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US4803692A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor laser devices

Assignee: Hitachi Ltd
•
Filing: 1986-09-03
•
Granted: 1989-02-07
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Expires: 2006-09-03
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Abstract

Abstract It is possible to narrow the emission spectrum linewidth of a semiconductor laser device by coupling optically an external resonator with one end surface of the semiconductor laser. However, the structure of the external resonator should match the phase of the light emitted by the laser. Heretofore, this matching has been effected by adjusting the length of the external resonator, and hence productivity and reproducibility have not been good. According to this invention, characteristics of the external resonator can be adjusted electrically to be matched with the phase of the emitted light owing to the fact that the external resonator is made of a material, whose refractive index can be varied electrically. Therefore the semiconductor laser device according to this invention is very practical.

Inventors

  • 👤 Shinji Sakano
  • 👤 Hiroyoshi Matsumura

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 13:37
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/10; H01S3/106; H01S3/107; H01S5/00; H01S5/10; H01S5/14; H01S5/141; H01S5/06; H01S5/062; H01S5/0625; H01S5/06255; H01S5/06256; H01S5/12; H01S5/125

Claims Analysis

Total Claims: 27
Claim 1
Independent Claim 150 words
A semiconductor laser device comprising: a semiconductor laser including a semiconductor active layer formed on a semiconductor substrate and having a pair of light emitting and reflecting end surfaces, thereby defining an internal cavity, and a pair of electrodes operably connected to said semiconductor active layer for allowing a current to flow through the semiconductor active layer; a resonator having end surfaces which define an external cavity with an optic axis aligned with said semiconductor laser, the resonator being optically coupled to the semiconductor laser, the external cavity of the resonator being in contact with the internal cavity of the semiconductor laser so as to form a junction between said external cavity and said internal cavity, the resonator being made of a material which can electrically change an optical path of said external cavity; and means coupled to said resonator for electrically controlling the optical path of said external cavity.
Claim 2
Dependent Claim 150 words
A semiconductor laser device comprising: a semiconductor laser including a semiconductor active layer formed on a semiconductor substrate and having a pair of light emitting and reflecting end surfaces, thereby defining an internal cavity, and a pair of electrodes operably connected to said semiconductor active layer for allowing a current to flow through the semiconductor active layer; a resonator having end surfaces which define an external cavity with an optic axis aligned with said semiconductor laser, the resonator being optically coupled to the semiconductor laser, the external cavity of the resonator being in contact with the internal cavity of the semiconductor laser so as to form a junction between said external cavity and said internal cavity, the resonator being made of a material which can electrically change an optical path of said external cavity; and means coupled to said resonator for electrically controlling the optical path of said external cavity.
Claim 3
Dependent Claim 28 words
A semiconductor laser device according to claim 1, in which said semiconductor laser and said resonator are formed in a monolithic form on a compound semiconductor crystal substrate.
Claim 4
Dependent Claim 24 words
A semiconductor laser device according to claim 2, in which said resonator includes an area for regulating electrically the intensity of light passing therethrough.
Claim 5
Dependent Claim 34 words
A semiconductor laser device according to claim 1, wherein said material is a material which can have its refractive index electrically changed so as to electrically change said optical path of said external cavity.
Claim 6
Dependent Claim 19 words
A semiconductor laser device according to claim 4, wherein said laser and said resonator are aligned end to end.
Claim 7
Dependent Claim 23 words
A semiconductor laser device according to claim 5, wherein said laser and said resonator are mainly formed of a same III-V compound material.
Claim 8
Dependent Claim 25 words
A semiconductor laser device according to claim 6, wherein said resonator includes a reflection mirror at the opposite end to that coupled to said laser.
Claim 9
Dependent Claim 22 words
A semiconductor laser device according to claim 1, comprising means coupled to said resonator for controlling light intensity within the external cavity.
Claim 10
Dependent Claim 34 words
A semiconductor laser device according to claim 8, wherein said means coupled to said resonator for controlling light intensity within the external cavity includes a reflective and transparent area for adjusting feedback light intensity.
Claim 11
Dependent Claim 29 words
A semiconductor laser device according to claim 9, wherein the device includes an optical waveguide path, and wherein said reflective and transparent area is adjacent said optical waveguide path.
Claim 12
Dependent Claim 42 words
A semiconductor laser device according to claim 9, wherein said means coupled to said resonator for electrically controlling the optical path of said external cavity includes a phase controlling area, the phase controlling area being spaced from said reflective and transparent area.
Claim 13
Dependent Claim 31 words
A semiconductor laser device according to claim 1, wherein said external cavity is made of a crystal of material selected from the group consisting of LiNbO 3 and LiTaO 3 .
Claim 14
Dependent Claim 17 words
A semiconductor laser device according to claim 1, wherein said semiconductor laser is a distributed feedback laser.
Claim 15
Dependent Claim 21 words
A semiconductor laser device according to claim 13, wherein said distributor feedback laser includes a guiding layer adjacent said active layer.
Claim 16
Dependent Claim 24 words
A semiconductor laser device according to claim 14, wherein said semiconductor substrate is made of InP, and said guiding layer is made of InGaAsP.
Claim 17
