US4806505A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Samarium- and ytterbium-promoted oxidation of silicon and gallium arsenide surfaces
Assignee: University of Minnesota System
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Filing: 1987-10-30
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Granted: 1989-02-21
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Expires: 2007-10-30
Abstract
Abstract A method is provided for the oxidation of a silicon or gallium arsenide surface by depositing thereon a samarium or ytterbium overlayer prior to exposure of the surface to an oxidizing atmosphere.
Inventors
- 👤 Alfonso Franciosi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 05:15
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/65; H10P14/6502; H10P14/6506; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10P14/6308; H10P14/6309; H10P14/6312; Y; Y10; Y10S; Y10S148/00; Y10S148/016
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
31 words
A method for promoting oxidation of a silicon or gallium arsenide surface comprising: depositing a ytterbium overlayer on said silicon or gallium arsenide surface prior to the oxidation of said surface.
Claim 2
Independent Claim
31 words
A method for promoting oxidation of a silicon or gallium arsenide surface comprising: depositing a ytterbium overlayer on said silicon or gallium arsenide surface prior to the oxidation of said surface.
Claim 3
Dependent Claim
23 words
The method of claim 1 wherein said surface is a single crystal surface selected from the group consisting of silicon(100), silicon(110) or silicon(111).
Claim 4
Dependent Claim
26 words
The method of claim 1 wherein said surface is a single crystal surface selected from the group consisting of gallium arsenide(100), gallium arsenide(110) or gallium arsenide(111).
Claim 5
Dependent Claim
17 words
The method of claim 1 wherein the ytterbium overlayer is at least about 0.1-15 monolayers in thickness.
References Cited (Backward Citations)
US4526629A
Cited
US4684541A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-02-21 | 1992-08-22 | 1993-02-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-02-21 | 1996-08-22 | 1997-02-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-02-21 | 2000-08-22 | 2001-02-21 | $7700.00 | Window Closed / Lapsed |