Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
251 words
A picture display apparatus comprising: input means arranged to be connected to a measurement device for measuring a sample having a known shape and another sample having an unknown shape to receive a first and a second spatial spectrum distribution, respectively; first transformation means responsive to said input means for performing Fourier transformation on said first spatial spectrum distribution to obtain first Fourier transformation values representative of the measured known sample; second transformation means responsive to said input means for performing Fourier transformation on said second spatial spectrum distribution to obtain second Fourier transformation values representative of the measured unknown sample; first holding means for holding a third spatial spectrum distribution corresponding to the theoretical spectrum of said known-shaped sample; third transformation means responsive to said holding means for performing Fourier transformation on said third spatial spectrum distribution to obtain third Fourier transformation values representative of the theoretical known shape; first dividing means for dividing said first Fourier transformation values by said third Fourier transformation values to thereby derive a transfer function peculiar to the blur of said measurement device; second holding means for holding said transfer function; second dividing means for dividing said second Fourier transformation values by said transfer function and producing a correlated output; fourth transformation means for performing inverse Fourier transformation on the output of said second dividing means and producing a correlated output characteristic of the unknown sample; and means for displaying said unknown-shaped sample on the basis of an output of said fourth transformation means.
Claim 2
Dependent Claim
251 words
A picture display apparatus comprising: input means arranged to be connected to a measurement device for measuring a sample having a known shape and another sample having an unknown shape to receive a first and a second spatial spectrum distribution, respectively; first transformation means responsive to said input means for performing Fourier transformation on said first spatial spectrum distribution to obtain first Fourier transformation values representative of the measured known sample; second transformation means responsive to said input means for performing Fourier transformation on said second spatial spectrum distribution to obtain second Fourier transformation values representative of the measured unknown sample; first holding means for holding a third spatial spectrum distribution corresponding to the theoretical spectrum of said known-shaped sample; third transformation means responsive to said holding means for performing Fourier transformation on said third spatial spectrum distribution to obtain third Fourier transformation values representative of the theoretical known shape; first dividing means for dividing said first Fourier transformation values by said third Fourier transformation values to thereby derive a transfer function peculiar to the blur of said measurement device; second holding means for holding said transfer function; second dividing means for dividing said second Fourier transformation values by said transfer function and producing a correlated output; fourth transformation means for performing inverse Fourier transformation on the output of said second dividing means and producing a correlated output characteristic of the unknown sample; and means for displaying said unknown-shaped sample on the basis of an output of said fourth transformation means.
Claim 3
Dependent Claim
36 words
An apparatus according to claim 1, including means providing a function of a modified Gaussian distribution that is a combination of two different Gaussian distributions to said first holding means as said third spatial spectrum distribution.
Claim 4
Dependent Claim
40 words
An apparatus according to claim 2, wherein said modified Gaussian distribution function Is(x) is defined as ##EQU8## where x and w represent a spatial position from a center of said known shape and a half-value width of said function Is(x).
Claim 5
Dependent Claim
52 words
An apparatus according to claim 3, including scanner means for spatially moving a radiant measurement beam relative to the known and unknown samples to produce a reflected radiant wave from the samples; inspector means for receiving the reflected radiant wave and producing correlated outputs as said first and second spatial spectrum distributions.
Claim 6
Dependent Claim
50 words
An apparatus according to claim 3, wherein said first holding means comprises: means for setting said half-value width; means for calculating said third spatial spectrum distribution on the basis of said modified Gaussian distribution function whose half-value width is set; and means for storing the calculated third spatial spectrum distribution.
Claim 7
Dependent Claim
52 words
An apparatus according to claim 5, including scanner means for spatially moving a radiant measurement beam relative to the known and unknown samples to produce a reflected radiant wave from the samples; inspector means for receiving the reflected radiant wave and producing correlated outputs as said first and second spatial spectrum distributions.
Claim 8
Dependent Claim
50 words
An apparatus according to claim 2, wherein said first holding means comprises: means for setting said half-value width; means for calculating said third spatial spectrum distribution on the basis of said modified Gaussian distribution function whose half-value width is set; and means for storing the calculated third spatial spectrum distribution.
Claim 9
Dependent Claim
52 words
An apparatus according to claim 7, including scanner means for spatially moving a radiant measurement beam relative to the known and unknown samples to produce a reflected radiant wave from the samples; inspector means for receiving the reflected radiant wave and producing correlated outputs as said first and second spatial spectrum distributions.
Claim 10
Dependent Claim
33 words
An apparatus according to claim 7, further comprising means disposed between said measurement device and said first and second transformation means for smoothing measured values of said first and second spatial spectrum distributions.
Claim 11
Dependent Claim
52 words
An apparatus according to claim 9, including scanner means for spatially moving a radiant measurement beam relative to the known and unknown samples to produce a reflected radiant wave from the samples; inspector means for receiving the reflected radiant wave and producing correlated outputs as said first and second spatial spectrum distributions.
Claim 12
Dependent Claim
52 words
An apparatus according to claim 2, including scanner means for spatially moving a radiant measurement beam relative to the known and unknown samples to produce a reflected radiant wave from the samples; inspector means for receiving the reflected radiant wave and producing correlated outputs as said first and second spatial spectrum distributions.