Dependent Claim 20 words
A semiconductor laser device according to claim 1, wherein said semiconductor laser includes a guiding layer adjacent said active layer.
Claim 18
Dependent Claim 48 words
A semiconductor laser device according to claim 1, wherein said resonator includes an optical waveguide path, and said means coupled to said resonator for electrically controlling the optical path of said external cavity includes two electrodes for applying a voltage at both sides of the optical waveguide path.
Claim 19
Dependent Claim 60 words
A semiconductor laser device according to claim 1, wherein said means coupled to said resonator for electrically controlling the optical path of said external cavity is a means for controlling the optical path of the external cavity so that the phase of the light in the external cavity is matched to the phase of the light in the internal cavity.
Claim 20
Dependent Claim 35 words
A semiconductor laser device according to claim 1, wherein the means for electrically controlling the optical path of the external cavity is a means for electrically controlling the optical path length in the external cavity.
Claim 21
Dependent Claim 147 words
A semiconductor laser device comprising: a semiconductor substrate; a semiconductor laser element formed on said semiconductor substrate, said semiconductor laser element including an active layer for emitting light and semiconductor layers sandwiching the active layer, wherein the active layer and the semiconductor layers constitute an internal cavity; a resonator element formed on said semiconductor substrate, said resonator element having an optical waveguide which constitutes an external cavity, the external cavity being optically coupled with the internal cavity, the external cavity being in contact with the internal cavity so as to form a junction between the external cavity and the internal cavity, the optical waveguide including a region for changing the refractive index thereof; a first electrode formed on said semiconductor laser element; and at least one second electrode formed on said resonator element, supplying carriers to the region for changing the refractive index of the optical waveguide.
Claim 22
Dependent Claim 147 words
A semiconductor laser device comprising: a semiconductor substrate; a semiconductor laser element formed on said semiconductor substrate, said semiconductor laser element including an active layer for emitting light and semiconductor layers sandwiching the active layer, wherein the active layer and the semiconductor layers constitute an internal cavity; a resonator element formed on said semiconductor substrate, said resonator element having an optical waveguide which constitutes an external cavity, the external cavity being optically coupled with the internal cavity, the external cavity being in contact with the internal cavity so as to form a junction between the external cavity and the internal cavity, the optical waveguide including a region for changing the refractive index thereof; a first electrode formed on said semiconductor laser element; and at least one second electrode formed on said resonator element, supplying carriers to the region for changing the refractive index of the optical waveguide.
Claim 23
Dependent Claim 19 words
A semiconductor laser device according to claim 20, wherein the internal cavity and the external cavity are separate cavities.
Claim 24
Dependent Claim 46 words
A semiconductor laser device according to claim 20, comprising means, connected to said at least one second electrode, for controlling the optical waveguide such that the phase of the light in the external cavity is matched to the phase of the light in the internal cavity.
Claim 25
Dependent Claim 18 words
A semiconductor laser device according to claim 23, wherein said semiconductor laser element is a distributed feedback laser.
Claim 26
Dependent Claim 156 words
A semiconductor laser device comprising: a semiconductor substrate; a semiconductor laser element formed on said semiconductor substrate, the semiconductor laser element including an active layer for emitting light and semiconductor layers sandwiching the active layer, the active layer and semiconductor layers forming a first resonant cavity, the first resonant cavity having a pair of light emitting end surfaces, and electrode means operably connected to said semiconductor active layer for allowing a current to flow through the active layer; a second resonant cavity optically coupled with the semiconductor laser element at one of the light emitting end surfaces, the second resonant cavity being in contact with the first resonant cavity so as to provide a junction between the first resonant cavity and the second resonant cavity, wherein the second resonant cavity is made of a material, the refractive index of which is electrically changeable, so as to change an optical path length in the second resonant cavity.
Claim 27
Dependent Claim 156 words
A semiconductor laser device comprising: a semiconductor substrate; a semiconductor laser element formed on said semiconductor substrate, the semiconductor laser element including an active layer for emitting light and semiconductor layers sandwiching the active layer, the active layer and semiconductor layers forming a first resonant cavity, the first resonant cavity having a pair of light emitting end surfaces, and electrode means operably connected to said semiconductor active layer for allowing a current to flow through the active layer; a second resonant cavity optically coupled with the semiconductor laser element at one of the light emitting end surfaces, the second resonant cavity being in contact with the first resonant cavity so as to provide a junction between the first resonant cavity and the second resonant cavity, wherein the second resonant cavity is made of a material, the refractive index of which is electrically changeable, so as to change an optical path length in the second resonant cavity.

References Cited (Backward Citations)

EP0006372A1 Cited
US4485474A Cited
EP0117734A2 Cited
JPS60100491A Cited
US4631730A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-02-07 1992-08-08 1993-02-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-02-07 1996-08-08 1997-02-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-02-07 2000-08-08 2001-02-07 $7700.00 Window Closed / Lapsed

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