US4787980A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ultra pure water system monitoring
Assignee: Solutia Inc
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Filing: 1986-10-01
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Granted: 1988-11-29
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Expires: 2006-10-01
Abstract
Abstract This invention is directed to a hydraulic multiplex unit for receiving continuously one or more samples of liquid from a liquid purification system of distribution system and redirecting such sample or samples randomly or in sequence to one or more analytical instruments. The sample collecting system and multiplex unit is periodically backflushed with ozone to maintain the collection and analysis system clean of impurities, particles and the like which adversely affect the composition of the fluid samples.
Inventors
- 👤 Arthur J. Ackermann
- 👤 Robert A. Craven
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 21:43
CPC Classifications
G; G01; G01N; G01N33/00; G01N33/18; B; B01; B01D; B01D61/00; B01D61/02; B01D61/12; C; C02; C02F; C02F1/00; C02F1/44; C02F1/441; C02F1/30; C02F1/32; C02F1/42; C02F9/00
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
73 words
A method of continuously sampling one or more points in a fluid purification system and/or in a distribution system loop for using the purified fluid and analyzing each sample for one or more characterizations comprising continuously feeding each sample stream to a multiplex unit and manipulating said multiplex unit to direct each continuous sample stream to the desired analytical instrument for analysis, or to a drain or recycled to the fluid purification system.
Claim 2
Independent Claim
73 words
A method of continuously sampling one or more points in a fluid purification system and/or in a distribution system loop for using the purified fluid and analyzing each sample for one or more characterizations comprising continuously feeding each sample stream to a multiplex unit and manipulating said multiplex unit to direct each continuous sample stream to the desired analytical instrument for analysis, or to a drain or recycled to the fluid purification system.
Claim 3
Dependent Claim
20 words
The method of claim 1 wherein said sample streams are continuously directed to a plurality of analytical instruments for analysis.
Claim 4
Dependent Claim
22 words
The method of claim 1 wherein said sample streams are continuously directed in sequence to a plurality of analytical instruments for analysis.
Claim 5
Dependent Claim
26 words
The method of claim 1 wherein the piping or lines containing said sample steams to said multiplexer are periodically backflushed with ozone gas or ozoninated fluid.
Claim 6
Dependent Claim
15 words
The method of claim 1 wherein said fluid is water which is purified and deionized.
Claim 7
Dependent Claim
25 words
The method of claim 1 wherein said method is used in the water purification system and use distribution system for processes in the electronics industry.
Claim 8
Dependent Claim
16 words
The method of claim 6 wherein said process is the production of electronic grade semiconductor substrates.
Claim 9
Dependent Claim
12 words
The method of claim 6 wherein said semiconductor substrates are silicon wafers.
Claim 10
Dependent Claim
25 words
The method of claim 1 wherein said method is used in the water purification system and distribution system loop for processes in the pharmaceutical industry.
Claim 11
Dependent Claim
26 words
The method of claim 1 wherein said method is used in the water purification system and distribution system loop for processes in the electrical utilities industry.
Claim 12
Dependent Claim
83 words
In the fluid purification system and distribution system loop of the purified fluid, the improvement comprising means for continuously obtaining fluid samples at one or more selected points in said purification and distribution systems and feeding said samples continuously to a multiplexer unit containing a valve system which is capable of being manipulated to direct the fluid samples to one or more analytical instruments for measuring a characteristic of said fluid samples or to a drain or recycled to the fluid purification system.
Claim 13
Dependent Claim
83 words
In the fluid purification system and distribution system loop of the purified fluid, the improvement comprising means for continuously obtaining fluid samples at one or more selected points in said purification and distribution systems and feeding said samples continuously to a multiplexer unit containing a valve system which is capable of being manipulated to direct the fluid samples to one or more analytical instruments for measuring a characteristic of said fluid samples or to a drain or recycled to the fluid purification system.
Claim 14
Dependent Claim
24 words
The improvement of claim 11 wherein said samples can be directed in parallel or in sequence or in random fashion to said analytical instruments.
Claim 15
Dependent Claim
35 words
The improvement of claim 11 wherein said samples are transported in fluorinated tubing or piping from said sample points in the purification and use distribution systems to the multiplexer means and onto the analytical instruments.
Claim 16
Dependent Claim
31 words
The improvement of claim 11 wherein means are provided for directing said sample streams to a drain or to recycle to the purification system when analysis thereof is not being obtained.
Claim 17
Dependent Claim
14 words
The improvement of claim 11 wherein said multiplexer valves are controlled by electronic means.
Claim 18
Dependent Claim
14 words
The improvement of claim 15 wherein said electronic means is a programmed electronic controller.
Claim 19
Dependent Claim
12 words
The improvement of claim 11 wherein said multiplexer valves are controlled manually.
Claim 20
Dependent Claim
10 words
The improvement of claim 11 wherein said fluid is water.
Claim 21
Dependent Claim
17 words
The improvement of claim 18 wherein said purification and distribution systems are used in the pharmaceutical industry.
Claim 22
Dependent Claim
18 words
The improvement of claim 18 wherein said purification and distribution systems are used in the electrical utilities industry.
Claim 23
Dependent Claim
19 words
The improvement of claim 11 wherein said purification and distribution systems are used in the manufacture of semiconductor wafers.
Claim 24
Dependent Claim
12 words
The improvement of claim 21 wherein said semiconductor substrates are silicon wafers.
Claim 25
Dependent Claim
30 words
The improvement of claim 11 wherein said multiplexer contains means for introducing ozone gas or ozonated fluid into the sample lines or piping for backflushing to remove impurities and contamination.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-11-29 | 1992-05-30 | 1992-11-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-11-29 | 1996-05-30 | 1996-11-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-11-29 | 2000-05-30 | 2000-11-29 | $7700.00 | Window Closed / Lapsed |