US4785220A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multi-cathode metal vapor arc ion source
Assignee: University of California
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Filing: 1987-03-13
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Granted: 1988-11-15
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Expires: 2007-03-13
Abstract
Abstract An ion generating apparatus utilizing a vacuum chamber, a cathode and an anode in the chamber. A source of electrical power produces an arc or discharge between the cathode and anode. The arc is sufficient to vaporize a portion of the cathode to form a plasma. The plasma is directed to an extractor which separates the electrons from the plasma, and accelerates the ions to produce an ion beam. One embodiment of the appaatus utilizes a multi-cathode arrangement for interaction with the anode.
Inventors
- 👤 Ian G. Brown
- 👤 Robert A. MacGill
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:53
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/08; H01J27/14
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
235 words
An apparatus for generating an ion beam comprising: a. a vacuum enclosure; b. a support member having at least a movable portion located in said vacuum chamber; c. a plurality of cathodes located on said movable portion of said support member, said plurality of cathodes being spaced from one another on said movable portion of said support member; d. an anode located in one region of said vacuum chamber; e. means for transporting said movable portion of said support member and any one of said plurality of cathodes located on said support member to a selected distance from said anode in said one region of said vacuum chamber; f. a source of electrical power defining an electrical potential between said one of said cathodes and said anode; g. means for producing an electrical arc between said one of said cathodes, located a selected distance from said anode, and said anode sufficient to vaporize and ionize a portion of said cathode to form a plasma; h. means for guiding said plasma away form said one of said cathodes and anode in said one region of said vacuum chamber, in a predetermined direction to another region of said vacuum chamber spaced from said one of said cathodes and said anode; and i. means for extracting ions from said plasma in said another region of said vacuum chamber spaced from said one of said cathodes and said anode.
Claim 2
Independent Claim
235 words
An apparatus for generating an ion beam comprising: a. a vacuum enclosure; b. a support member having at least a movable portion located in said vacuum chamber; c. a plurality of cathodes located on said movable portion of said support member, said plurality of cathodes being spaced from one another on said movable portion of said support member; d. an anode located in one region of said vacuum chamber; e. means for transporting said movable portion of said support member and any one of said plurality of cathodes located on said support member to a selected distance from said anode in said one region of said vacuum chamber; f. a source of electrical power defining an electrical potential between said one of said cathodes and said anode; g. means for producing an electrical arc between said one of said cathodes, located a selected distance from said anode, and said anode sufficient to vaporize and ionize a portion of said cathode to form a plasma; h. means for guiding said plasma away form said one of said cathodes and anode in said one region of said vacuum chamber, in a predetermined direction to another region of said vacuum chamber spaced from said one of said cathodes and said anode; and i. means for extracting ions from said plasma in said another region of said vacuum chamber spaced from said one of said cathodes and said anode.
Claim 3
Dependent Claim
61 words
The apparatus of claim 1 in which said means for producing an electrical arc between said one of said cathodes and said anode includes a trigger electrode connected to a source of electrical voltage, said trigger electrode being positioned adjacent said one of said cathodes transported to a selected distance from said anode in said one region of said vacuum chamber.
Claim 4
Dependent Claim
35 words
The apparatus of claim 1 in which said transporting means includes a disc rotatable on a shaft, and means for turning said shaft, each of said plurality of cathodes being located on said rotatable disc.
Claim 5
Dependent Claim
27 words
The apparatus of claim 3 in which said means for turning said shaft includes a gripping member linked to said shaft and extending outside said vacuum chamber.
Claim 6
Dependent Claim
22 words
The apparatus of claim 4 in which said gripping member includes locking means for fixing said gripping member in a selected position.
Claim 7
Dependent Claim
14 words
The apparatus of claim 1 which additionally comprises means for cooling said support member.
Claim 8
Dependent Claim
30 words
The apparatus of claim 1 in which said means for extracting ions from the plasma is placed within said vacuum chamber a selected distance from said cathode and said anode.
Claim 9
Dependent Claim
50 words
The apparatus of claim 1 in which said means for producing an electrical arc includes a trigger conductor and a conductive trigger collar at least partially surrounding said cathode, said trigger conductor contacting said trigger collar when said one of said cathodes lies at said selected distance from said anode.
Claim 10
Dependent Claim
18 words
The apparatus of claim 8 which additionally comprises an insulation member interposed said trigger collar and said cathode.
Claim 11
Dependent Claim
51 words
The apparatus of claim 1 which additionally comprises an electrical shield interposed said plurality of cathodes and said anode, said shield providing an opening opposite said anode and said one of said plurality of cathodes when said one of said plurality of cathodes lies at said selected distance from said anode.
References Cited (Backward Citations)
US2677061A
Cited
US3096435A
Cited
US3512030A
Cited
US3562575A
Cited
US3955118A
Cited
US4570106A
Cited
US4496881A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-11-15 | 1992-05-16 | 1992-11-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-11-15 | 1996-05-16 | 1996-11-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-11-15 | 2000-05-16 | 2000-11-15 | $7700.00 | Window Closed / Lapsed |