US4812801A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Solid state gas pressure sensor
Assignee: United States Department of the Air Force
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Filing: 1987-05-14
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Granted: 1989-03-14
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Expires: 2007-05-14
Abstract
Abstract A solid state gas pressure sensor has a resistor of polysilicon deposited upon a dielectric substrate which electrically isolates and thermally prevents heat transfer to other devices thereon. A constant voltage is applied to the resistor. Depending upon the gas pressure over the sensor, a given current will be output once temperature equilibrium is established. A change in the gas pressure changes the output current of the resistor. The output current indicative of pressure is temperature corrected.
Inventors
- 👤 James Halvis
- 👤 Nathan Bluzer
- 👤 Robert Shiskowski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 06:48
CPC Classifications
G; G01; G01L; G01L21/00; G01L21/10; G01L21/12
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
92 words
A solid state gas pressure sensor, said gas pressure sensor comprising: a means for producing heat in response to current flow at a fixed voltage such that said current flow changes as a direct result of changing gas density thereabout, said means for producing heat being an integrated circuit device, a non-flexing means for holding said means for producing heat, said non-flexing means being an electrical insulator and a thermal barrier, said non-flexing means being mounted on a housing, and electrical contacts, said electrical contacts attached to said means for producing heat.
Claim 2
Dependent Claim
92 words
A solid state gas pressure sensor, said gas pressure sensor comprising: a means for producing heat in response to current flow at a fixed voltage such that said current flow changes as a direct result of changing gas density thereabout, said means for producing heat being an integrated circuit device, a non-flexing means for holding said means for producing heat, said non-flexing means being an electrical insulator and a thermal barrier, said non-flexing means being mounted on a housing, and electrical contacts, said electrical contacts attached to said means for producing heat.
Claim 3
Independent Claim
101 words
A method of measuring gas pressure, said method comprising the steps of: applying a fixed voltage to a heat producing means that has gas thereabout, allowing said heat producing means to reach thermodynamic equilibrium; measuring a current from said heat producing means when said equilibrium is reached, the current being indicative of a gas pressure of the gas thereabout; measuring the temperature of an ambient gas about said heat producing means while in equilibrium, said temperature being independent of said heat producing means; and correcting the gas pressure measured by said heat producing means for the temperature of said ambient gas.
Claim 4
Independent Claim
101 words
A method of measuring gas pressure, said method comprising the steps of: applying a fixed voltage to a heat producing means that has gas thereabout, allowing said heat producing means to reach thermodynamic equilibrium; measuring a current from said heat producing means when said equilibrium is reached, the current being indicative of a gas pressure of the gas thereabout; measuring the temperature of an ambient gas about said heat producing means while in equilibrium, said temperature being independent of said heat producing means; and correcting the gas pressure measured by said heat producing means for the temperature of said ambient gas.
References Cited (Backward Citations)
US3406572A
Cited
US3513430A
Cited
US4019388A
Cited
US4314225A
Cited
US4430899A
Cited
US4558238A
Cited
US4459856A
Cited
JPS59132327A
Cited
JPS60174844A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-03-13 | 1992-09-12 | 1993-03-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-03-13 | 1996-09-12 | 1997-03-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-03-13 | 2000-09-12 | 2001-03-14 | $7700.00 | Window Closed / Lapsed |