US4797530A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ceramic circuit substrates and methods of manufacturing same
Assignee: Toshiba Corp
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Filing: 1986-12-10
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Granted: 1989-01-10
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Expires: 2006-12-10
Abstract
Abstract A ceramic circuit substrate can be manufactured by a method comprising the steps of (i) providing an electrically insulating ceramic substrate; and (ii) irradiating a predetermined region of said ceramic substrate with an energy beam such that at least a portion of said region is rendered conductive.
Inventors
- 👤 Nobuo Iwase
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 19:13
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/0036; C04B41/53; C04B41/80; C04B41/91; H; H05; H05K; H05K3/00; H05K3/10; H05K3/105; C04B2111/00; C04B2111/00474; C04B2111/00844; H05K2203/00; H05K2203/10; H05K2203/107; H05K2203/11; H05K2203/1136; H10; H10W; H10W72/00; H10W72/50; H10W72/531; H10W72/5363; H10W72/541; H10W72/5449; H10W90/00; H10W90/701; H10W90/751; H10W90/754; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155
Claims Analysis
Total Claims: 46
Claim 1
Independent Claim
63 words
A method of manufacturing ceramic circuit substrate, comprising the steps of: (i) providing an electrically insulating ceramic substrate that is comprised of at least one material selected from the group consisting of aluminum nitride and silicon nitride; and (ii) irradiating a predetermined region of said ceramic substrate with an energy beam such that at least a portion of said region is rendered conductive.
Claim 2
Independent Claim
63 words
A method of manufacturing ceramic circuit substrate, comprising the steps of: (i) providing an electrically insulating ceramic substrate that is comprised of at least one material selected from the group consisting of aluminum nitride and silicon nitride; and (ii) irradiating a predetermined region of said ceramic substrate with an energy beam such that at least a portion of said region is rendered conductive.
Claim 3
Dependent Claim
21 words
A method as claimed in claim 1, wherein said irradiating converts said portion of said ceramic substrate to a metallic form.
Claim 4
Dependent Claim
20 words
A method as claimed in claim 1, wherein the irradiated position of said ceramic substrate is moved during step (ii).
Claim 5
Dependent Claim
15 words
A method as claimed in claim 1, wherein said energy beam is a laser beam.
Claim 6
Dependent Claim
34 words
A method as claimed in claim 1, wherein said conductor portion is formed in a groove of said ceramic substrate, said groove being formed by said irradiating of said ceramic substrate during step (ii).
Claim 7
Dependent Claim
14 words
A method as claimed in claim 1, wherein said conductive portion is substantially resistance-free.
Claim 8
Dependent Claim
14 words
A method as claimed in claim 1, wherein said conductive portion is a resistor.
Claim 9
Dependent Claim
26 words
A method as claimed in claim 1, wherein step (ii) comprises cutting said ceramic substrate to form a surface on which said conductive portion is provided.
Claim 10
Dependent Claim
17 words
A method as claimed in claim 8, wherein said surface extends the width of said ceramic substrate.
Claim 11
Dependent Claim
40 words
A method as claimed in claim 1, further comprising the step of forming a plurality of conductors distinct from said conductive portion on said ceramic substrate, wherein at least two conductors of said plurality are connected by said conductive portion.
Claim 12
Dependent Claim
29 words
A method as claimed in claim 10, wherein said two conductors are for signal input and for ground supply voltage, respectively, and said conductive portion is a resistor therebetween.
Claim 13
Dependent Claim
31 words
A method as claimed in claim 1, wherein a passage through said ceramic substrate is formed by said irradiating and said conductive portion is provided on inner wall of said passage.
Claim 14
Dependent Claim
49 words
A method as claimed in claim 12, further comprising the step of forming conductors on the front and back surface of said ceramic substrate, such that the conductor on the back surface of said ceramic substrate is connected by said conductive portion to the conductor on the front surface.
Claim 15
Dependent Claim
18 words
A method as claimed in claim 1, wherein said conductive portion penetrates the thickness of said irradiated region.
Claim 16
Dependent Claim
22 words
A method as claimed in claim 14, wherein step (ii) comprises irradiating both the front and back surfaces of said ceramic substrate.
Claim 17
Dependent Claim
38 words
A method as claimed in claim 14, further comprising the step of forming conductors on front and back surfaces of said ceramic substrate, respectively, said conductors being connected to each other by said conductive portion penetrating said region.
Claim 18
Dependent Claim
59 words
A ceramic circuit substrate, comprising: an electrically insulating ceramic substrate that is comprised of at least one material selected from the group consisting of aluminum nitride and silicon nitride; and a conductive region formed at the surface of said ceramic substrate, said conductive region consisting essentially of a metallic element formed by reduction of material comprising said ceramic substrate.
Claim 19
Dependent Claim
59 words
A ceramic circuit substrate, comprising: an electrically insulating ceramic substrate that is comprised of at least one material selected from the group consisting of aluminum nitride and silicon nitride; and a conductive region formed at the surface of said ceramic substrate, said conductive region consisting essentially of a metallic element formed by reduction of material comprising said ceramic substrate.
Claim 20
Dependent Claim
19 words
A method as claimed in claim 1, wherein said ceramic substrate comprises a front surface and a back surface.
Claim 21
Dependent Claim
29 words
A method as claimed in claim 18, wherein said ceramic substrate consists essentially of at least one material selected from the group consisting of aluminum nitride and silicon nitride.
Claim 22
Dependent Claim
13 words
A method as claimed in claim 19, wherein said material is aluminum nitride.
Claim 23
Dependent Claim
21 words
A method as claimed in claim 20, wherein said irradiating step is capable of converting said portion into a metallic form.
Claim 24
Dependent Claim
20 words
A method as claimed in claim 20, wherein said irradiated position of said ceramic substrate is moved during step (ii).
Claim 25
Dependent Claim
15 words
A method as claimed in claim 20, wherein said energy beam is a laser beam.
Claim 26
Dependent Claim
30 words
A method as claimed in claim 20, wherein said step (ii) is capable of producing a groove in said ceramic substrate and said conductive portion is formed in the groove.
Claim 27
Dependent Claim
14 words
A method as claimed in claim 20, wherein said conductive portion is substantially resistance-free.
Claim 28
Dependent Claim
28 words
A method as claimed in claim 20, wherein step (ii) further comprises cutting said ceramic substrate to produce a surface on which said conductive portion can be formed.
Claim 29
Dependent Claim
17 words
A method as claimed in claim 26, wherein said surface extends the width of the ceramic substrate.
Claim 30
Dependent Claim
40 words
A method as claimed in claim 20, further comprising the step of (iii) forming on said ceramic substrate, a plurality of conductors distinct from said conductive portion, wherein at least two of said conductors are connected by said conductive portion.
Claim 31
Dependent Claim
39 words
A method as claimed in claim 28, wherein one of said two conductors is used for signal input and the other of said two conductors is used for ground supply voltage, and said conductive portion is a resistor therebetween.
Claim 32
Dependent Claim
35 words
A method as claimed in claim 20, wherein said step (ii) is capable of producing through said ceramic substrate a passage comprising an inner wall and said conductive portion is provided on said inner wall.
Claim 33
Dependent Claim
50 words
A method as claimed in claim 30, further comprising the step of (iii) forming conductors on both the front and back surfaces of said ceramic substrate, wherein at least one conductor on the back surface is connected by said conductive portion to at least one conductor on the front surface.
Claim 34
Dependent Claim
18 words
A method as claimed in claim 20, wherein said conductive portion penetrates the thickness of the irradiated region.
Claim 35
Dependent Claim
22 words
A method as claimed in claim 32, wherein step (ii) comprises irradiating both the front and back surfaces of said ceramic substrate.
Claim 36
Dependent Claim
46 words
A method as claimed in claim 32, further comprising the step of (iii) forming on said front and back surfaces of said ceramic substrate, a plurality of conductors distinct from said conductive portion, wherein at least two of said conductors are connected by said conductive portion.
Claim 37
Dependent Claim
16 words
A method as claimed in claim 19, wherein said ceramic substrate consists essentially of silicon nitride.
Claim 38
Dependent Claim
21 words
A method as claimed in claim 35, wherein said irradiating step is capable of converting said portion into a metallic form.
Claim 39
Dependent Claim
20 words
A method as claimed in claim 35, wherein said irradiated position of said ceramic substrate is moved during step (ii).
Claim 40
Dependent Claim
15 words
A method as claimed in claim 35, wherein said energy beam is a laser beam.
Claim 41
Dependent Claim
30 words
A method as claimed in claim 35, wherein said step (ii) is capable of producing a groove in said ceramic substrate and said conductive portion is formed in the groove.
Claim 42
Dependent Claim
31 words
A ceramic circuit substrate as claimed in claim 17, wherein said ceramic substrate consists essentially of at least one material selected from the group consisting of aluminum nitride and silicon nitride.
Claim 43
Dependent Claim
18 words
A ceramic circuit substrate as claimed in claim 40, wherein said ceramic substrate consists essentially of aluminum nitride.
Claim 44
Dependent Claim
18 words
A ceramic circuit substrate as claimed in claim 40, wherein said ceramic substrate consists essentially of silicon nitride.
Claim 45
Dependent Claim
13 words
A method as claimed in claim 1, wherein said material is aluminum nitride.
Claim 46
Dependent Claim
13 words
A method as claimed in claim 1, wherein said material is silicon nitride.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-01-10 | 1992-07-11 | 1993-01-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-01-10 | 1996-07-11 | 1997-01-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-01-10 | 2000-07-11 | 2001-01-10 | $7700.00 | Window Closed / Lapsed |