← Back to Patent Explorer
US4805089A Expired / Lapsed US ⏱️ 0.0 years remaining

Process control interface system for managing measurement data

Assignee: Tencor Instruments Inc
•
Filing: 1986-05-16
•
Granted: 1989-02-14
•
Expires: 2006-05-16
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract A method of controlling a process using a programmed digital computer with a set of process control programs. An operator control program allows the user to select and run a specified process and to collect measurement data while the selected process is run. A data analysis program enables interactive computer controlled data analysis, including displaying a trand chart depicting a sequence of data points, each data point representing at least a portion of the measurement data collected and stored while running a selected process. A selectably positionable pointer is displayed on the trend chart for pointing at an individual data point so that the user can select and perform a predefined task on the measurement data stored in the data structure corresponding to the data point being pointed at by said selectably positionable pointer.

Inventors

  • 👤 Leslie A. Lane
  • 👤 Lynn V. Lybeck
  • 👤 David S. Perloff
  • 👤 Chester L. Mallory

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 16:55
CPC Classifications
G; G06; G06F; G06F3/00; G06F3/01; G06F3/048; G06F3/0487; G06F3/0489; G06F3/04895; G06F3/0481; G06F3/0482

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 168 words
In a method of controlling a process using a programmed digital computer, the steps of: defining a measurement data structure format for storing one or more measurement values measured while running a predefined process; establishing an operator control program including means for running said predefined process; and data collection means for collecting measurement data during the running of said predefined process, and for storing said collected measurement data in a stored data structure in accordance with said measurement data structure format; and establishing a data analysis program for enabling interactive computer controlled performance of the steps of displaying a trend chart depicting a sequence of data points, each data point representing at least a portion of the measurement data collected and stored while running said predefined process; displaying in said trend chart a selectably positionable pointer for pointing at an individual data point; and selecting and performing a predefined task on the stored measurement data corresponding to the data point being pointed at by said selectably positionable pointer.
Claim 2
Dependent Claim 168 words
In a method of controlling a process using a programmed digital computer, the steps of: defining a measurement data structure format for storing one or more measurement values measured while running a predefined process; establishing an operator control program including means for running said predefined process; and data collection means for collecting measurement data during the running of said predefined process, and for storing said collected measurement data in a stored data structure in accordance with said measurement data structure format; and establishing a data analysis program for enabling interactive computer controlled performance of the steps of displaying a trend chart depicting a sequence of data points, each data point representing at least a portion of the measurement data collected and stored while running said predefined process; displaying in said trend chart a selectably positionable pointer for pointing at an individual data point; and selecting and performing a predefined task on the stored measurement data corresponding to the data point being pointed at by said selectably positionable pointer.
Claim 3
Dependent Claim 123 words
The method of claim 1, wherein said measurement data structure format includes means for storing information useable for identifying stored measurement data; said data collection means in said operator control program includes means for storing in said stored data structure, in accordance with said measurement data structure format, data identifying information useable for identifying said stored measurement data in said stored data structure; and said data analysis program further performs the step of displaying in said trend chart a data point identifier which corresponds to said data identifying information stored in the stored data structure corresponding to the data point being pointed at by said selectably positionable pointer; whereby said trend chart provides a visual indication of the identity of the measurement data.
Claim 4
Dependent Claim 133 words
The method of claim 1, wherein said data analysis program: enables the displaying of a trend chart in which each of the data points in the trend chart represents the means and standard deviation of the measurement data in a corresponding data structure; provides means for defining a target value and a range of acceptable mean values for the measurement data being represented by said trend chart; and superimposes on said data points in said trend chart an indication of said target value and said range of acceptable mean values; whereby said trend chart provides a visual indication of the difference between the mean values of the collected data represented by said trend chart and said target value, and also provides a visual indication of measurements outside said range of acceptable mean values.
Claim 5
Dependent Claim 247 words
In a method of controlling a process using a programmed digital computer, the steps of: (a) establishing a set of process control programs; (b) defining a measurement data structure format for each of said process control programs, including a data structure format for storing one or more measurement values measured while running said process control program; (c) establishing an engineering set up control program including means for defining a multiplicity of specified processes, each specified process using a specified one of said process control program; (d) establishing an operator control program including operator process selection means for selecting and running one of said specified processes; data collection means for collecting measurement data during the running of said selected process, and for storing said collected measurement data in a stored data structure in accordance with said measurement data structure format for a specified one of said process control programs; and (e) establishing a data analysis program for enabling interactive computer controlled performance of the steps of selecting one of said specified processes; displaying a trend chart depicting a sequence of data points, each data point representing at least a portion of the measurement data collected and stored while running said selected process; displaying in said trend chart a selectably positionable pointer for pointing at an individual data point; and selecting and performing a predefined task on the measurement data stored in the stored data structure corresponding to the data point being pointed at by said selectably positionable pointer.
