US4797696A
Expired / Lapsed
US
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Beam splitting apparatus
Assignee: Applied Materials Inc
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Filing: 1987-09-21
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Granted: 1989-01-10
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Expires: 2007-09-21
Abstract
Abstract An apparatus for splitting radiant energy beams produced by a laser or other light source. The apparatus comprises a plurality of mirrors, each aligned to reflect a beam or plurality of beams from one mirror to the next. Each mirror comprises a glass body with a layer of 50% reflective coating and a layer of anti-reflecting coating on one side of the body. A layer of 100% reflective coating is on the other side of the body. A beam is, thus, 50% reflected from the first reflective layer and allowed 50% to pass through the layer. The remainder of the beam is reflected from the 100% reflective layer.
Inventors
- 👤 Paul C. Allen
- 👤 Paul A. Warkentin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 05:13
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70383; G03F7/704
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
106 words
An apparatus for operating a pattern on a workpiece comprising: a laser for providing a radiant energy beam; beam splitting means optically coupled to said laser, comprising a first beam splitting mirror for receiving said beam from said laser, and for splitting said beam into two beams, said first beam splitting mirror comprising a body and a first and second reflective layer; said first reflective layer covering approximately one half of one side of said body and generally parallel with said second reflective layer; modulation means for independently modulating each of said plurality of beams, said modulation means being optically coupled to said beam splitting means.
Claim 2
Independent Claim
106 words
An apparatus for operating a pattern on a workpiece comprising: a laser for providing a radiant energy beam; beam splitting means optically coupled to said laser, comprising a first beam splitting mirror for receiving said beam from said laser, and for splitting said beam into two beams, said first beam splitting mirror comprising a body and a first and second reflective layer; said first reflective layer covering approximately one half of one side of said body and generally parallel with said second reflective layer; modulation means for independently modulating each of said plurality of beams, said modulation means being optically coupled to said beam splitting means.
Claim 3
Dependent Claim
63 words
An apparatus, as recited by claim 1, wherein said beam splitting means further includes a second beam splitting mirror for receiving said two beams from said from said first mirror and for splitting said two beams into four beams, and a third beam splitting mirror for receiving said four beams from said second mirror and for splitting said four beams into eight beams.
Claim 4
Independent Claim
124 words
An apparatus for generating a pattern on a workpiece, comprising: a beam generating means for providing a radiant energy beam; a beam splitting means optically coupled to said beam generation means comprising a first beam splitting mirror for receiving said beam from said laser and for splitting said beam into two beams, said first beam splitting mirror comprising: a body; a first reflective layer covering a first portion of a first surface of said body, said body not covered by said first reflective layer on a second portion of said first surface of said body; a second reflective layer covering at least a second portion of a second surface of said body, said second reflective layer being generally parallel with said first reflective layer.
Claim 5
Independent Claim
124 words
An apparatus for generating a pattern on a workpiece, comprising: a beam generating means for providing a radiant energy beam; a beam splitting means optically coupled to said beam generation means comprising a first beam splitting mirror for receiving said beam from said laser and for splitting said beam into two beams, said first beam splitting mirror comprising: a body; a first reflective layer covering a first portion of a first surface of said body, said body not covered by said first reflective layer on a second portion of said first surface of said body; a second reflective layer covering at least a second portion of a second surface of said body, said second reflective layer being generally parallel with said first reflective layer.
Claim 6
Dependent Claim
61 words
The apparatus, as recited by claim 3 wherein said beam splitting means further comprises a second beam splitting mirror for receiving said two beams from said first mirror and for splitting said two beams into four beams, and a third beam splitting mirror for receiving said four beams from said second mirror and for splitting said four beams into eight beams.
Claim 7
Dependent Claim
36 words
The apparatus, as recited by claim 3, wherein said first mirror further comprises: a second surface of said body being coated with a second reflective layer, said second surface being generally parallel to said first surface.
Claim 8
Dependent Claim
14 words
The apparatus, as recited by claim 5, wherein said body is comprised of glass.
Claim 9
Dependent Claim
16 words
The apparatus, as recited by claim 5, wherein said first reflective layer is approximately 50% reflective.
Claim 10
Dependent Claim
16 words
The apparatus, as recited by claim 5, wherein said second reflective layer is approximately 100% reflective.
Claim 11
Dependent Claim
116 words
In an apparatus for splitting a radiant energy beam, said radiant energy beam being generated by a laser or other source, an improvement comprising: a first beam splitting means for splitting said beam into a plurality of beams, said first beam splitting means comprising: (1) a transparent body; (2) a first reflective layer coupled with said body for partially reflecting said beam, said first reflective layer partially covering a first surface of said transparent body; (3) a second reflective layer for reflecting said beam coupled with said body, said second reflective layer being generally parallel with said first reflective layer; whereby, a beam entering said first beam splitting means is split into a plurality of beams.
Claim 12
Dependent Claim
116 words
In an apparatus for splitting a radiant energy beam, said radiant energy beam being generated by a laser or other source, an improvement comprising: a first beam splitting means for splitting said beam into a plurality of beams, said first beam splitting means comprising: (1) a transparent body; (2) a first reflective layer coupled with said body for partially reflecting said beam, said first reflective layer partially covering a first surface of said transparent body; (3) a second reflective layer for reflecting said beam coupled with said body, said second reflective layer being generally parallel with said first reflective layer; whereby, a beam entering said first beam splitting means is split into a plurality of beams.
Claim 13
Dependent Claim
27 words
The improvement, as recited in claim 9, wherein said first beam splitting means further comprises an anti-reflective layer coupled with said body and said first reflective layer.
Claim 14
Dependent Claim
16 words
The improvement, as recited by claim 10, wherein said first reflective layer is approximately 50% reflective.
Claim 15
Dependent Claim
16 words
The improvement, as recited by claim 11, wherein said second reflective layer is approximately 100% reflective.
Claim 16
Dependent Claim
14 words
The improvement, as recited by claim 12, wherein said body is comprised of glass.
Claim 17
Dependent Claim
21 words
The improvement, as recited by claim 13, wherein said beam splitting apparatus further comprises a second and third beam splitting means.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-01-10 | 1992-07-11 | 1993-01-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-01-10 | 1996-07-11 | 1997-01-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-01-10 | 2000-07-11 | 2001-01-10 | $7700.00 | Window Closed / Lapsed |