US4820930A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photomask positioning device
Assignee: Canon Inc
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Filing: 1987-09-04
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Granted: 1989-04-11
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Expires: 2007-09-04
Abstract
Abstract A positioning device for positioning a mask having formed thereon a pattern to be transferred onto a semiconductor wafer. On the basis of a peripheral shape of the mask, the positioning device positions the mask so that a center of the mask is brought into alignment with a center of rotation of a holder for holding the mask. The positioning device includes a plurality of engaging pins to be engaged by the periphery of the mask, each engaging pin being movable in a direction toward the center of rotation of the mask holder. Movement of each of the engaging pins is controlled independently from the others, whereby the mask can be positioned irrespective of its size and/or shape.
Inventors
- 👤 Shinji Tsutsui
- 👤 Isamu Shimoda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 13:12
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/707; H; H10; H10P; H10P72/00; H10P72/50; H10P72/57
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
150 words
A positioning device for positioning an aritcle, comprising: means for holding the article; means for positioning the article so that a center of the article is brought into alignment with a predetermined point on said holding means, said positioning means having a first engaging member movable toward the article to move toward and engage the article and to provide a positional reference for the article on the holder, and a second engaging member for acting on the article; means for driving said first and second engaging members, said driving means having a first drive source for driving said first engaging member and a second drive source for driving said second engaging member, such that the article is brought into engagement with said first engaging member at said positional reference in response to operation of said first and second drive sources; and means for controlling said first and second drive sources.
Claim 2
Dependent Claim
150 words
A positioning device for positioning an aritcle, comprising: means for holding the article; means for positioning the article so that a center of the article is brought into alignment with a predetermined point on said holding means, said positioning means having a first engaging member movable toward the article to move toward and engage the article and to provide a positional reference for the article on the holder, and a second engaging member for acting on the article; means for driving said first and second engaging members, said driving means having a first drive source for driving said first engaging member and a second drive source for driving said second engaging member, such that the article is brought into engagement with said first engaging member at said positional reference in response to operation of said first and second drive sources; and means for controlling said first and second drive sources.
Claim 3
Dependent Claim
31 words
A device according to claim 1, wherein said positioning means positions the article with respect to said first engaging member when said first engaging member is in engagement with the article.
Claim 4
Dependent Claim
32 words
A device according to claim 2, wherein said positioning means includes a member for limiting the movement of said first engaging member, thus for determining the position of said first engaging member.
Claim 5
Dependent Claim
37 words
A device according to claim 3, wherein said second engaging member has an urging force, to be applied to the article, which is smaller than that of said first engaging member to be applied to the article.
Claim 6
Dependent Claim
35 words
A device according to claim 4, wherein said positioning means includes a member for applying to said second engaging member a biasing force acting against said second drive source during the positioning of the article.
Claim 7
Dependent Claim
48 words
A device according to claim 5, wherein said controlling means controls said first and second drive sources so that the drive of said second engaging member by said second drive source is initiated after the drive of said first engaging member by said first drive source is initiated.
Claim 8
Dependent Claim
25 words
A device according to claim 6, wherein said driving means drives said first and second engaging members toward the predetermined point on said holding means.
Claim 9
Dependent Claim
17 words
A device according to claim 1, wherein said holding means is rotatable about the predetermined point thereon.
Claim 10
Dependent Claim
29 words
A device according to claim 8, wherein said positioning means includes means for determining the position, in a rotational direction, of the article rotatively held by said holding means.
Claim 11
Dependent Claim
15 words
A device according to claim 9, wherein said position determining means photoelectrically detects the article.
Claim 12
Dependent Claim
13 words
A device according to claim 1, wherein said holding means is supported movably.
Claim 13
Dependent Claim
15 words
A device according to claim 11, wherein said holding means holds the article from above.
Claim 14
Dependent Claim
16 words
A device according to claim 12, wherein said holding means holds the article by vacuum suction.
Claim 15
Dependent Claim
23 words
A device according to claim 13, wherein said positioning means includes a member for preventing separation of the article from said holding means.
