US4781900A
Expired / Lapsed
US
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Process and composition for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom
Assignee: Entegris Inc
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Filing: 1988-02-11
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Granted: 1988-11-01
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Expires: 2008-02-11
Abstract
Abstract A process for purifying a gaseous mixture comprising arsine, phosphine, ammonia, and/or inert gases, to remove Lewis acid and/or oxidant impurities therefrom, comprising contacting the mixture with a scavenger including a support having associated therewith an anion which is effective to remove such impurities, such anion being selected from one or more members of the group consisting of: (i) carbanions whose corresponding protonated compounds have a pKa value of from about 22 to about 36; and (ii) anions formed by reaction of such carbanions with the primary component of the mixture.
Inventors
- 👤 Glenn M. Tom
- 👤 Duncan W. Brown
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 23:05
CPC Classifications
C; C01; C01B; C01B6/00; C01B6/06; C01B6/065; B; B01; B01J; B01J20/00; B01J20/30; B01J20/32; B01J20/3202; B01J20/3204; B01J20/3206; B01J20/3208; B01J20/321; B01J20/3231; B01J20/3234; B01J20/3242; B01J20/3244; B01J20/3246; B01J20/3248; B01J20/3255; B01J20/3265; C01B21/00; C01B21/04; C01B21/0405; C01B21/0411; C01B21/0427; C01B23/00; C01B25/00; C01B25/06
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
174 words
A process for purifying a gaseous mixture comprising (i) a primary component selected from one or more members of the group consisting of arsine, phosphine, ammonia, and inert gases, and (ii) impurities selected from one or more members of the group consisting of Lewis acids and oxidants, to remove said impurities therefrom, comprising: Contacting the mixture with a scavenger including a support having a surface area in the range of from about 50 to about 1,000 square meters per gram of support, with said support having associated therewith, but not covalently bonded thereto, an anion which is reactive to effect the removal of said impurities, said anion being selected from one or more members of the group consisting of: (i) carbanions whose corresponding protonated compounds have a pK a value of from about 22 to about 36; and (ii) anions formed by reaction of said carbanions with the primary component of said mixture, when said primary component of said mixture comprises one or more members of the group consisting of arsine, phosphine, and ammonia.
Claim 2
Dependent Claim
174 words
A process for purifying a gaseous mixture comprising (i) a primary component selected from one or more members of the group consisting of arsine, phosphine, ammonia, and inert gases, and (ii) impurities selected from one or more members of the group consisting of Lewis acids and oxidants, to remove said impurities therefrom, comprising: Contacting the mixture with a scavenger including a support having a surface area in the range of from about 50 to about 1,000 square meters per gram of support, with said support having associated therewith, but not covalently bonded thereto, an anion which is reactive to effect the removal of said impurities, said anion being selected from one or more members of the group consisting of: (i) carbanions whose corresponding protonated compounds have a pK a value of from about 22 to about 36; and (ii) anions formed by reaction of said carbanions with the primary component of said mixture, when said primary component of said mixture comprises one or more members of the group consisting of arsine, phosphine, and ammonia.
Claim 3
Dependent Claim
36 words
A process according to claim 1, wherein said anion is a carbanion whose corresponding protonated compound has a pK a value of from about 22 to about 36, said carbanion being directly reactive with said impurities.
Claim 4
Dependent Claim
23 words
A process according to claim 2, wherein the corresponding protonated compound is selected from the group consisting of fluorene, xanthene, triphenylmethane, and diphenylmethane.
Claim 5
Dependent Claim
24 words
A process according to claim 2, wherein the carbanion is protonated by Lewis acid impurities during contacting of the gaseous mixture with the scavenger.
Claim 6
Dependent Claim
34 words
A process according to claim 2, wherein the carbanion is present as an anionic moiety of a compound of the formula MA, wherein: M is a metal or organometal; and A is said carbanion.
Claim 7
Dependent Claim
20 words
A process according to claim 2, wherein the primary component is substantially non-deprotonated in the contacting thereof with the scavenger.
Claim 8
Dependent Claim
19 words
A process according to claim 2, wherein the primary component is arsine, and the carbanion comprises a fluorene carbanion.
Claim 9
Dependent Claim
29 words
A process according to claim 2, wherein the primary component is phosphine, and the anion comprises a carbanion selected from the group consisting of fluorene carbanions and xanthene carbanions.
Claim 10
Dependent Claim
47 words
A process according to claim 1, wherein said anion is formed by reaction of a said carbanion with the primary component of said mixture, and the primary component of the mixture is selected from one or more members of the group consisting of arsine, phosphine, and ammonia.
Claim 11
Dependent Claim
19 words
A process according to claim 9, wherein arsine is the primary component, and the anion comprises an arsenide anion.
Claim 12
Dependent Claim
19 words
A process according to claim 9, wherein phosphine is the primary component, and the anion comprises a phosphide anion.
Claim 13
Dependent Claim
26 words
A process according to claim 1, wherein the support is a material selected from the group consisting of macroreticulate polymers, aluminosilicates, alumina, silica, kieselguhr, and carbon.
Claim 14
Dependent Claim
33 words
A process according to claim 1, wherein the support is a macroreticulate polymer formed from monomers selected from those of the group consisting of styrene, vinyltoluene, vinylisopropylbenzene, vinylnaphthalene, alpha-methylstyrene, beta-methylstyrene, and mixtures thereof.
Claim 15
Dependent Claim
28 words
A process according to claim 13, wherein the polymer has been polymerized in the presence of a cross-linking agent selected from the group consisting of divinylbenzene and divinylnaphthalene.
Claim 16
Dependent Claim
11 words
A process according to claim 13, wherein the polymer is poly(styrene-divinylbenzene)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1991-11-01 | 1992-05-02 | 1992-11-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-11-01 | 1996-05-02 | 1996-11-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-11-01 | 2000-05-02 | 2000-11-01 | $7700.00 | Window Closed / Lapsed |