19
Dependent Claim
18 words
A patterning method according to claim 15, wherein said energy beam is an electron beam or a Uv-ray.
Claim 20
Dependent Claim
93 words
An organic film according to claim 9, wherein said compound having a double bond is a tetracyano-quinodimethane complex represented by any one of the following formulae No. 1 to No. 3: ##STR12## wherein R 1 represents a long chain alkyl or alkenyl group, R 2 represents hydrogen or a short chain alkyl or alkenyl group, at least one of R 1 and R 2 is an alkenyl group, TCNQ represents tetracyanoquinodimethane or a derivative thereof, X 1 represents hydrogen, a halogen atom, cyano group or alkoxy group, and n represents 1 or 2.
Claim 21
Dependent Claim
17 words
An organic film according to claim 8, wherein said film is formed according to the LB method.
Claim 22
Dependent Claim
19 words
An organic film according to claim 8, wherein said electroconductive region is formed by exposure to an energy beam.
References Cited (Backward Citations)
US4672265A
Cited
US4725513A
Cited
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