Claim 6
Dependent Claim 247 words
In a method of controlling a process using a programmed digital computer, the steps of: (a) establishing a set of process control programs; (b) defining a measurement data structure format for each of said process control programs, including a data structure format for storing one or more measurement values measured while running said process control program; (c) establishing an engineering set up control program including means for defining a multiplicity of specified processes, each specified process using a specified one of said process control program; (d) establishing an operator control program including operator process selection means for selecting and running one of said specified processes; data collection means for collecting measurement data during the running of said selected process, and for storing said collected measurement data in a stored data structure in accordance with said measurement data structure format for a specified one of said process control programs; and (e) establishing a data analysis program for enabling interactive computer controlled performance of the steps of selecting one of said specified processes; displaying a trend chart depicting a sequence of data points, each data point representing at least a portion of the measurement data collected and stored while running said selected process; displaying in said trend chart a selectably positionable pointer for pointing at an individual data point; and selecting and performing a predefined task on the measurement data stored in the stored data structure corresponding to the data point being pointed at by said selectably positionable pointer.
Claim 7
Dependent Claim 123 words
The method of claim 4, wherein said measurement data structure format includes means for storing information useable for identifying stored measurement data; said data collection means in said operator control program includes means for storing in said stored data structure, in accordance with said measurement data structure format, data identifying information useable for identifying said stored measurement data in said stored data structure; and said data analysis program further performs the step of displaying in said trend chart a data point identifier which corresponds to said data identifying information stored in the stored data structure corresponding to the data point being pointed at by said selectably positionable pointer; whereby said trend chart provides a visual indication of the identity of the measurement data.
Claim 8
Dependent Claim 133 words
The method of claim 4, wherein said data analysis program: enables the displaying of a trend chart in which each of the data points in the trend chart represents the mean and standard deviation of the measurement data in a corresponding data structure; provides means for defining a target value and a range of acceptable mean values for the measurement data being represented by said trend chart; and superimposes on said data points in said trend chart an indication of said target value and said range of acceptable mean values; whereby said trend chart provides a visual indication of the difference between the mean values of the collected data represented by said trend chart and said target value, and also provides a visual indication of measurements outside said range of acceptable mean values.
Claim 9
Dependent Claim 234 words
In a process control system using a programmed digital computer, the combination comprising: (a) means providing a set of process control programs; (b) means for defining a measurement data structure format for each of said process control programs, including a data structure format for storing one or more measurement values measured while running said process control program; (c) engineering set up control program means for defining a multiplicity of specified processes, each specified process using a specified one of said process control program; (d) operator control program means including: operator process selection means for selecting and running one of said specified processes; data collection means for collecting measurement data during the running of said selected process, and for storing said collected measurement data in a stored data structure in accordance with said measurement data structure format for a specified one of said process control programs; and (e) data analysis program means for; selecting one of said specified processes; displaying a trend chart depicting a sequence of data points, each data point representing at least a portion of the measurement data collected and stored while running said selected process; displaying in said trend chart a selectably positionable pointer for pointing at an individual data point; and selecting and performing a predefined task on the measurement data stored in the stored data structure corresponding to the data point being pointed at by said selectably positionable pointer.
Claim 10
Dependent Claim 234 words
In a process control system using a programmed digital computer, the combination comprising: (a) means providing a set of process control programs; (b) means for defining a measurement data structure format for each of said process control programs, including a data structure format for storing one or more measurement values measured while running said process control program; (c) engineering set up control program means for defining a multiplicity of specified processes, each specified process using a specified one of said process control program; (d) operator control program means including: operator process selection means for selecting and running one of said specified processes; data collection means for collecting measurement data during the running of said selected process, and for storing said collected measurement data in a stored data structure in accordance with said measurement data structure format for a specified one of said process control programs; and (e) data analysis program means for; selecting one of said specified processes; displaying a trend chart depicting a sequence of data points, each data point representing at least a portion of the measurement data collected and stored while running said selected process; displaying in said trend chart a selectably positionable pointer for pointing at an individual data point; and selecting and performing a predefined task on the measurement data stored in the stored data structure corresponding to the data point being pointed at by said selectably positionable pointer.
