Abstract An apparatus for the preparation of a photoelectric conversion layer for a photoelectromotive force member includes: (a) a film-forming chamber having an inner space in which a substrate holder for a substrate is provided; (b) an exhaust pipe connected to the film-forming chamber and through a main valve to an exhaust pump; (c) a concentric triplicate conduit connected through a nozzle to the film-forming chamber. The concentric triplicate conduit includes: (i) an outer passage for introducing a gaseous raw material and formed by a circumferential wall and an inner wall having a plurality of gas liberation holes; (ii) a middle passage for applying microwave energy to said raw material gas to generate an active species and having a mixing region at the downstream side before the nozzle means, and (iii) a central passage situated horizontally within said middle passage (ii) for introducing a gaseous precursor and for transporting the gaseous precursor toward the film-forming chamber and being open at its end positioned in the mixing region leaving a desired distance to the nozzle means; said middle passage (ii) being formed by the inner wall of the outer passage and a circumferential wall of the central psssage (iii). Also included are: (d) a feed pipe for introducing said raw material to said outer passage (i); (e) a microwave power source for generating said microwave energy; and (f) a feed pipe for introducing said gaseous precursor to said central passage (iii).
An apparatus for the preparation of a photoelectric conversion layer for a photoelectromotive force member comprising: (a) a film-forming chamber having an inner space in which a substrate holder for a substrate is provided; (b) an exhaust pipe connected to said film-forming chamber and through a main valve to an exhaust pump; (c) a concentric triplicate conduit connected through a nozzle means to said film forming chamber; said concentric triplicate conduit comprising: (i) an outer passage for introducing a gaseous raw material and being formed by a circumferential wall and an inner wall having a plurality of gas liberation holes; (ii) a middle passage for applying microwave energy to said gaseous raw material to generate an active species and having a mixing region at the downstream side before the nozzle means, and (iii) a central passage situated horizontally within said middle passage (ii) for introducing a gaseous precursor and for transporting said gaseous precursor toward the film-forming chamber and being open at an end positioned in the mixing region and leaving a predetermined distance to the nozzle means; said middle passage (ii) being formed by the inner wall of said outer passage and a circumferential wall of the central passage (iii); (d) a feed pipe for introducing said gaseous raw material to said outer passage (i); (e) a microwave power source for generating said microwave energy; and (f) a feed pipe for introducing said gaseous precursor to said central passage (iii).
Claim 2
Independent Claim
241 words
An apparatus for the preparation of a photoelectric conversion layer for a photoelectromotive force member comprising: (a) a film-forming chamber having an inner space in which a substrate holder for a substrate is provided; (b) an exhaust pipe connected to said film-forming chamber and through a main valve to an exhaust pump; (c) a concentric triplicate conduit connected through a nozzle means to said film forming chamber; said concentric triplicate conduit comprising: (i) an outer passage for introducing a gaseous raw material and being formed by a circumferential wall and an inner wall having a plurality of gas liberation holes; (ii) a middle passage for applying microwave energy to said gaseous raw material to generate an active species and having a mixing region at the downstream side before the nozzle means, and (iii) a central passage situated horizontally within said middle passage (ii) for introducing a gaseous precursor and for transporting said gaseous precursor toward the film-forming chamber and being open at an end positioned in the mixing region and leaving a predetermined distance to the nozzle means; said middle passage (ii) being formed by the inner wall of said outer passage and a circumferential wall of the central passage (iii); (d) a feed pipe for introducing said gaseous raw material to said outer passage (i); (e) a microwave power source for generating said microwave energy; and (f) a feed pipe for introducing said gaseous precursor to said central passage (iii).
Claim 3
Dependent Claim
15 words
The apparatus according to claim 1, wherein said predetermined distance is 0.1 to 200 mm.
Claim 4
Dependent Claim
20 words
The apparatus according to claim 1, wherein the film-forming chamber is provided with a plurality of said concentric triplicate conduits.
Claim 5
Dependent Claim
27 words
The apparatus according to claim 1, wherein the substrate holder is provided with a rotary shaft connected to a motor to rotate, lift and lower the substrate.
Claim 6
Dependent Claim
20 words
The apparatus according to claim 1, wherein means to apply light or heat energy to the inner space is provided.
Claim 7
Dependent Claim
13 words
The apparatus according to claim 5, wherein said means comprises an infrared lamp.
Claim 8
Dependent Claim
22 words
The apparatus according to claim 5 wherein said infrared lamp is provided with a mirror for reflecting infrared radiation toward the substrate.