Transport container with an interchangeable inside container

Claim 2

A transport container for transporting and storing semiconductor wafers in a semiconductor wafer cassette, comprising: an outside hood; an outside bottom plate; an inside hood; an inside bottom plate that forms a closed inside container with said inside hood; first and second closing levers for non-positive closing of said outside hood with said outside bottom plate; a sealing element for air-tight closure of said transport container; and an interchangeable semiconductor wafer holder secured to said inside hood and hingedly moveable relative to said transporting container.

Claim 3

A transporting container as claimed in claim 1, further comprising: a filter provided in said inside bottom plate to provide a particle-free air stream into said transport container during pressure fluctuations.

Claim 4

A transport container as claimed in claim 1, further comprising: four L-shaped elevations on said inside bottom plate for receiving the semiconductor wafer cassette.

Claim 5

A transport container as claimed in claim 1, wherein said inside bottom plate includes a U-shaped edge extending about said inside bottom plate for accepting said sealing element.

Claim 6

A transport container as claimed in claim 1, further comprising: first and second inwardly directed nubs extending from said inside hood to which the semiconductor wafer holder is secured.

Claim 7

A transport container as claimed in claim 1, further comprising: outwardly direct nubs extending from said inside hood to which said outside hood is secured.

Claim 8

A transport container as claimed in claim 1, further comprising: an outwardly directed centering ring provided in a center of said inside hood.

Claim 9

A transport container as claimed in claim 1, wherein said outside hood includes depressions for securing said closing lever.

Claim 10

A transport container as claimed in claim 1, wherein said sealing element is of silicone rubber and polyethylene film.

Claim 11

A transport container as claimed in claim 9, wherein said silicone rubber sealing element has a material hardness of about 5 degrees Shore and said polyethylene film has a thickness of about 0.1 mm.

Claim 12

A transport container as claimed in claim 1, wherein said interchangeable semiconductor wafer holder includes: first and second lateral longitudinal webs; a reinforced center web; a third narrow web connected by a first film hinge to said center web extending in an upward direction; a perpendicularly disposed fourth web connected to said third narrow web by a second film hinge, said fourth web including first and second depressions for fastening to said inside hood; fifth and sixth webs connected to said center web extending by respective film hinges in a downward direction; a seventh web connected in a middle of said center web; and a spacer disposed at a lower region of said semiconductor wafer holder to provide a space between said inside bottom plate and said semiconductor wafer holder.