Claim 13
Dependent Claim
33 words
An apparatus according to claim 1, further comprising means disposed between said measurement device and said first and second transformation means for smoothing measured values of said first and second spatial spectrum distributions.
Claim 14
Dependent Claim
52 words
An apparatus according to claim 12, including scanner means for spatially moving a radiant measurement beam relative to the known and unknown samples to produce a reflected radiant wave from the samples; inspector means for receiving the reflected radiant wave and producing correlated outputs as said first and second spatial spectrum distributions.
Claim 15
Dependent Claim
28 words
An apparatus according to claim 12, wherein said smoothing means includes means for approximating the measured values of said first and second spatial spectrum distributions with B-spline curves.
Claim 16
Dependent Claim
52 words
An apparatus according to claim 14, including scanner means for spatially moving a radiant measurement beam relative to the known and unknown samples to produce a reflected radiant wave from the samples; inspector means for receiving the reflected radiant wave and producing correlated outputs as said first and second spatial spectrum distributions.
Claim 17
Dependent Claim
52 words
An apparatus according to claim 1, including scanner means for spatially moving a radiant measurement beam relative to the known and unknown samples to produce a reflected radiant wave from the samples; inspector means for receiving the reflected radiant wave and producing correlated outputs as said first and second spatial spectrum distributions.
Claim 18
Independent Claim
277 words
An apparatus comprising: input means arranged to be connected to a measurement device for measuring a sample having a known shape and another sample having an unknown shape to receive a first and a second spatial spectrum distribution, respectively; first transformation means responsive to said input means for performing Fourier transformation on said first spatial spectrum distribution to obtain first Fourier transformation values representative of the measured known sample; second transformation means responsive to said input means for performing Fourier transformation on said second spatial spectrum distribution to obtain second Fourier transformation values representative of the measured unknown sample; first holding means for holding a third spatial spectrum distribution corresponding to the theoretical spectrum of said known-shaped sample; third transformation means responsive to said holding means performing Fourier transformation on said third spatial spectrum distribution to obtain third Fourier transformation values representatie of the theoretical known shape; first dividing means for dividing said first Fourier transformation values by said third Fourier transformation values to thereby derive a transfer function peculiar to the blur of said measurement device; second holding means for holding said transfer function; second dividing means for dividing said second Fourier transformation values by said transfer function and producing a correlated output; fourth transformation means for performing inverse Fourier transformation on the output of said second dividing means and producing a correlated output characteristic of the unknown sample; and including scanner means for spatially moving a radiant measurement beam relative to the known and unknown samples to produce a reflected radiant wave from the samples; inspector means for receiving the reflected radiant wave and producing correlated outputs as said first and second spatial spectrum distributions.
Claim 19
Independent Claim
277 words
An apparatus comprising: input means arranged to be connected to a measurement device for measuring a sample having a known shape and another sample having an unknown shape to receive a first and a second spatial spectrum distribution, respectively; first transformation means responsive to said input means for performing Fourier transformation on said first spatial spectrum distribution to obtain first Fourier transformation values representative of the measured known sample; second transformation means responsive to said input means for performing Fourier transformation on said second spatial spectrum distribution to obtain second Fourier transformation values representative of the measured unknown sample; first holding means for holding a third spatial spectrum distribution corresponding to the theoretical spectrum of said known-shaped sample; third transformation means responsive to said holding means performing Fourier transformation on said third spatial spectrum distribution to obtain third Fourier transformation values representatie of the theoretical known shape; first dividing means for dividing said first Fourier transformation values by said third Fourier transformation values to thereby derive a transfer function peculiar to the blur of said measurement device; second holding means for holding said transfer function; second dividing means for dividing said second Fourier transformation values by said transfer function and producing a correlated output; fourth transformation means for performing inverse Fourier transformation on the output of said second dividing means and producing a correlated output characteristic of the unknown sample; and including scanner means for spatially moving a radiant measurement beam relative to the known and unknown samples to produce a reflected radiant wave from the samples; inspector means for receiving the reflected radiant wave and producing correlated outputs as said first and second spatial spectrum distributions.
Claim 20
Dependent Claim
40 words
An apparatus according to claim 17, wherein said modified Gaussian distribution function Is(x) is defined as ##EQU9## where x and w represent a spatial position from a center of said known shape and a half-value width of said function Is(x).
Claim 21
Dependent Claim
50 words
An apparatus according to claim 18, wherein said first holding means comprises: means for setting said half-value width; means for calculating said third spatial spectrum distribution on the basis of said modified Gaussian distribution function whose half-value width is set; and means for storing the calculated third spatial spectrum distribution.
Claim 22
Dependent Claim
33 words
An apparatus according to claim 19, further comprising means disposed between said measurement device and said first and second transformation means for smoothing measured values of said first and second spatial spectrum distributions.
Claim 23
Dependent Claim
28 words
An apparatus according to claim 20, wherein said smoothing means includes means for approximating the measured values of said first and second spatial spectrum distributions with B-spline curves.
Claim 24
Dependent Claim
33 words
An apparatus according to claim 18, further comprising means disposed between said measurement device and said first and second transformation means for smoothing measured values of said first and second spatial spectrum distributions.
Claim 25
Dependent Claim
28 words
An apparatus according to claim 22, wherein said smoothing means includes means for approximating the measured values of said first and second spatial spectrum distributions with B-spline curves.