Claim 11
Dependent Claim 124 words
The process control system of claim 7, wherein said measurement data structure format includes means for storing information useable for identifying stored measurement data; said data collection means in said operator control program includes means for storing in said stored data structure, in accordance with said measurement data structure format, data identifying information useable for identifying said stored measurement data in said stored data structure; and said data analysis program further includes means for displaying in said trend chart a data point identifier which corresponds to said data identifying information stored in the stored data structure corresponding to the data point being pointed at by said selectably positionable pointer; whereby said trend chart provides a visual indication of the identity of the measurement data.
Claim 12
Dependent Claim 132 words
The process control system of claim 7, wherein said data analysis program includes means for: displaying a trend chart in which each of the data points in the trend chart represents the mean and standard deviation of the measurement data in a corresponding data structure; defining a target value and a range of acceptable mean values for the measurement data being represented by said trend chart; and superimposing on said data points in said trend chart an indication of said target value and said range of acceptable mean values; whereby said trend chart provides a visual indication of the difference between the mean values of the collected data represented by said trend chart and said target value, and also provides a visual indication of measurements outside said range of acceptable mean values.
Claim 13
Dependent Claim 157 words
In a process control system using a programmed digital computer, the combination comprising: means for defining a measurement data structure format for storong one or more measurement values measured while running a predefined process; operator control program means including means for running said predefined process; and data collection means for collecting measurement data during the running of said predefined process, and for storing said collected measurement data in a stored data structure in accordance with said measurement data structure format; and data analysis program means for: displaying a trend chart depicting a sequence of data points, each data point representing at least a portion of the measurement data collected and stored while running said predefined process; displaying in said trend chart a selectably positionable pointer for pointing at an individual data point; and selecting and performing a predefined task on the stored measurement data corresponding to the data point being pointed at by said selectably positionable pointer.
Claim 14
Dependent Claim 157 words
In a process control system using a programmed digital computer, the combination comprising: means for defining a measurement data structure format for storong one or more measurement values measured while running a predefined process; operator control program means including means for running said predefined process; and data collection means for collecting measurement data during the running of said predefined process, and for storing said collected measurement data in a stored data structure in accordance with said measurement data structure format; and data analysis program means for: displaying a trend chart depicting a sequence of data points, each data point representing at least a portion of the measurement data collected and stored while running said predefined process; displaying in said trend chart a selectably positionable pointer for pointing at an individual data point; and selecting and performing a predefined task on the stored measurement data corresponding to the data point being pointed at by said selectably positionable pointer.
Claim 15
Dependent Claim 124 words
The process control system of claim 10, wherein said measurement data structure format includes means for storing information useable for identifying stored measurement data; said data collection means in said operator control program includes means for storing in said stored data structure, in accordance with said measurement data structure format, data identifying information useable for identifying said stored measurement data in said stored data structure; and said data analysis program further includes means for displaying in said trend chart a data point identifier which corresponds to said data identifying information stored in the stored data structure corresponding to the data point being pointed at by said selectably positionable pointer; whereby said trend chart provides a visual indication of the identity of the measurement data.
Claim 16
Dependent Claim 132 words
The process control system of claim 10, wherein said data analysis program includes means for: displaying a trend chart in which each of the data points in the trend chart represents the mean and standard deviation of the measurement data in a corresponding data structure; defining a target value and a range of acceptable mean values for the measurement data being represented by said trend chart; and superimposing on said data points in said trend chart an indication of said target value and said range of acceptable mean values; whereby said trend chart provides a visual indication of the difference between the mean values of the collected data represented by said trend chart and said target value, and also provides a visual indication of measurements outside said range of acceptable mean values.

References Cited (Backward Citations)

US4001807A Cited
US3971000A Cited
US4303973A Cited
US4396977A Cited
US4479197A Cited
US4471348A Cited
US4570217A Cited
US4679137A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-02-14 1992-08-15 1993-02-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-02-14 1996-08-15 1997-02-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-02-14 2000-08-15 2001-02-14 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag