Linear motor-driven X-Y table

Claim 1

Apparatus comprising: (a) a stationary bed; (b) a table body disposed juxtaposed to said stationary bed to be movable adapted for movement in both X-and Y-axis directions in an X-Y coordinate system; (c) linear bearing means supporting said table body for movement providing (1) a first track member secured to an upper surface of said stationary bed and extending in one of said directions, (2) a second track member extending in the other of said directions, said second track member supporting said table body, and (3) bearing body means operatively engaged with said first and second track members, said bearing body means permitting ease in sliding movement of said second track member along and in directions of said first track member and in directions perpendicular thereto; and (d) a linear motor interposed between said stationary bed and said table body for driving said table body with respect to said stationary bed, said linear motor providing (1) a fixed member disposed on one of an upper surface of the stationary bed and a lower surface of the table body, said fixed member formed with fixed teeth located in a single plane. (2) a first and second movable members also disposed in a single plane in operative association with said fixed member on the other of the lower surface of the table body and the upper surface of the stationary bed, one of said first and second members located along one of said directions and the other of said members located along the other of said directions, and (3) magnetic means for moving said first and second movable members relative to said fixed member within said X-Y coordinate system.