US4822718A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Light absorbing coating
Assignee: Brewer Science Inc
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Filing: 1986-02-04
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Granted: 1989-04-18
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Expires: 2006-02-04
Abstract
Abstract A broad spectrum light absorbing medium to be coated over photosensitive layers, such as a photoresist for integrated circuit "chips" to act as a true surface for autofocus of the camera used to expose the photoresist. The product may also be used where a light impermeable, high contrast or black coating is needed, such as, in liquid crystal displays and light emitting diodes, photodiodes, solid state lasers, or patterning apertures on light-wave modulators. The coating absorbs light from 200 to 1000 nanometers. The coating has a polymer vehicle which can form a tightly adhering, thin, smooth and uniform coating. The coating includes a light absorbing dye. This light absorbing layer may be imageable.
Inventors
- 👤 William J. Latham
- 👤 Terry L. Brewer
- 👤 Jeffry Hunninghake
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 07:29
CPC Classifications
C; C08; C08G; C08G73/00; C08G73/06; G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1335; G02F1/133509; G02F1/133512; G03; G03F; G03F1/00; G03F1/54; G03F1/56; G03F7/00; G03F7/004; G03F7/09; G03F7/091; G03F9/00; G03F9/70; G03F9/7003; G03F9/7023; G03F9/7026; H; H10; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; H10P76/2043
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
153 words
A broad spectrum light absorbing coating material for microelectronic photolithography consisting essentially of a polyimide precursor vehicle and at least on soluble light absorbing dye in a solvent system, the dye being substantially completely soluble in the solvent and vehicle system and being effective to absorb substantially all light across a broad spectrum of light, from in the ultra violet spectrum to in the infra red spectrum, when the coating is coated on a microelectronic photolithographic substrate, the coating system having a high electrical resistivity and a high dielectric strength when coated on a substrate, and being effective to provide a uniform, tightly adhering coating, the coating being photolithographically imagable and effective to produce microelectronic images having fine line resolution and being developable and etchable by wet and dry etch microelectronic photolithography processes, the coating having a high specific absorptivity over a broad spectrum of light effective to provide a substantially black coating.
Claim 2
Dependent Claim
153 words
A broad spectrum light absorbing coating material for microelectronic photolithography consisting essentially of a polyimide precursor vehicle and at least on soluble light absorbing dye in a solvent system, the dye being substantially completely soluble in the solvent and vehicle system and being effective to absorb substantially all light across a broad spectrum of light, from in the ultra violet spectrum to in the infra red spectrum, when the coating is coated on a microelectronic photolithographic substrate, the coating system having a high electrical resistivity and a high dielectric strength when coated on a substrate, and being effective to provide a uniform, tightly adhering coating, the coating being photolithographically imagable and effective to produce microelectronic images having fine line resolution and being developable and etchable by wet and dry etch microelectronic photolithography processes, the coating having a high specific absorptivity over a broad spectrum of light effective to provide a substantially black coating.
Claim 3
Dependent Claim
20 words
The light absorbing coating material of claim 1 wherein the vehicle is selected from the group consisting of polyamic acids.
Claim 4
Dependent Claim
38 words
The light absorbing coating of claim 2 wherein the vehicle is selected from the group consisting of oxydianiline and pyromellitic dianhydride or oxydianiline, pyromellitic dianhydride and benzophenone tetracarboxylic dianhydride, the vehicle components being present in approximate stoichiometric amounts.
Claim 5
Dependent Claim
33 words
The light absorbing coating material of claim 1 wherein the coating material is effective to absorb substantially all light in the range of about 200 to 750 nanometers, when coated on a substrate.
Claim 6
Dependent Claim
68 words
The light absorbing coating material of claim 1 wherein the coating material is effective to form a high contrast coating and wherein the dye is selected from the group consisting of curcumin, Solvent Blue 45, Solvent Red 92, Solvent Blue 44, Solvent Blue 35, Solvent Red 111, Solvent Orange 11, Pylakrome Green, IR-99, anhydro-1, 1-dimethyl -2-[7[1,1-dimethyl-3-(4-sulfobutyl)-2-(1H)-benz(e) indolinylidene]-1,3,5-heptatrienyl]-(4-sulfobutyl)-1H-benz(e) indolium hydroxide sodium salt and Solvent Red 127 and mixtures thereof.
Claim 7
Dependent Claim
28 words
The light absorbing coating material of claim 1 wherein the coating has an electrical volume resistivity of at least about 3×10 15 ohm-cm, when coated on a substrate.
Claim 8
Dependent Claim
27 words
The light absorbing coating material of claim 1 wherein the coating has a dielectric strength of at least about 7×10 5 V/cm, when coated on a substrate.
Claim 9
Dependent Claim
95 words
A light absorbing coating material for improving the performance of automatic focus equipment used in microelectronic photolithography consisting essentially of at least one soluble light absorbing dye in a vehicle and solvent system, the dye being effective to absorb substantially all unreflected light, from about 200 to about 1000 nanometers across the spectrum used in automatic focus processes, when coated on a microelectronic substrate, and being effective to provide a thin, uniform coating, the coating being compatible with subsequent processing of the microelectronic substrate including being readily removable by subsequent processing of the microelectronic substrate.
Claim 10
Dependent Claim
95 words
A light absorbing coating material for improving the performance of automatic focus equipment used in microelectronic photolithography consisting essentially of at least one soluble light absorbing dye in a vehicle and solvent system, the dye being effective to absorb substantially all unreflected light, from about 200 to about 1000 nanometers across the spectrum used in automatic focus processes, when coated on a microelectronic substrate, and being effective to provide a thin, uniform coating, the coating being compatible with subsequent processing of the microelectronic substrate including being readily removable by subsequent processing of the microelectronic substrate.
Claim 11
Dependent Claim
95 words
A light absorbing coating material for mask inspection systems used in microelectronic photolithography consisting essentially of at least one soluble light absorbing dye in a vehicle and solvent system, the dye being effective to absorb substantially all light across the spectrum used in microelectronic photolithography mask inspection systems, from about 200 to about 1000 nanometers, and being photolithographically imagable and developable in the mask inspection process, the coating being effective to provide a thin, uniform, coating and being effective to produce images having fine line resolution when used in a microelectronic photolithographic mask inspection system.
Claim 12
Dependent Claim
95 words
A light absorbing coating material for mask inspection systems used in microelectronic photolithography consisting essentially of at least one soluble light absorbing dye in a vehicle and solvent system, the dye being effective to absorb substantially all light across the spectrum used in microelectronic photolithography mask inspection systems, from about 200 to about 1000 nanometers, and being photolithographically imagable and developable in the mask inspection process, the coating being effective to provide a thin, uniform, coating and being effective to produce images having fine line resolution when used in a microelectronic photolithographic mask inspection system.
Claim 13
Dependent Claim
22 words
The automatic focus equipment light absorbing material of claim 8 wherein the vehicle is selected from the group consisting of polymide precursors.
Claim 14
Dependent Claim
38 words
The light absorbing coating of claim 8 wherein the vehicle is selected from the group consisting of oxydianiline and pyromellitic dianhydride or oxydianiline, pyromellitic dianhydride and benzophenone tetracarboxylic dianhydride, the vehicle components being present in approximate stoichiometric amounts.
Claim 15
Dependent Claim
27 words
The light absorbing coating of claim 8 wherein the coating material is effective to absorb substantially all light in the range of about 650 to 1000 nanometers.
Claim 16
Dependent Claim
18 words
The automatic focus light absorbing coating of claim 8 wherein the dye is anhydro-1,1-dimethyl-2-[7[1,1-dimethyl-3-(4-sufobutyl)-2-(1H)-benz(e) indolinylidene]-1,3,5-heptatrienyl]-(4-sulfobutyl)-1H-benz(e)indolium hydroxide sodium salt.
Claim 17
Dependent Claim
38 words
The light absorbing coating of claim 8 wherein the coating has an electrical volume resistivity of at least about 3×10 15 ohm-cm and a dielectric strength of at least about 7×10 5 v/cm, when coated on a substrate.
Claim 18
Dependent Claim
21 words
The mask inspection light absorbing material of claim 9 wherein the vehicle is selected from the group consisting of polyimide precursors.
Claim 19
Dependent Claim
38 words
The light absorbing coating of claim 15 wherein the vehicle is selected from the group consisting of oxydianiline and pyromellitic dianhydride or oxydianiline, pyromellitic dianhydride and benzophenone tetracarboxylic dianhydride, the vehicle components being present in approximate stoichiometric amounts.
Claim 20
Dependent Claim
27 words
The light absorbing coating of claim 9 wherein the coating material is effective to absorb substantially all light in the range of about 500 to 600 nanometers.
Claim 21
Dependent Claim
26 words
The light absorbing coating of claim 9 wherein the dye is selected from the group consisting of solvent red 127, solvent red 92 and mixtures thereof.
Claim 22
Dependent Claim
38 words
The light absorbing coating of claim 9 wherein the coating has an electrical volume resistivity of at least about 3×10 15 ohm-cm and a dielectric strength of at least about 7×10 5 v/cm, when coated on a substrate.
Claim 23
Dependent Claim
149 words
A broad spectrum light absorbing coating material for microelectronic photolithography consisting essentially of a polyimide precursor vehicle and at least one soluble light absorbing dye in a solvent system, the dye being substantially completely soluble in the solvent and vehicle system and being effective to absorb substantially all light across a broad spectrum of light, from about 200 nanometers to about 1000 nanometers, when the coating is coated on a microelectronic photolithographic substrate, the coating system having a high electrical resistivity and a high dielectric strength when coated on a substrate, and being effective to provide a uniform, tightly adhering coating, the coating being photolithographically imagable and effective to produce microelectronic images having fine line resolution and being developable and etchable by wet and dry etch microelectronic photolithography processes, the coating having a high specific absorptivity over a broad spectrum of light effective to provide a substantially black coating.
Claim 24
Dependent Claim
149 words
A broad spectrum light absorbing coating material for microelectronic photolithography consisting essentially of a polyimide precursor vehicle and at least one soluble light absorbing dye in a solvent system, the dye being substantially completely soluble in the solvent and vehicle system and being effective to absorb substantially all light across a broad spectrum of light, from about 200 nanometers to about 1000 nanometers, when the coating is coated on a microelectronic photolithographic substrate, the coating system having a high electrical resistivity and a high dielectric strength when coated on a substrate, and being effective to provide a uniform, tightly adhering coating, the coating being photolithographically imagable and effective to produce microelectronic images having fine line resolution and being developable and etchable by wet and dry etch microelectronic photolithography processes, the coating having a high specific absorptivity over a broad spectrum of light effective to provide a substantially black coating.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-04-17 | 1992-10-17 | 1993-04-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-04-17 | 1996-10-17 | 1997-04-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-04-17 | 2000-10-17 | 2001-04-18 | $7700.00 | Window Closed / Lapsed |