Claim 16
Dependent Claim
70 words
A positioning device for positioning an article, comprising: first positioning means movable toward the article to engage and move the article, and for providing a positional reference for the article; first driving means for actuating said first positioning means; second positioning means for urging the article so that it engages with said first positioning means, to thereby position the article; and second driving means for actuating said second positioning means.
Claim 17
Dependent Claim
70 words
A positioning device for positioning an article, comprising: first positioning means movable toward the article to engage and move the article, and for providing a positional reference for the article; first driving means for actuating said first positioning means; second positioning means for urging the article so that it engages with said first positioning means, to thereby position the article; and second driving means for actuating said second positioning means.
Claim 18
Dependent Claim
23 words
A device according to claim 15, wherein said second positioning means includes an engaging member adapted to engage with and press the article
Claim 19
Dependent Claim
18 words
A device according to claim 15, further comprising controlling means for controlling said first and second driving means.
Claim 20
Dependent Claim
51 words
A device according to claim 17, wherein said controlling means is arranged to control said first and second driving means so that said first driving means is first operated to position the article and that, after completion of the positioning by said first driving means, said second driving means is operated.
Claim 21
Dependent Claim
83 words
A positioning device for positioning an article, comprising: first positioning means movable toward the article to engage and move the article, and for providing a positional reference for the article; second positioning means for urging the article in a direction toward said first postiioning means; and controlling means for controlling said first and second positioning means such that the movement of the article by said first positioning means is completed prior to the completion of the urging operation of said second positioning means.
Claim 22
Dependent Claim
83 words
A positioning device for positioning an article, comprising: first positioning means movable toward the article to engage and move the article, and for providing a positional reference for the article; second positioning means for urging the article in a direction toward said first postiioning means; and controlling means for controlling said first and second positioning means such that the movement of the article by said first positioning means is completed prior to the completion of the urging operation of said second positioning means.
Claim 23
Dependent Claim
47 words
A device according to claim 19, wherein said controlling means is arranged to control said first and second positioning means such that the movement of the article by said first positioning means is completed prior to the initiation of the urging operation of said second positioning means.
Claim 24
Dependent Claim
101 words
A handling system for handling an article, said system comprising: a mechanical arm operable to displace the article from a first position to a second position, said mechanical arm having (i) holding means operable to hold the article, (ii) centering means operable prior to the holding of the article by said holding means to center the article with respect to a center of said holding means and (iii) driving means operable to move, in a rotational direction, said holding means by which the article is being held; and detecting means for detecting the position of the article in said rotational direction.
Claim 25
Dependent Claim
101 words
A handling system for handling an article, said system comprising: a mechanical arm operable to displace the article from a first position to a second position, said mechanical arm having (i) holding means operable to hold the article, (ii) centering means operable prior to the holding of the article by said holding means to center the article with respect to a center of said holding means and (iii) driving means operable to move, in a rotational direction, said holding means by which the article is being held; and detecting means for detecting the position of the article in said rotational direction.
Claim 26
Dependent Claim
22 words
A handling system according to claim 21, wherein said holding means is moved rotationally by said driving means about a predetermined point.
Claim 27
Dependent Claim
23 words
A handling system according to claim 22, wherein said detecting means includes a photoelectric sensor for photoelectrically detecting the position of the article.
Claim 28
Dependent Claim
18 words
A handling system according to claim 21, wherein said holding means is movably supported by said mechanical arm.
Claim 29
Dependent Claim
25 words
A handling system according to claim 24, wherein said holding means is placed above the article at the time of the centering of the article.
Claim 30
Dependent Claim
26 words
A handling system according to claim 25, wherein said centering means has a limiting member effective to limit separation of the article form said holding means.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-04-10 | 1992-10-10 | 1993-04-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-04-10 | 1996-10-10 | 1997-04-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-04-10 | 2000-10-10 | 2001-04-11 | $7700.00 | Window Closed / Lapsed |