US4800282A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus and method for detecting residual organic compounds
Assignee: Sharp Corp
•
Filing: 1987-07-31
•
Granted: 1989-01-24
•
Expires: 2007-07-31
Abstract
Abstract In order to effectively detect unwanted residual organic compounds such as photoresist pieces left on a semiconductor substrate after a photolithography step during its fabrication process, the substrate surface is irradiated by an ultraviolet light beam and the fluorescent light emitted by the residual organic compounds is detected by a light-receiving element and converted into an electrical signal.
Inventors
- 👤 Yasunori Nishimura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 02:08
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/42
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
97 words
An apparatus for detecing residual organic compounds on a surface comprising scanning means for forming an ultraviolet light beam for irradiating a target surface and scanning said target surface with said ultraviolet light beam, detecting means for detecting fluorescent light from said target surface, and outputting a detection signal in response to said detected fluorescent light, judging means for judging the existence of residual organic compounds on said target surface from said detection signal, and display means controlled simultaneously by said scanning and judging means for displaying positions of residual organic compounds left on said target surface.
Claim 2
Independent Claim
97 words
An apparatus for detecing residual organic compounds on a surface comprising scanning means for forming an ultraviolet light beam for irradiating a target surface and scanning said target surface with said ultraviolet light beam, detecting means for detecting fluorescent light from said target surface, and outputting a detection signal in response to said detected fluorescent light, judging means for judging the existence of residual organic compounds on said target surface from said detection signal, and display means controlled simultaneously by said scanning and judging means for displaying positions of residual organic compounds left on said target surface.
Claim 3
Dependent Claim
27 words
The apparatus of claim 1 wherein said irradiating means include an ultraviolet lamp and a filter which serves to absorb visible light emitted from said ultraviolet lamp.
Claim 4
Dependent Claim
28 words
The apparatus of claim 1 wherein said detecting means include a light-receiving element which serves to receive fluorescent light and to emit an electrical signal in response thereto.
Claim 5
Dependent Claim
21 words
The apparatus of claim 1 wherein said detecting means further includes a second filter for spectroscopic analysis of said fluorescent light.
Claim 6
Dependent Claim
22 words
The apparatus of claim 1 wherein said target surface belongs to a semiconductor substrate and said residual organic compounds include photoresist pieces.
Claim 7
Independent Claim
82 words
A method of detecting residual organic compounds on a surface comprising the steps of scanning a target surface by an ultraviolet light beam from a scanning apparatus, detecting fluorescent light from said target surface, judging by a judging apparatus the existence of residual organic compounds on said target surface by analyzing said detected fluorescent light, and controlling a display device simultaneously by said scanning apparatus and said judging apparatus to display the positions of residual organic compounds left on said target surface.
Claim 8
Independent Claim
82 words
A method of detecting residual organic compounds on a surface comprising the steps of scanning a target surface by an ultraviolet light beam from a scanning apparatus, detecting fluorescent light from said target surface, judging by a judging apparatus the existence of residual organic compounds on said target surface by analyzing said detected fluorescent light, and controlling a display device simultaneously by said scanning apparatus and said judging apparatus to display the positions of residual organic compounds left on said target surface.
Claim 9
Dependent Claim
31 words
The method of claim 6 wherein said scanning step includes switching on an ultraviolet lamp and passing a beam therefrom through a filter adapted to absorb visible light in said beam.
Claim 10
Dependent Claim
23 words
The method of claim 6 wherein said positions of residual organic compounds are displayed in synchronism with the scanning of said target surface.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-01-24 | 1992-07-25 | 1993-01-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-01-24 | 1996-07-25 | 1997-01-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-01-24 | 2000-07-25 | 2001-01-24 | $7700.00 | Window Closed / Lapsed |