US4805556A
Expired / Lapsed
US
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Reactor system and method for forming uniformly large-diameter polycrystalline rods by the pyrolysis of silane
Assignee: Advanced Silicon Materials LLC
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Filing: 1988-01-15
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Granted: 1989-02-21
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Expires: 2008-01-15
Abstract
Abstract This invention relates to the manufacture of high-purity polycrystalline silicon rods by the pyrolysis of silane. More specifically, the present invention relates to an improved method for pyrolyzing monosilane to form high-quality polycrystalline rods of uniform diameter and to an improved pyrolysis reactor system for forming high-quality polycrystalline silicon rods of uniform diameter at high production rates.
Inventors
- 👤 David W. Hagan
- 👤 William D. Burke
- 👤 Thomas R. Thoman
- 👤 McRea B. Willmert
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 22:26
CPC Classifications
C; C03; C03B; C03B37/00; C03B37/01; C03B37/012; C03B37/014; C03B37/018; C01; C01B; C01B33/00; C01B33/02; C01B33/021; C01B33/027; C01B33/035; C23; C23C; C23C16/00; C23C16/22; C23C16/24
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
161 words
A reactor system for pyrolyzing silane to form a high-purity polycrystalline silicon rod of uniform diameter substantially independent of diameter size comprising: a base member; a shell for covering said base member to form an enclosure within said reactor; an array of filament starter rods vertically disposed within said enclosure in a substantially symmetrical spaced apart relationship; means for introducing silane feed gas into said enclosure; means for heating each starter rod to a predetermined temperature to initiate the heterogeneous decomposition of silane for depositing silicon upon each rod; means for forming an elongated chamber about each filament rod with each chamber extending below each starter rod; means for recycling exhaust gas from said reactor back into said enclosure such that at least part of the recycle stream is reintroduced separately from the silane feed gas; and means for directing said recycled gas into each chamber surrounding each electrode at one end thereof and at a level below each starter rod.
Claim 2
Dependent Claim
161 words
A reactor system for pyrolyzing silane to form a high-purity polycrystalline silicon rod of uniform diameter substantially independent of diameter size comprising: a base member; a shell for covering said base member to form an enclosure within said reactor; an array of filament starter rods vertically disposed within said enclosure in a substantially symmetrical spaced apart relationship; means for introducing silane feed gas into said enclosure; means for heating each starter rod to a predetermined temperature to initiate the heterogeneous decomposition of silane for depositing silicon upon each rod; means for forming an elongated chamber about each filament rod with each chamber extending below each starter rod; means for recycling exhaust gas from said reactor back into said enclosure such that at least part of the recycle stream is reintroduced separately from the silane feed gas; and means for directing said recycled gas into each chamber surrounding each electrode at one end thereof and at a level below each starter rod.
Claim 3
Dependent Claim
52 words
A reactor system as defined in claim 1 wherein said means for reintroducing the recycle gas back into the reactor system comprises a distribution network having at least one manifold and a plurality of distributor rings corresponding to the number of filament starter rods with each distributor ring connected to said manifold.
Claim 4
Dependent Claim
24 words
A reactor system as defined in claim 2 wherein each distributor ring has a multiple number of outlet orifices in a symmetrical annuler arrangement.
Claim 5
Dependent Claim
35 words
A reactor system as defined in claim 3 wherein each distributor ring is disposed about an electrode located below each filament starter rod with said orifices aligned to direct the recycle gas at the electrode.
Claim 6
Dependent Claim
35 words
A reactor system as defined in claim 4 wherein each distributor ring has a toroid like shape with the surface containing the outlet orifices symmetrically surrounding the electrode with each orifice equidistant from said electrode.
Claim 7
Dependent Claim
56 words
A reactor system as defined in claims 3 or 5 wherein said distribution network includes two manifolds with a first manifold connected to a gas supply pipe for recycling said exhaust gas, a second manifold connected to said distributor rings and at least one gas feeder line for connecting the first manifold to said second manifold.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-02-21 | 1992-08-22 | 1993-02-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-02-21 | 1996-08-22 | 1997-02-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-02-21 | 2000-08-22 | 2001-02-21 | $7700.00 | Window Closed / Lapsed |