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US4812166A Expired / Lapsed US ⏱️ 0.0 years remaining

Process for producing ultrafine particles of metals, metal compounds and ceramics and apparatus used therefor

Assignee: Nippon Steel Corp
•
Filing: 1988-03-11
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Granted: 1989-03-14
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Expires: 2008-03-11
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Abstract

Abstract Ultrafine particles of metals, metallic compounds, and ceramics can be produced by heating a starting material supplied hermetically with a plurality of direct current plasma currents combined at a central axis of a work coil for generating high frequency induction plasma positioned under the direct current plasma generated zone. Apparatuses used therefor are also disclosed.

Inventors

  • 👤 Goro Saiki
  • 👤 Jiro Kondo
  • 👤 Koichi Takeda
  • 👤 Mutsuo Maki
  • 👤 Tutomu Ooki

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 13:51
CPC Classifications
B; B82; B82Y; B82Y30/00; C; C01; C01B; C01B32/00; C01B32/90; C01B32/914; C01B32/956; B01; B01J; B01J12/00; B01J12/002; B01J12/02; B01J19/00; B01J19/08; B01J19/087; B22; B22F; B22F9/00; B22F9/02; B22F9/12; C01B13/00; C01B13/14; C01B13/145; C01B17/00; C01B17/20; C01B21/00; C01B21/06; C01B21/072; C01B21/0722; C01B21/0724; C01B32/963; C01B32/984; C01B33/00; C01B33/02; C01B33/06; C01B35/00; C01B35/02; C01B35/04; C04; C04B; C04B35/00; C04B35/515; C04B35/56; C04B35/565; B22F2999/00; C01B21/0602; C01B21/0615; C01B21/0617; C01B21/062; C01B21/064; C01B21/068; C01B21/076; C01P; C01P2004/00; C01P2004/30; C01P2004/32; C01P2004/38; C01P2004/51; C01P2004/52; C01P2004/60; C01P2004/61; C01P2004/62; C01P2004/64; C01P2006/00; C01P2006/60

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 125 words
A process for producing ultrafine particles of a metal, a metallic compound or a ceramic having an average particle size of 0.05 to 1.0 μm which comprises combining a plurality of direct current plasma currents on a central axis of a work coil for generating high frequency induction plasma, supplying a metal, a metallic compound or a ceramic as a starting material to the combining portion of the direct current plasma currents while excluding the air, vaporizing the starting material with heating, leading the vaporized material to a temperature region having a temperature equal to or higher than the melting point and lower than the boiling point of the starting material to conduct condensation growth of liquid sphere of the starting material, followed by cooling.
Claim 2
Dependent Claim 125 words
A process for producing ultrafine particles of a metal, a metallic compound or a ceramic having an average particle size of 0.05 to 1.0 μm which comprises combining a plurality of direct current plasma currents on a central axis of a work coil for generating high frequency induction plasma, supplying a metal, a metallic compound or a ceramic as a starting material to the combining portion of the direct current plasma currents while excluding the air, vaporizing the starting material with heating, leading the vaporized material to a temperature region having a temperature equal to or higher than the melting point and lower than the boiling point of the starting material to conduct condensation growth of liquid sphere of the starting material, followed by cooling.
Claim 3
Dependent Claim 136 words
A process for producing ultrafine particles of a metal, a metallic compound or a ceramic having an average particle size of 0.05 to 1.0 μm which comprises combining a plurality of direct current plasma currents on a central axis of a work coil for high frequency induction plasma, supplying a metal, a metallic compound or a ceramic as a starting material to the combining portion of the direct current plasma currents while excluding the air, vaporizing the starting material with heating, leading the vaporized material to a temperature region having a temperature equal to or higher than the melting point and lower than the boiling point of the starting material to conduct condensation growth of liquid sphere of the starting material, and contacting the liquid sphere with a reactive gas to carry out the reaction therewith.
Claim 4
Dependent Claim 136 words
A process for producing ultrafine particles of a metal, a metallic compound or a ceramic having an average particle size of 0.05 to 1.0 μm which comprises combining a plurality of direct current plasma currents on a central axis of a work coil for high frequency induction plasma, supplying a metal, a metallic compound or a ceramic as a starting material to the combining portion of the direct current plasma currents while excluding the air, vaporizing the starting material with heating, leading the vaporized material to a temperature region having a temperature equal to or higher than the melting point and lower than the boiling point of the starting material to conduct condensation growth of liquid sphere of the starting material, and contacting the liquid sphere with a reactive gas to carry out the reaction therewith.
Claim 5
Dependent Claim 20 words
A process according to claim 2, wherein the reactive gas is a hydrocarbon or NH 3 or N 2 .
Claim 6
Dependent Claim 52 words
A hybrid plasma generating apparatus comprising a plurality of means for generating direct current plasma currents and a work coil for generating a high frequency induction plasma, said direct current plasma generating means being placed so as to combine the direct current plasma currents on the central axis of the work coil.
Claim 7
Dependent Claim 52 words
A hybrid plasma generating apparatus comprising a plurality of means for generating direct current plasma currents and a work coil for generating a high frequency induction plasma, said direct current plasma generating means being placed so as to combine the direct current plasma currents on the central axis of the work coil.
Claim 8
Independent Claim 91 words
An apparatus for producing ultrafine particles of metals, metallic compounds and ceramics comprising a direct current plasma zone and a high frequency plasma zone, said direct current plasma zone having at upper periphery portion thereof a plurality of means for generating direct current plasma currents so as to be combined on the central axis of a work coil for generating a high frequency induction plasma in said high frequency plasma zone, and a hermetic starting material supplying inlet at the center of the top portion of said direct current plasma zone.
Claim 9
Independent Claim 91 words
An apparatus for producing ultrafine particles of metals, metallic compounds and ceramics comprising a direct current plasma zone and a high frequency plasma zone, said direct current plasma zone having at upper periphery portion thereof a plurality of means for generating direct current plasma currents so as to be combined on the central axis of a work coil for generating a high frequency induction plasma in said high frequency plasma zone, and a hermetic starting material supplying inlet at the center of the top portion of said direct current plasma zone.
Claim 10
Independent Claim 117 words
An apparatus for producing ultrafine particles of metals, metallic compounds and ceramics comprising a direct current plasma zone, a high frequency plasma zone formed under the direct current plasma zone, and a reaction zone including a reactive gas inlet under the high frequency plasma zone via a narrow portion therebetween, said direct current plasma zone having at upper periphery portion thereof a plurality of means for generating direct current plasma currents so as to be combined on the central axis of a work coil for generating a high frequency induction plasma in said high frequency plasma zone, and a hermetic starting material supplying inlet at the center of the top portion of said direct current plasma zone.
Claim 11
Independent Claim 117 words
An apparatus for producing ultrafine particles of metals, metallic compounds and ceramics comprising a direct current plasma zone, a high frequency plasma zone formed under the direct current plasma zone, and a reaction zone including a reactive gas inlet under the high frequency plasma zone via a narrow portion therebetween, said direct current plasma zone having at upper periphery portion thereof a plurality of means for generating direct current plasma currents so as to be combined on the central axis of a work coil for generating a high frequency induction plasma in said high frequency plasma zone, and a hermetic starting material supplying inlet at the center of the top portion of said direct current plasma zone.

References Cited (Backward Citations)

US3714390A Cited
US4105437A Cited
US4626648A Cited
US4731517A Cited
US4727236A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-03-13 1992-09-12 1993-03-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-03-13 1996-09-12 1997-03-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-03-13 2000-09-12 2001-03-14 $7700.00 Window Closed / Lapsed

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